• 5665 Citations
  • 41 h-Index
1988 …2020

Research output per year

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Research Output

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2010

A 16-site neural probe integrated with a waveguide for optical stimulation

Cho, I. J., Baac, H. W. & Yoon, E., 2010 Jun 1, MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. p. 995-998 4 p. 5442376. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

42 Citations (Scopus)

High-throughput of photodynamic therapy (PDT) screening from multiple parameter assays of 1,000 different conditions in a single chip

Lou, X., Kim, G., Koo, Y., Kopelman, R. & Yoon, E., 2010 Dec 1, 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010. p. 719-721 3 p. (14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Low-power circuit challenges in cellular/molecular interfaces

Yoon, E., 2010 Dec 1, 2010 IEEE International Electron Devices Meeting, IEDM 2010. p. 17.6.1 5703383. (Technical Digest - International Electron Devices Meeting, IEDM).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Microfluidic assay to compare secretion vs contact based cell-cell interactions using dynamic isolation control

Ingram, P., Kim, Y. J., Bersano-Begey, T., Lou, X., Asakura, A. & Yoon, E., 2010 Dec 1, 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010. p. 277-279 3 p. (14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010; vol. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)
2009

A 1μW 85nV/√Hz pseudo open-loop preamplifier with programmable band-pass filter for neural interface system

Chang, S. I. & Yoon, E., 2009 Dec 1, Proceedings of the 31st Annual International Conference of the IEEE Engineering in Medicine and Biology Society: Engineering the Future of Biomedicine, EMBC 2009. p. 1631-1634 4 p. 5334233. (Proceedings of the 31st Annual International Conference of the IEEE Engineering in Medicine and Biology Society: Engineering the Future of Biomedicine, EMBC 2009).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

A fully addressable micro-array chip integrated with cascade multiplexors for selective cell loading and retrieval

Lou, X., Chung, J., Kim, Y. J., Cho, I. J. & Yoon, E., 2009 Dec 11, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. p. 1301-1304 4 p. 5285869. (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

A low-power area-efficient 8 bit SAR ADC using dual capacitor arrays for neural microsystems

Chang, S. I. & Yoon, E., 2009 Jan 1, Proceedings of the 31st Annual International Conference of the IEEE Engineering in Medicine and Biology Society: Engineering the Future of Biomedicine, EMBC 2009. IEEE Computer Society, p. 1647-1650 4 p. 5333068. (Proceedings of the 31st Annual International Conference of the IEEE Engineering in Medicine and Biology Society: Engineering the Future of Biomedicine, EMBC 2009).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Clonal culture and chemodrug assay of heterogeneous cells (PC3 prostate carcinoma cells) using microfluidic single cell array chips

Chung, J., Bersano-Begey, T., Pienta, K. & Yoon, E., 2009 Jan 1, Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences. Chemical and Biological Microsystems Society, p. 21-23 3 p. (Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

IBCOM (Intra-Brain Communication) microsystem: Wireless transmission of neural signals within the brain

Al-Ashmouny, K. M., Boldt, C., Ferguson, J. E., Erdman, A. G., Redish, A. D. & Yoon, E., 2009 Jan 1, Proceedings of the 31st Annual International Conference of the IEEE Engineering in Medicine and Biology Society: Engineering the Future of Biomedicine, EMBC 2009. IEEE Computer Society, p. 2054-2057 4 p. 5334432. (Proceedings of the 31st Annual International Conference of the IEEE Engineering in Medicine and Biology Society: Engineering the Future of Biomedicine, EMBC 2009).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

15 Citations (Scopus)

Microfluidic array chip for analysis of pairwise cell interaction by temporal stimulation of secreted factors using chamber isolation

Kim, Y. J., Bersano-Begey, T., Lou, X., Chung, J. & Yoon, E., 2009 Jan 1, Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences. Chemical and Biological Microsystems Society, p. 1772-1774 3 p. (Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
2008

Identification of PCR product by non-surface-binding method using label-free field-effect transistor

Han, J., Shim, J., Chung, W., Yoo, K., Lee, S., Yoon, E. & Ko, C., 2008 Oct 1, Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008. p. 632-635 4 p. (Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Microfluidic array chip for single-cell isolation using two-way pneumatic actuation

Kim, Y. J., Chung, J., Lee, H. K. & Yoon, E., 2008 Aug 29, MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. p. 14-17 4 p. 4443581. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)
2007

A spatial-temporal multi-resolution CMOS image sensor with adaptive frame rates for moving objects in the reglon-of-interest

Chol, J., Han, S. W., Kim, S. J., Chang, S. I. & Yoon, E., 2007 Sep 27, 2007 IEEE International Solid-State Circuits Conference, ISSCC - Digest of Technical Papers. p. 502-503+618+499 4242485. (Digest of Technical Papers - IEEE International Solid-State Circuits Conference).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Label-free CMOS DNA quantification with on-chip noise reduction schemes

Kim, S. J., Shenoi, M., Yoo, K., Shim, J., Chung, W., Ko, C., Kim, L. S. & Yoon, E., 2007 Dec 1, TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. p. 947-950 4 p. 4300288. (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Polymer tactile sensing array with a unit cell of multiple capacitors for three-axis contact force image construction

Lee, H. K., Chung, J., Chang, S. I. & Yoon, E., 2007 Dec 1, Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. p. 623-626 4 p. 4433122. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)
2006

A 2.4-GHz sub-mW CMOS current-reused receiver front-end for wireless sensor network

Song, T., Oh, H. S., Baek, S. H., Hong, S. & Yoon, E., 2006 Dec 1, 2006 IEEE Radio Frequency Integrated Circuits(RFIC) Symposium - Digest of Papers. p. 293-296 4 p. 1651149. (Digest of Papers - IEEE Radio Frequency Integrated Circuits Symposium; vol. 2006).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

A 2.4-GHz Sub-mW frequency source with current-reused frequency multiplier

Song, T., Oh, H. S., Yang, J., Yoon, E. & Hong, S., 2006 Dec 1, 2006 IEEE Radio Frequency Integrated Circuits(RFIC) Symposium - Digest of Papers. p. 37-40 4 p. 1651085. (Digest of Papers - IEEE Radio Frequency Integrated Circuits Symposium; vol. 2006).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

A capacitive proximity sensor in dual implementation with tactile imaging capability on a single flexible platform for robot assistant applications

Lee, H. K., Chang, S. I. & Yoon, E., 2006 Oct 24, 19th IEEE International Conference on Micro Electro Mechanical Systems. p. 606-609 4 p. 1627872. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); vol. 2006).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

28 Citations (Scopus)

A fully integrated 1V, +9.5dBm, 43%-PAE injection-locked class-E power amplifier for wireless sensor network applications

Oh, H. S., Song, T., Baek, S. H., Yoon, E. & Kim, C. K., 2006 Dec 1, Proceedings - 2006 IEEE Radio and Wireless Symposium. p. 235-238 4 p. 1615138. (Proceedings - 2006 IEEE Radio and Wireless Symposium; vol. 2006).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

A high dynamic range CMOS image sensor with in-pixel floating-node analog memory for pixel level integration time control

Han, S. W., Kim, S. J., Choi, J. H., Kim, C. K. & Yoon, E., 2006 Dec 1, 2006 Symposium on VLSI Circuits, VLSIC - Digest of Technical Papers. p. 25-26 2 p. 1705294. (IEEE Symposium on VLSI Circuits, Digest of Technical Papers).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

13 Citations (Scopus)

A highly-sensitive differential-mode microchemical sensor using tfbars with on-chip microheater for Volatile Organic Compound (VOC) detection

Lee, H. M., Kim, H. T., Choi, H. K., Lee, H. C., Hong, H. K., Lee, D. H., Bu, J. U. & Yoon, E., 2006, 19th IEEE International Conference on Micro Electro Mechanical Systems. p. 490-493 4 p. 1627843. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); vol. 2006).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Development of methanol steam reforming system integrated with catalytic combustor using carbon nanotubes as catalyst supports

Park, D. E., Kim, T. K., Kwon, S. & Yoon, E., 2006 Oct 24, 19th IEEE International Conference on Micro Electro Mechanical Systems. p. 942-945 4 p. 1627956. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); vol. 2006).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

MEMS-based fuel reformer integrated with catalytic combustor using carbonNanoTubes as catalyst supports

Park, D. E., Kim, T. K., Kim, C. K., Kwon, S. & Yoon, E., 2006 Dec 1, Collection of Technical Papers - 4th International Energy Conversion Engineering Conference. p. 1306-1314 9 p. (Collection of Technical Papers - 4th International Energy Conversion Engineering Conference; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Micromachined methanol steam reforming system integrated with catalytic combustor using carbon nanotubes as catalyst supports

Park, D. E., Kim, T. K., Kwon, S., Kim, C. K. & Yoon, E., 2006 Dec 1, Proceedings of 4th International ASME Conference on Fuel Cell Science, Engineering and Technology, FUELCELL2006. (Proceedings of 4th International ASME Conference on Fuel Cell Science, Engineering and Technology, FUELCELL2006; vol. 2006).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Three dimensional electrode structure controlled by dielectrophoresis for flow-through micro electroporation system

Choi, Y. S., Kim, Y. J., Im, M., Kim, B. G., Yun, K. S. & Yoon, E., 2006 Oct 24, 19th IEEE International Conference on Micro Electro Mechanical Systems. p. 466-469 4 p. 1627837. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); vol. 2006).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Wafer-level transfer of thermo-piezoelectric Si3N4 cantilever array on a CMOS circuit for high density probe-based data storage

Kim, Y. S., Nam, H. J., Jang, S. S., Lee, C. S., Jin, W. H., Cho, I. J., Bu, J. U., Chang, S. I. & Yoon, E., 2006 Oct 24, 19th IEEE International Conference on Micro Electro Mechanical Systems. p. 922-925 4 p. 1627951. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); vol. 2006).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)
2005

A low-voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold

Cho, I. J., Song, T., Baek, S. H. & Yoon, E., 2005 Oct 25, Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest. p. 32-35 4 p. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

16 Citations (Scopus)

An electromagnetically-actuated polymer micro-pen for picoliter biological assay patterning

Im, M., Cho, I. J., Yun, K. S. & Yoon, E., 2005 Nov 9, TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. p. 1588-1591 4 p. 3E4.73. (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

A shunt-type RF MEMS switch at 3.3V operation actauted by Lorentz force and electrostatic hold

Cho, I. J., Song, T., Baek, S. H. & Yoon, E., 2005 Nov 9, TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. p. 1051-1054 4 p. 2E4.149. (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; vol. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Development of a wireless environmental sensor system and MEMS-based RF circuit components

Yoon, E. & Yun, K. S., 2005 Nov 9, TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. p. 1981-1985 5 p. 4C1.1. (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Flip-chip assembly on soft polymer substrate using ACP for integrating readout circuitry for modular expandable tactile sensor array

Chang, S. I., Lee, H. K. & Yoon, E., 2005 Nov 9, TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. p. 1969-1972 4 p. 4B1.2. (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Polymer-based in-channel active microvalves operated by pneumatic/thermopneumatic actuation

Yoon, D. K., Yun, K. S. & Yoon, E., 2005 Jan 1, Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences. Transducer Research Foundation, p. 91-93 3 p. (Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences; vol. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Preparation, coating and patterning of Cu-based catalysts for methanol steam reforming by micro fuel reformer

Kim, T., Lee, D. H., Yoon, C., Park, D. E., Kwon, S. & Yoon, E., 2005 Nov 21, Proceedings of the 3rd International Conference on Fuel Cell Science, Engineering, and Technology, 2005. Shah, R. K., Ubong, E. U. & Samuelsen, S. S. (eds.). p. 531-536 6 p. FUELCELL2005-74057. (Proceedings of the 3rd International Conference on Fuel Cell Science, Engineering, and Technology, 2005).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)
2004

A 1-V 5 GHz low phase noise LC-VCO using voltage-dividing and bias-level shifting technique

Song, T. & Yoon, E., 2004 Dec 1, 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers. Cressler, J. D. & Papapolymerou, J. (eds.). p. 87-90 4 p. (2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

A low-voltage and low-power RF MEMS switch actuated by combination of electromagnetic and electrostatic forces

Cho, I. J., Song, T., Back, S. H. & Yoon, E., 2004 Dec 1, Conference Proceedings- 34th European Microwave Conference. p. 1445-1448 4 p. (Conference Proceedings- European Microwave Conference; vol. 3).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)
2003

A low-voltage three-axis electromagnetically actuated micromirror for high coupling efficiency

Cho, I. J. & Yoon, E., 2003 Jan 1, 2003 IEEE/LEOS International Conference on Optical MEMS. Institute of Electrical and Electronics Engineers Inc., p. 123-124 2 p. 1233497. (2003 IEEE/LEOS International Conference on Optical MEMS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

A miniaturized low-power wireless remote environmental monitoring system using microfabricated electrochemical sensing electrodes

Yun, K. S., Gil, J., Kim, J., Kim, H. J., Kim, K. H., Park, D., Kwak, J. Y., Shin, H., Lee, K., Kwak, J. & Yoon, E., 2003 Jan 1, TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., p. 1867-1870 4 p. 1217153. (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)
2002

A new floating-point normalization scheme by bit parallel operation of leading one position value

Han, K. N., Han, S. W. & Yoon, E., 2002 Jan 1, 2002 IEEE Asia-Pacific Conference on ASIC, AP-ASIC 2002 - Proceedings. Institute of Electrical and Electronics Engineers Inc., p. 221-224 4 p. 1031572. (2002 IEEE Asia-Pacific Conference on ASIC, AP-ASIC 2002 - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)
2000

AFM probe tips using heavily boron-doped silicon cantilevers realized in a <110> bulk silicon wafer

Cho, I. J., Park, E. C. & Yoon, E., 2000 Jan 1, Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000. Institute of Electrical and Electronics Engineers Inc., p. 230-231 2 p. 872729. (Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Analysis of heavy-metal-ions using mercury microelectrodes and a solid-state reference electrode fabricated on a Si wafer

Yun, K. S., Kim, H. J., Joo, S., Kwak, J. & Yoon, E., 2000 Jan 1, Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000. Institute of Electrical and Electronics Engineers Inc., p. 72-73 2 p. 872628. (Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1999

230MHz 8 tap programmable FIR filter using redundant binary number system

Baik, S. H., Han, K. N. & Yoon, E., 1999 Jan 1, Proceedings - IEEE International Symposium on Circuits and Systems. IEEE, p. III-415 - III-418 (Proceedings - IEEE International Symposium on Circuits and Systems; vol. 3).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)
1998

A hermetically-sealed LC resonator for remote pressure monitoring

Park, E. C., Yoon, J. B. & Yoon, E., 1998 Jan 1, Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference. Yoo, H. J., Okazaki, S., Ahn, J., Kim, O. & Komuro, M. (eds.). Institute of Electrical and Electronics Engineers Inc., p. 91-92 2 p. 729985. (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference; vol. 1998-July).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Novel fabrication of electroplated 3D micro-coils using 3d photolithography of thick photoresist

Yoon, J. B., Han, C. H., Yoon, E. S. & Kim, C. K., 1998 Jan 1, Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference. Yoo, H. J., Okazaki, S., Ahn, J., Kim, O. & Komuro, M. (eds.). Institute of Electrical and Electronics Engineers Inc., p. 85-86 2 p. 729981. (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference; vol. 1998-July).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1994

Titanium salicide process suitable for submicron CMOS applications

Blair, C., Demirlioglu, E., Yoon, E. & Pierce, J., 1994 Jan 1, Silicides, Germanides, and Their Interfaces. Fathauer, R. W., Mantl, S., Schowalter, L. J. & Tu, K. N. (eds.). Publ by Materials Research Society, p. 53-58 6 p. (Materials Research Society Symposium Proceedings; vol. 320).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)
1992

Application of a dielectric discontinuity microscope to process development at the Fairchild Research Cent. of Natl. Semiconductor

Allison, R. W., Yoon, E., Heard, J. G., Kovacs, R. P., Liddicoat, S. & Radigan, K. J., 1992 Jan 1, Proceedings of SPIE - The International Society for Optical Engineering. Publ by Int Soc for Optical Engineering, p. 419-431 13 p. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 1673).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Phase-contrast latent image metrology for microlithography

Yoon, E., Allison, R. W., Kovacs, R. P. & Dai, C., 1992 Jan 1, Proceedings of SPIE - The International Society for Optical Engineering. Publ by Int Soc for Optical Engineering, p. 580-591 12 p. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 1673).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)