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Conference article

Optimization of optical properties of silicon-based anti-reflective spin-on hardmask materials

Kim, S. K., Cho, H. M., Woo, C., Koh, S. R., Kim, M. Y., Yoon, H. C., Lee, W., Shin, S. W., Kim, J. S. & Chang, T., 2008, In : Proceedings of SPIE - The International Society for Optical Engineering. 7140, 71402V.

Research output: Contribution to journalConference article

3 Citations (Scopus)

Use of spin-on-hard mask materials for nano scale patterning technology

Wu, W. H., Chang, E. Y., Cheon, H. S., Kim, S. K., Cho, H. M., Yoon, K. H., Kim, J. S., Chang, T. & Shin, S., 2008, In : Proceedings of SPIE - The International Society for Optical Engineering. 7140, 71402Q.

Research output: Contribution to journalConference article

4 Citations (Scopus)