Samsung Electronics Submits Korean Patent Application for Unit for Supplying Precursor Substrate Processing Apparatus and Method for Manufacturing Semiconductor Device Using the Same

Press/Media: Press / Media

Period2020 Aug 5

Media coverage

1

Media coverage

  • TitleSamsung Electronics Submits Korean Patent Application for Unit for Supplying Precursor Substrate Processing Apparatus and Method for Manufacturing Semiconductor Device Using the Same
    Media name/outletGlobal IP News. Semiconductor Patent News
    CountryIndia
    Date20/8/5
    PersonsHyun Jae Kim