• 5808 Citations
  • 35 h-Index
1984 …2021

Research output per year

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Research Output

2001

The effects of solvent on the properties of sol-gel derived PZT thin films

Jung, J. Y., Kim, W. S., Park, H. H. & Kim, T. S., 2001, In : Ferroelectrics. 263, 1, p. 327-334 8 p.

Research output: Contribution to journalArticle

3 Citations (Scopus)

The investigation of Pb-sufficient buffer layer on the ferroelectric properties in Pt/PZT/Pt structure

Yang, J. K., Kim, W. S. & Park, H. H., 2001, In : Ferroelectrics. 260, 1, p. 267-272 6 p.

Research output: Contribution to journalArticle

1 Citation (Scopus)
2000
5 Citations (Scopus)

Effect of excess Pb content on the crystallization and electrical properties in sol-gel derived Pb (Zr0.4Ti0.6)O3 thin films

Yang, J. K., Kim, W. S. & Park, H. H., 2000 Dec 1, In : Thin Solid Films. 377-378, p. 739-744 6 p.

Research output: Contribution to journalArticle

37 Citations (Scopus)

Effects of H2 addition in magnetized inductively coupled C2F6 plasma etching of silica aerogel film

Wang, S. J., Park, H. H., Hyun, S. H. & Yeom, G. Y., 2000, Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000. Institute of Electrical and Electronics Engineers Inc., p. 206-207 2 p. 872712. (Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Effects of plasma treatment on SiO2 aerogel film using various reactive (O2, H2, N2) and non-reactive (He, Ar) gases

Kim, J. J., Park, H. H. & Hyun, S. H., 2000 Dec 1, In : Thin Solid Films. 377-378, p. 525-529 5 p.

Research output: Contribution to journalArticle

18 Citations (Scopus)

Effects of pre-aging and concentration of surface modifying agent on the microstructure and dielectric properties of SiO2 xerogel film

Kim, J. H., Jung, S. B., Park, H. H. & Hyun, S. H., 2000 Dec 1, In : Thin Solid Films. 377-378, p. 467-472 6 p.

Research output: Contribution to journalArticle

16 Citations (Scopus)
10 Citations (Scopus)

Fabrication and characterization of diamond-like carbon thin films by pulsed laser deposition

Shim, K. S., Kim, S. M., Bae, S. H., Lee, S. Y., Jung, H. S. & Park, H. H., 2000 Feb 1, In : Applied Surface Science. 154, p. 482-484 3 p.

Research output: Contribution to journalConference article

16 Citations (Scopus)

Fabrication and characterization of Pt-oxide electrode for FeRAM application

Kim, W. S., Ha, S. M., Park, H. H. & Lee, H. N., 2000, Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000. Institute of Electrical and Electronics Engineers Inc., p. 186-187 2 p. 872696. (Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

19 Citations (Scopus)

Improvement of ferroelectric properties through the control of interfacial quality in sol-gel derived lead zirconate titanate thin film

Yanp, J. K., Kim, W. S. & Park, H. H., 2000, Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000. Institute of Electrical and Electronics Engineers Inc., p. 216-217 2 p. 872719. (Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

New passivation of GaAs Schottky contact using sulfidation and hydrogenation

Kang, M. G., Kim, J. W. & Park, H. H., 2000, Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000. Institute of Electrical and Electronics Engineers Inc., p. 220-221 2 p. 872722. (Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Studies on the structure and bonding state of nitric amorphous carbon (a-CNx) films by reactive rf magnetron sputtering

Jung, H. S. & Park, H. H., 2000 Dec 1, In : Thin Solid Films. 377-378, p. 320-325 6 p.

Research output: Contribution to journalArticle

12 Citations (Scopus)

Surface modified SiO2 xerogel films from HMDS/Acetone for intermetal dielectrics

Kim, H. R. & Park, H. H., 2000, Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000. Institute of Electrical and Electronics Engineers Inc., p. 218-219 2 p. 872720. (Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Synthesis and characterization of low-dielectric silica aerogel films

Hyun, S. H., Kim, J. J. & Park, H. H., 2000, In : Journal of the American Ceramic Society. 83, 3, p. 533-540 8 p.

Research output: Contribution to journalArticle

32 Citations (Scopus)

Synthesis of low-k porous silica films via freeze drying

Hyun, S. H., Kim, T. Y., Kim, G. S. & Park, H. H., 2000 Oct, In : Journal of Materials Science Letters. 19, 20, p. 1863-1866 4 p.

Research output: Contribution to journalArticle

13 Citations (Scopus)

The effect of silylation agent treatment on the dielectric properties of SiO aerogel films

Jung, S. B. & Park, H. H., 2000, Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000. Institute of Electrical and Electronics Engineers Inc., p. 278-279 2 p. 872762. (Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

The effects of solvent on the properties of sol-gel derived PZT thin film

Jung, J. Y., Kim, W. S. & Park, H. H., 2000, Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000. Institute of Electrical and Electronics Engineers Inc., p. 222-223 2 p. 872723. (Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1999

Bonding and structural changes of natively oxidized GaAs surface during ion induced deposition of Au

Kang, M. G. & Park, H. H., 1999 Nov 1, In : Thin Solid Films. 355, p. 435-439 5 p.

Research output: Contribution to journalConference article

11 Citations (Scopus)

Crystallization and ferroelectric behavior of sputter deposited PZT using a target containing excess Pb and O contents

Ha, S. M., Kim, D. H., Park, H. H. & Kim, T. S., 1999 Nov 1, In : Thin Solid Films. 355, p. 525-530 6 p.

Research output: Contribution to journalConference article

16 Citations (Scopus)

Distribution of S in (NH 4) 2S X-treated GaAs surfaces

Kim, J. W., Kang, M. G. & Park, H. H., 1999, In : Journal of the Korean Physical Society. 35, SUPPL. 2, p. S152-S156

Research output: Contribution to journalArticle

1 Citation (Scopus)

Effect of laser parameters on the property of DLC films grown by pulsed laser deposition

Pang, S. S., Lee, S. Y., Jung, H. S. & Park, H. H., 1999 Jul 18, In : Surface and Coatings Technology. 115, 2-3, p. 266-269 4 p.

Research output: Contribution to journalArticle

5 Citations (Scopus)
24 Citations (Scopus)

Effects of cation-substitution on the ferroelectric properties of sol-gel derived PZT thin film for FRAM application

Sik Kim, W., Ha, S. M., Park, H. H. & Eun Kim, C., 1999 Nov 1, In : Thin Solid Films. 355, p. 531-535 5 p.

Research output: Contribution to journalConference article

26 Citations (Scopus)

Ferroelectric switching properties of highly c-axis oriented YMnO 3 gate capacitors

Lee, H. N., Kim, I. S., Kim, Y. T., Choh, S. H., Kim, W. S. & Park, H. H., 1999, In : Journal of the Korean Physical Society. 35, SUPPL. 5, p. S1260-S1263

Research output: Contribution to journalArticle

4 Citations (Scopus)

Investigation on the surface characteristics of GaAs after sulfuric-vapor treatment

Kim, J. W., Kang, M. G. & Park, H. H., 1999 Nov 1, In : Thin Solid Films. 355, p. 423-429 7 p.

Research output: Contribution to journalConference article

4 Citations (Scopus)

Structural and electron field emission characteristics of pulsed laser deposited diamond-like carbon films with thermal treatment

Jung, H. S., Park, H. H., Pang, S. S. & Lee, S. Y., 1999 Nov 1, In : Thin Solid Films. 355, p. 151-156 6 p.

Research output: Contribution to journalConference article

19 Citations (Scopus)
1998

A preliminary study on the etching behavior of SiO 2 aerogel film with CHF 3 gas

Wang, S. J., Park, H. H. & Yeom, G. Y., 1998, In : Journal of the Korean Physical Society. 33, SUPPL. 2, p. S135-S137

Research output: Contribution to journalArticle

3 Citations (Scopus)

A study on the structural distribution of Se-passivated GaAs surface

Kim, J. W., Sa, S. H., Kang, M. G. & Park, H. H., 1998 Nov 2, In : Thin Solid Films. 332, 1-2, p. 305-311 7 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Atomic force microscopic observation of SrTiO3 polar surface

Sekiguchi, S., Fujimoto, M., Nomura, M., Cho, S. B., Tanaka, J., Nishihara, T., Kang, M. G. & Park, H. H., 1998 May 1, In : Solid State Ionics. 108, 1-4, p. 73-79 7 p.

Research output: Contribution to journalArticle

35 Citations (Scopus)

Effect of excess Pb and O content on the ferroelectric properties of sputter deposited Pb(Zr0.52Ti0.48)O3/Pt system

Park, H. H., Jin, I. S., Kim, D. H. & Kim, T. S., 1998 Nov 2, In : Thin Solid Films. 332, 1-2, p. 300-304 5 p.

Research output: Contribution to journalArticle

13 Citations (Scopus)

Effect of GaAs surface treatments using HCl or (NH4)2SX solutions on the interfacial bonding states induced by deposition of Au

Kang, M. G. & Park, H. H., 1998 Nov 2, In : Thin Solid Films. 332, 1-2, p. 437-443 7 p.

Research output: Contribution to journalArticle

9 Citations (Scopus)

Effect of internal surface bondings on the etching of SiO2 aerogel film

Wang, S. J. & Park, H. H., 1998, Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference. Yoo, H. J., Okazaki, S., Ahn, J., Kim, O. & Komuro, M. (eds.). Institute of Electrical and Electronics Engineers Inc., p. 244-245 2 p. 730063. (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference; vol. 1998-July).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Effect of O2 plasma treatment on the properties of SiO2 aerogel film

Kim, H. R., Park, H. H., Hyun, S. H. & Yeom, G. Y., 1998 Nov 2, In : Thin Solid Films. 332, 1-2, p. 444-448 5 p.

Research output: Contribution to journalArticle

20 Citations (Scopus)

Effect of oxygen plasma treatment on SiO2 aerogel films

Park, H. H., Jo, M. H., Kim, H. R. & Hyun, S. H., 1998, In : Journal of Materials Science Letters. 17, 24, p. 2083-2085 3 p.

Research output: Contribution to journalArticle

9 Citations (Scopus)

Interfacial reaction between aluminum metal and boron-doped polysilicon in a planar type antifuse device

Baek, J. T., Park, H. H., Ahn, B. T., Jun, C. H., Kim, Y. T., Song, Y. H. & Kim, J., 1998, In : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 37, 5 A, p. 2451-2454 4 p.

Research output: Contribution to journalArticle

Leakage current and dielectric breakdown behavior in annealed SiO2 aerogel films

Jo, M. H. & Park, H. H., 1998, In : Applied Physics Letters. 72, 11, p. 1391-1393 3 p.

Research output: Contribution to journalArticle

28 Citations (Scopus)

Reflow of copper in an oxygen ambient

Lee, S. Y., Kim, D. W., Rha, S. K., Park, C. O. & Park, H. H., 1998, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 16, 5, p. 2902-2905 4 p.

Research output: Contribution to journalArticle

10 Citations (Scopus)

Structural and compositional evolution of SiO2 aerogel film by oxygen plasma treatment

Kim, H. R. & Park, H. H., 1998, Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference. Yoo, H. J., Okazaki, S., Ahn, J., Kim, O. & Komuro, M. (eds.). Institute of Electrical and Electronics Engineers Inc., p. 242-243 2 p. 730062. (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference; vol. 1998-July).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

The comparative analysis of S and Se in an (NH4)2(S,Se)1.08-treated GaAs (100) surface

Sa, S. H., Kang, M. G., Park, H. H. & Oh, K. H., 1998 Mar, In : Surface and Coatings Technology. 100-101, 1-3, p. 222-228 7 p.

Research output: Contribution to journalArticle

5 Citations (Scopus)

The correlation between the laser energy density and the properties of diamond-like carbon films with Nd:YAG (355 nm) excimer laser

Jung, H. S., Park, H. H., Pang, S. S. & Lee, S. Y., 1998, In : Journal of the Korean Physical Society. 33, SUPPL. 2, p. S423-S426

Research output: Contribution to journalArticle

2 Citations (Scopus)

The effect of Ar+ ion bombardment on SiO2 aerogel film

Kim, H. R. & Park, H. H., 1998, In : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 37, 12 B, p. 6955-6958 4 p.

Research output: Contribution to journalArticle

8 Citations (Scopus)

The effect of interfacial state on electrical properties of PZT-electrode system for applying to nonvolatile memory devices

Jin, I. S., Park, H. H. & Kim, T. S., 1998 Mar, In : Surface and Coatings Technology. 100-101, 1-3, p. 229-233 5 p.

Research output: Contribution to journalArticle

3 Citations (Scopus)

The effect of sol viscosity on the sol-gel derived low density SiO2 xerogel film for intermetal dielectric application

Hong, J. K., Kim, H. R. & Park, H. H., 1998 Nov 2, In : Thin Solid Films. 332, 1-2, p. 449-454 6 p.

Research output: Contribution to journalArticle

73 Citations (Scopus)

The investigation of thermal effect on the properties of pulsed laser deposited diamond-like carbon films

Jung, H. S., Park, H. H., Pang, S. S. & Lee, S. Y., 1998 Nov 2, In : Thin Solid Films. 332, 1-2, p. 103-108 6 p.

Research output: Contribution to journalArticle

10 Citations (Scopus)

The investigation on the structural distribution of passivated GaAs (100) surface after (NH4)2Sx treatment

Sa, S. H., Kang, M. G., Park, H. H. & Suh, K. S., 1998 Mar, In : Surface and Coatings Technology. 100-101, 1-3, p. 234-237 4 p.

Research output: Contribution to journalArticle

10 Citations (Scopus)

X-ray photoelectron spectroscopic analysis on plasma-etched SiO2 aerogel with CHF3 gas

Wang, S. J., Jin, I. S. & Park, H. H., 1998 Mar, In : Surface and Coatings Technology. 100-101, 1-3, p. 59-64 6 p.

Research output: Contribution to journalArticle

9 Citations (Scopus)
1997

Ambient-dried low dielectric SiO2 aerogel thin film

Yang, H. S., Choi, S. Y., Hyun, S. H., Park, H. H. & Hong, J. K., 1997 Dec, In : Journal of Non-Crystalline Solids. 221, 2-3, p. 151-156 6 p.

Research output: Contribution to journalArticle

84 Citations (Scopus)