• 1738 Citations
  • 22 h-Index
1993 …2019
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Fingerprint Dive into the research topics where Hyunchul Sohn is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

Engineering & Materials Science

Thin films
Data storage equipment
Atomic layer deposition
Dynamic random access storage
Tungsten
Annealing
Chemical vapor deposition
Oxides
Nitrides
Temperature
Capacitors
Leakage currents
Defects
Metals
Doping (additives)
Crystallization
Phase change memory
Transmission electron microscopy
Oxygen
Substrates
Nucleation
Oxidation
Electrodes
Crystalline materials
Tunnels
Electric properties
Diffusion barriers
Polysilicon
Transistors
Thermodynamic stability
Sheet resistance
Sputtering
Organic chemicals
Ruthenium
Aspect ratio
Vapors
Charge trapping
Nitrogen
Durability
Degradation
Energy gap
Growth temperature
Contact resistance
Plasmas
Physical vapor deposition
Silicon oxides
Molecular beam epitaxy
Flash memory
Impurities
Electric potential

Chemical Compounds

Atomic layer deposition
Thin films
Annealing
Tungsten
Data storage equipment
Crystallization
Oxides
Temperature
Metals
Chemical vapor deposition
Oxygen
Defects
Doping (additives)
Nitrogen
Crystalline materials
Nucleation
Electric properties
Transmission electron microscopy
Substrates
Tunnels
Sheet resistance
Nitrides
Aspect ratio
Diffusion barriers
Silicates
Charge trapping
Thermodynamic stability
Oxidation
Durability
Capacitors
Sputtering
Silicon
Energy gap
Film thickness
Impurities
Phase change memory
Ruthenium
Leakage currents
Silicides
Electrodes
Flash memory
Dynamic random access storage
X ray diffraction analysis
Phase separation
Phase transitions
Physical properties
Lasers
Electric potential
Oxide films
Niobium

Physics & Astronomy

General

thin films
vapor deposition
capacitors
transmission electron microscopy
defects
leakage
tunnels
metals
metalorganic chemical vapor deposition
endurance
crystallinity
wafers
piles
film thickness
flash
thermal stability
impurities
high resistance
grain boundaries
insulators
spacers
electronic structure

Chemistry and Materials

atomic layer epitaxy
oxides
oxygen
crystallization
oxidation
nitrides
tungsten
nitrogen
silicates
silicon oxides
silicon
silicides
vapors
molecular beam epitaxy
ruthenium

Engineering

annealing
electrodes
random access memory
electrical properties
traps
electrical resistivity
x rays
sputtering
nucleation
plugs

Physics

temperature
plasma density
cycles