• 1737 Citations
  • 22 h-Index
1993 …2019
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Research Output 1993 2019

  • 1737 Citations
  • 22 h-Index
  • 110 Article
  • 14 Conference contribution
  • 12 Conference article
  • 2 Paper
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Conference contribution
2012

Effect of W doping on bipolar resistive switching behavior of TiN/W:NbO x/Pt device

Lee, K., Kim, J., Lee, S., Park, S. & Sohn, H., 2012 Oct 1, 2012 IEEE International Interconnect Technology Conference, IITC 2012. 6251647. (2012 IEEE International Interconnect Technology Conference, IITC 2012).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Doping (additives)
Oxygen vacancies
Tungsten

RESET-first Resistance Switching Mechanism of HfO 2 films with Ti electrode

Kim, J., Mok, I. S., Lee, S., Lee, K. & Sohn, H., 2012 Oct 1, 2012 IEEE International Interconnect Technology Conference, IITC 2012. 6251589. (2012 IEEE International Interconnect Technology Conference, IITC 2012).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Electrodes
Redox reactions
Photoelectron spectroscopy
Energy dispersive spectroscopy
Annealing
2011
2 Citations (Scopus)

Effect of oxygen diffusion into TiN on resistance switching characteristics of ZrO2 films with annealing temperatures

Kim, J., Lee, S., Na, H., Lee, K. & Sohn, H., 2011 Aug 30, 2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011. 5940347. (2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Annealing
Oxygen
Temperature
Secondary ion mass spectrometry
X ray photoelectron spectroscopy

Integrated phase-change memory devices using Bi2Te3 nanowires

Han, N., Kim, S. I., Yang, J. D., Lee, K., Sohn, H., So, H. M., Ahn, C. W. & Yoo, K. H., 2011 Nov 23, Technical Proceedings of the 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011. p. 126-128 3 p. (Technical Proceedings of the 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Phase change memory
Nanowires
Data storage equipment
Quantum confinement
Bismuth
2007
3 Citations (Scopus)

BEOL process integrations with Cu/FSG wiring at 90 nm design-rule DDR DRAM and their effects on yield, refresh time, and wafer-level reliability

Kwak, N., Ahn, S. T., Park, H. S., Kim, S. M., Jung, J. K., Kim, G. H., Choi, G. Y., Koo, D. C., Jung, T. O., Ku, J. C., Jung, J. K., Kim, J., Park, S., Sohn, H. & Kim, S. H., 2007 Oct 2, Proceedings of the IEEE 2007 International Interconnect Technology Conference - Digest of Technical Papers. p. 150-152 3 p. 4263679. (Proceedings of the IEEE 2007 International Interconnect Technology Conference - Digest of Technical Papers).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

wiring
Dynamic random access storage
Electric wiring
wafers
capacitors
2006
56 Citations (Scopus)

Development of new TiN/ZrO 2 /Al 2 O 3 /ZrO 2 /TiN capacitors extendable to 45nm generation DRAMs replacing HfO 2 based dielectrics

Kil, D. S., Song, H. S., Lee, K. J., Hong, K., Kim, J. H., Park, K. S., Yeom, S. J., Roh, J. S., Kwak, N. J., Sohn, H., Kim, J. W. & Park, S. W., 2006 Dec 1, 2006 Symposium on VLSI Technology, VLSIT - Digest of Technical Papers. p. 38-39 2 p. 1705205. (Digest of Technical Papers - Symposium on VLSI Technology).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Dielectric films
Dynamic random access storage
Capacitors
Leakage currents
Hot Temperature
2 Citations (Scopus)

Highly reliable and scalable tungsten polymetal gate process for memory devices using low-temperature plasma selective gate reoxidation

Lim, K. Y., Sung, M. G., Cho, H. J., Kim, Y. S., Jang, S. A., Oh, J. G., Lee, S. R., Kim, K., Lee, P. S., Chun, Y. S., Yang, H. S., Kwak, N. J., Sohn, H. C., Kim, J. W. & Park, S. W., 2006 Dec 1, 2006 Symposium on VLSI Technology, VLSIT - Digest of Technical Papers. p. 74-75 2 p. 1705223. (Digest of Technical Papers - Symposium on VLSI Technology).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tungsten
Plasmas
Data storage equipment
Diffusion barriers
Polysilicon
20 Citations (Scopus)

Highly Scalable Saddle-Fin(S-Fin) transistor for sub-50nm DRAM technology

Chung, S. W., Lee, S. D., Jang, S. A., Yoo, M. S., Kim, K. O., Chung, C. O., Cho, S. Y., Cho, H. J., Lee, L. H., Hwang, S. H., Kim, J. S., Lee, B. H., Yoon, H. G., Park, H. S., Baek, S. J., Cho, Y. S., Kwak, N. J., Sohn, H. C., Moon, S. C., Yoo, K. D. & 4 others, Jeong, J. G., Kim, J. W., Hong, S. J. & Park, S. W., 2006 Jan 1, 2006 Symposium on VLSI Technology, VLSIT - Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., p. 32-33 2 p. 1705202. (Digest of Technical Papers - Symposium on VLSI Technology).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Dynamic random access storage
Transistors
Threshold voltage
FinFET
6 Citations (Scopus)

Impact of thin WSiX insertion in tungsten polymetal gate on gate oxide reliability and gate contact resistance

Sung, M. G., Lim, K. Y., Cho, H. J., Lee, S. R., Jang, S. A., Yang, H. S., Kim, K., Kwak, N. J., Sohn, H. C. & Kim, J. W., 2006 Dec 1, 2006 IEEE International Reliability Physics Symposium Proceedings, 44th Annual. p. 374-378 5 p. 4017187. (IEEE International Reliability Physics Symposium Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Contact resistance
Tungsten
Oxides
Polysilicon
Nitrides
2005

Investigation on the compositionally graded HfxAl yOz films for TiN based DRAM capacitor

Kil, D. S., Hong, K., Yeom, S. J., Song, H. S., Park, K. S., Roh, J. S., Kwak, N. J., Sohn, H. C., Kim, J. W. & Park, S. W., 2005 Dec 1, Proceedings of ESSDERC 2005: 35th European Solid-State Device Research Conference. p. 371-374 4 p. 1546662. (Proceedings of ESSDERC 2005: 35th European Solid-State Device Research Conference; vol. 2005).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Dielectric films
Dynamic random access storage
Capacitors
Leakage currents
Thin films
1 Citation (Scopus)

Reliability of MIM HAO capacitor for 70NM DRAM

Hong, K., Kil, D. S., Woo, H. K., Kim, J., Song, H. S., Park, K. S., Yeom, S. J., Yang, H. S., Roh, J. S., Sohn, H. C., Kim, J. W. & Park, S. W., 2005 Dec 15, 2005 IEEE International Reliability Physics Symposium Proceedings, 43rd Annual. p. 686-687 2 p. (IEEE International Reliability Physics Symposium Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Dynamic random access storage
Capacitors
2004
2 Citations (Scopus)

A novel method for forming gate spacer and its effects on the W/WN x/Poly-si gate stack

Kim, Y. S., Lim, K. Y., Oh, J. G., Jang, S. A., Cho, H. J., Yang, J. M., Suh, J. B., Chung, S. O., Park, S. Y., Yang, H. S., Sohn, H. C. & Kim, J. W., 2004 Dec 1, ESSCIRC 2004 - Proceedings of the 34th European Solid-State Device Research Conference. Mertens, R. P. & Claeys, C. L. (eds.). p. 97-100 4 p. (ESSCIRC 2004 - Proceedings of the 34th European Solid-State Device Research Conference).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Polysilicon
Leakage currents
Oxidation
Hot carriers
Atomic layer deposition
1994
1 Citation (Scopus)

Improvement of the structural quality of GaAs layers grown on Si with LT-GaAs intermediate layer

Weber, Z. L., Fujioka, H., Sohn, H. & Weber, E. R., 1994 Jan 1, Materials Research Society Symposium Proceedings. Publ by Materials Research Society, p. 377-382 6 p. (Materials Research Society Symposium Proceedings; vol. 325).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Buffer layers
High resolution transmission electron microscopy
Leakage currents
Surface morphology
Photoluminescence
1993

Defects in GaAs bulk crystals and multi-layers caused by in diffusion

Werner, P., Liliental-Weber, Z., Sohn, H., Yau, W. F., Baranowski, J. & Weber, E. R., 1993 Jan 1, Materials Research Society Symposium Proceedings. Rodbell, K. P., Filter, W. F., Frost, H. J. & Ho, P. S. (eds.). Publ by Materials Research Society, p. 487-491 5 p. (Materials Research Society Symposium Proceedings; vol. 309).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Defects
Crystals
Crystal defects
Superconductivity
Molecular beam epitaxy