• 1704 Citations
  • 21 h-Index
1993 …2019
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Fingerprint Dive into the research topics where Hyunchul Sohn is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 3 Similar Profiles
Thin films Engineering & Materials Science
Atomic layer deposition Engineering & Materials Science
Data storage equipment Engineering & Materials Science
Dynamic random access storage Engineering & Materials Science
Tungsten Engineering & Materials Science
Annealing Engineering & Materials Science
thin films Physics & Astronomy
Chemical vapor deposition Engineering & Materials Science

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Research Output 1993 2019

  • 1704 Citations
  • 21 h-Index
  • 109 Article
  • 14 Conference contribution
  • 12 Conference article
  • 2 Paper

Effect of process parameters on the angular distribution of sputtered Cu flux in long-throw sputtering system

Shin, H. Y., Kim, T. H., Park, J. W. & Sohn, H., 2019 Jan 1, In : Journal of Korean Institute of Metals and Materials. 57, 7, p. 462-467 6 p.

Research output: Contribution to journalArticle

Open Access
Sputtering
Angular distribution
Process Parameters
Fluxes
Substrate

Highly reliable threshold switching behavior of amorphous Ga2Te3 films deposited by RF sputtering

Lee, D., Kim, T. & Sohn, H., 2019 Jan 1, In : Applied Physics Express. 12, 8, 085504.

Research output: Contribution to journalArticle

Open Access
Amorphous films
Sputtering
sputtering
thresholds
Data storage equipment
Image sensors
Oxygen
Defects
Electric potential
Gases
roughness
vapor deposition
surface roughness
flow velocity
surface defects
Crystallization
Amorphous silicon
amorphous silicon
Seed
solid phases