US Patent Issued to DNF on May 3 for "Disilylamine compound, method for preparing the same, and composition for depositing silicon-containing thin film including the same" (South Korean Inventors)

Press/Media: Press / Media

Period2022 May 4

Media coverage

1

Media coverage

  • TitleUS Patent Issued to DNF on May 3 for "Disilylamine compound, method for preparing the same, and composition for depositing silicon-containing thin film including the same" (South Korean Inventors)
    Media name/outletUS Fed News
    Country/TerritoryUnited States
    Date22/5/4
    Personsjin woo Park