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Research Output

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Conference article
2008

Optimization of optical properties of silicon-based anti-reflective spin-on hardmask materials

Kim, S. K., Cho, H. M., Woo, C., Koh, S. R., Kim, M. Y., Yoon, H. C., Lee, W., Shin, S. W., Kim, J. S. & Chang, T., 2008 Dec 1, In : Proceedings of SPIE - The International Society for Optical Engineering. 7140, 71402V.

Research output: Contribution to journalConference article

3 Citations (Scopus)

Use of spin-on-hard mask materials for nano scale patterning technology

Wu, W. H., Chang, E. Y., Cheon, H. S., Kim, S. K., Cho, H. M., Yoon, K. H., Kim, J. S., Chang, T. & Shin, S., 2008 Dec 1, In : Proceedings of SPIE - The International Society for Optical Engineering. 7140, 71402Q.

Research output: Contribution to journalConference article

4 Citations (Scopus)