University College

Research Output 1999 2019

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Conference article
2008
3 Citations (Scopus)

Optimization of optical properties of silicon-based anti-reflective spin-on hardmask materials

Kim, S. K., Cho, H. M., Woo, C., Koh, S. R., Kim, M. Y., Yoon, H. C., Lee, W., Shin, S. W., Kim, J. S. & Chang, T., 2008 Dec 1, In : Proceedings of SPIE - The International Society for Optical Engineering. 7140, 71402V.

Research output: Contribution to journalConference article

Silicon
Optical Properties
Optical properties
optical properties
optimization
4 Citations (Scopus)

Use of spin-on-hard mask materials for nano scale patterning technology

Wu, W. H., Chang, E. Y., Cheon, H. S., Kim, S. K., Cho, H. M., Yoon, K. H., Kim, J. S., Chang, T. & Shin, S., 2008 Dec 1, In : Proceedings of SPIE - The International Society for Optical Engineering. 7140, 71402Q.

Research output: Contribution to journalConference article

Patterning
Mask
Masks
masks
Throughput