• 1738 Citations
  • 22 h-Index
1993 …2019
If you made any changes in Pure these will be visible here soon.

Research Output 1993 2019

  • 1738 Citations
  • 22 h-Index
  • 110 Article
  • 14 Conference contribution
  • 12 Conference article
  • 2 Paper
Filter
Paper
2005
1 Citation (Scopus)

Effects of abrasive size and surfactant concentration in ceria slurry for shallow trench isolation CMP

Park, H. S., Jung, J. G., Park, J. Y., Shin, J. H., Ryu, C. H., Sohn, H., Kang, H. G., Katho, T. & Park, J. G., 2005 Dec 1, p. 357-365. 9 p.

Research output: Contribution to conferencePaper

Chemical mechanical polishing
Cerium compounds
Abrasives
Surface active agents
Silicon oxides
1996
6 Citations (Scopus)

Control of stoichiometry dependent defects in low temperature GaAs

Luysberg, M., Sohn, H., Prasad, A., Fujioka, H., Klockenbrink, R. & Weber, E. R., 1996 Dec 1, p. 21-26. 6 p.

Research output: Contribution to conferencePaper

Growth temperature
Stoichiometry
Defects
Fluxes
Temperature