Microelectronic Res Institute of Chinese Academy of Sciences and Real Core Beijing Semiconductor Ltd Responsibility File Chinese Patent Application for Silicon Nitride Deposition Method and Manufacturing Method of Semiconductor Device

Media coverage

• Title	Microelectronic Res Institute of Chinese Academy of Sciences and Real Core Beijing Semiconductor Ltd Responsibility File Chinese Patent Application for Silicon Nitride Deposition Method and Manufacturing Method of Semiconductor Device
  Media name/outlet	Global IP News. Semiconductor Patent News
  Country/Territory	India
  Date	23/2/21
  URL	ct.moreover.com/?a=50092735973&p=1gw&v=1&x=6QpHBMyQYcWF-IMrEXkPfg
  Persons	Jung-Hyun Kim