• 1796 Citations
  • 23 h-Index
1993 …2020

Research output per year

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Research Output

  • 1796 Citations
  • 23 h-Index
  • 113 Article
  • 14 Conference contribution
  • 12 Conference article
  • 2 Paper
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Conference article
2006

Atomic layer deposited tungsten nitride thin film as a contact barrier layer for sub-80 nm dynamic random access memory

Kim, S. H., Kim, J. K., Kwak, N., Sohn, H., Kim, J., Jung, S. H., Hong, M. R., Lee, S. H. & Collins, J., 2006 Mar 23, In : Advanced Metallization Conference (AMC). p. 213-219 7 p.

Research output: Contribution to journalConference article

2005

Effect of nitrogen incorporation on electrical properties of high-k nanomixed HfxAlyOz film capacitors grown on Ru metal electrodes by atomic layer deposition

Seong, N. J., Yoon, S. G., Yeom, S. J., Woo, H. K., Kil, D. S., Roh, J. S. & Sohn, H. C., 2005 Dec 1, In : Integrated Ferroelectrics. 74, p. 131-136 6 p.

Research output: Contribution to journalConference article

1 Citation (Scopus)
2004

Development of highly robust Nano-mixed HfxAlyOz dielectrics for TiN/HfxAlyOz/TiN capacitor applicable to 65nm generation DRAMs

Kil, D. S., Hong, K., Lee, K. J., Kim, J., Song, H. S., Park, K. S., Roh, J. S., Sohn, H., Kim, J. W. & Park, S. W., 2004 Oct 1, In : Digest of Technical Papers - Symposium on VLSI Technology. p. 126-127 2 p.

Research output: Contribution to journalConference article

8 Citations (Scopus)

Impact of gate sidewall spacer structures on DRAM cell transistors under Fowler-Nordheim and gate-induced drain leakage stress conditions

Lim, K. Y., Jang, S. A., Kim, Y. S., Cho, H. J., Oh, J. G., Chung, S. O., Lee, S. J., Sun, W. K., Suh, J. B., Yang, H. S. & Sohn, H. C., 2004 Jan 1, In : IEEE International Reliability Physics Symposium Proceedings. 2004-January, January, p. 485-488 4 p., 1315376.

Research output: Contribution to journalConference article

2 Citations (Scopus)

Impact of gate sidewall spacer structures on DRAM cell transistors under Fowler-Nordheim and gate-induced drain leakage stress conditions

Lim, K. Y., Jang, S. A., Kim, Y. S., Cho, H. J., Oh, J. G., Chung, S. O., Lee, S. J., Sun, W. K., Suh, J. B., Yang, H. S. & Sohn, H. C., 2004 Jul 12, In : Annual Proceedings - Reliability Physics (Symposium). p. 485-488 4 p.

Research output: Contribution to journalConference article

1 Citation (Scopus)

Pulsed chemical vapor deposition of tungsten (W) thin film as a nucleation layer for W-plug fill of sub-100 nm dynamic random access memory technology

Kim, S. H., Hwang, E. S., Park, T. S., Kawk, N., Pyi, S. H., Kim, J. K. & Sohn, H., 2004 Dec 1, In : Advanced Metallization Conference (AMC). p. 749-755 7 p.

Research output: Contribution to journalConference article

2002

Novel shallow trench isolation process using flowable oxide CVD for sub-100 nm DRAM

Chung, S. W., Ahn, S. T., Sohn, H. C., Ku, J., Park, S., Song, Y. W., Park, H. S. & Lee, S. D., 2002, In : Technical Digest - International Electron Devices Meeting. p. 233-236 4 p.

Research output: Contribution to journalConference article

10 Citations (Scopus)
2001

Improvement of TaNx barrier effectiveness without Cu (111) texture degradation

Min, W. S., Pyo, S. G., Kim, H. D., Kim, S., Lee, T. K., Park, S. K. & Sohn, H. C., 2001 Dec 1, In : Advanced Metallization Conference (AMC). p. 619-623 5 p.

Research output: Contribution to journalConference article

Superfilling characteristic and evaluation of chemically enhanced CVD(CECVD) Cu process

Pyo, S. G., Min, W. S., Kim, H. D., Kim, S., Lee, T. K., Park, S. K. & Sohn, H. C., 2001 Dec 1, In : Advanced Metallization Conference (AMC). p. 209-214 6 p.

Research output: Contribution to journalConference article

6 Citations (Scopus)
1997

Electrical and structural properties of LT-GaAs: influence of As/Ga flux ratio and growth temperature

Luysberg, M., Sohn, H., Prasad, A., Specht, P., Fujioka, H., Klockenbrink, R. & Weber, E. R., 1997 Jan 1, In : Materials Research Society Symposium - Proceedings. 442, p. 485-490 6 p.

Research output: Contribution to journalConference article

7 Citations (Scopus)

New insights into the transport and field-enhancement effects in sol-gel derived colossal magnetoresistive thin films

Krishnan, K. M., Ju, H. L., Sohn, H. C., Nelson, C. & Modak, A. R., 1997, In : Materials Research Society Symposium - Proceedings. 477, p. 139-144 6 p.

Research output: Contribution to journalConference article

1 Citation (Scopus)
1993

Growth of strain-free GaAs on Si/sapphire

Sohn, H., Weber, E. R., Tu, J. & Smith, J. S., 1993, In : Materials Research Society Symposium - Proceedings. 308, p. 423-426 4 p.

Research output: Contribution to journalConference article