• 2639 Citations
  • 26 h-Index
1990 …2020

Research output per year

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Research Output

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Conference article
2014

NF3/NH3 dry cleaning mechanism inspired by chemical and physical surface modification of Si, SiO2, and Si3N4

Oh, H. J., Lee, J. H., Lee, M. S., Shin, W. G., Kang, S. Y., Kim, G. D. & Ko, D. H., 2014, In : ECS Transactions. 61, 38, p. 1-8 8 p.

Research output: Contribution to journalConference article

10 Citations (Scopus)
2005

Tribological behavior of nano-undulated surface of diamond-like carbon films

Park, S. J., Lee, K. R. & Ko, D. H., 2005 Aug, In : Diamond and Related Materials. 14, 8, p. 1291-1296 6 p.

Research output: Contribution to journalConference article

21 Citations (Scopus)
2003

A study on oxidation behavior of poly-Si1-xGex films

Kang, H. B., Lee, J. H., Yang, C. W., Kang, S. K., Min, B. K., Ko, D. H., Ahn, T. H., Yeo, I. S., Lee, K. C., Lee, T. W. & Lee, Y. H., 2003 Feb, In : Journal of the Korean Physical Society. 42, SPEC., p. S508-S513

Research output: Contribution to journalConference article

1 Citation (Scopus)

Interface control by modified sputtering on Pt/HfO2/Si system

Nam, S., Nam, S. W., Yoo, J. H. & Ko, D. H., 2003 Sep 15, In : Materials Science and Engineering B: Solid-State Materials for Advanced Technology. 102, 1-3, p. 123-127 5 p.

Research output: Contribution to journalConference article

8 Citations (Scopus)

Physical and electrical degradation of ZrO2 thin films with aluminum electrodes

Nam, S. W., Yoo, J. H., Nam, S., Ko, D. H., Ku, J. H. & Yang, C. W., 2003 Sep 15, In : Materials Science and Engineering B: Solid-State Materials for Advanced Technology. 102, 1-3, p. 108-112 5 p.

Research output: Contribution to journalConference article

3 Citations (Scopus)
2002

Evolution of sputtered HfO2 thin films upon annealing

Nam, S., Nam, S. W., Yoo, J. H., Ko, D. H., Ku, J. H. & Choi, S., 2002, In : Materials Research Society Symposium - Proceedings. 716, p. 221-226 6 p.

Research output: Contribution to journalConference article

1 Citation (Scopus)
2001

The electrical characteristics of the MOSCAP structures with W/WNx/poly Si1-xGeX gates stack

Kang, S. K., Kim, J. J., Ko, D. H., Ahn, T. H., Yeo, I. S., Lee, T. W. & Lee, Y. H., 2001, In : Materials Research Society Symposium - Proceedings. 670, p. K591-K596

Research output: Contribution to journalConference article

2000

High performance pMOSFETs with Ni(SixGe1-x)/poly-Si0.8Ge0.2 gate

Ku, J. H., Choi, C. J., Song, S., Choi, S., Fujihara, K., Kang, H. K., Lee, S. I., Choi, H. G. & Ko, D. H., 2000, In : Digest of Technical Papers - Symposium on VLSI Technology. p. 114-115 2 p.

Research output: Contribution to journalConference article

6 Citations (Scopus)
1999

Determination of elastic modulus and Poisson's ratio of diamond-like carbon films

Cho, S. J., Lee, K. R., Yong Eun, K., Hee Hahn, J. & Ko, D. H., 1999 Mar 12, In : Thin Solid Films. 341, 1, p. 207-210 4 p.

Research output: Contribution to journalConference article

77 Citations (Scopus)
1998

Measurement of elastic modulus and Poisson's ratio of diamond-like carbon films

Cho, S. J., Lee, K. R., Eun, K. Y. & Ko, D. H., 1998, In : Materials Research Society Symposium - Proceedings. 518, p. 203-208 6 p.

Research output: Contribution to journalConference article

1 Citation (Scopus)

Method for independent measurement of elastic modulus and Poisson's ratio of diamond-like carbon films

Cho, S. J., Lee, K. R., Eun, K. Y., Han, J. H. & Ko, D. H., 1998, In : Materials Research Society Symposium - Proceedings. 505, p. 33-38 6 p.

Research output: Contribution to journalConference article

7 Citations (Scopus)
1995

Process technology for 1 giga-bit DRAM

Lee, K. P., Park, Y. S., Ko, D. H., Hwang, C. S., Kang, C. J., Lee, K. Y., Kim, J. S., Park, J. K., Roh, B. H., Lee, J. Y., Kim, B. C., Lee, J. H., Kim, K. N., Park, J. W. & Lee, J. G., 1995, In : Technical Digest - International Electron Devices Meeting. p. 907-910 4 p.

Research output: Contribution to journalConference article

27 Citations (Scopus)
1994

TEM and in situ HREM for studying metal-semiconductor interfacial reactions

Sinclair, R., Konno, T. J. & Hong Ko, D., 1994, In : Materials Science Forum. 155-5, p. 111-120 10 p.

Research output: Contribution to journalConference article

2 Citations (Scopus)