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1984 …2019

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1994

Effect of deposition temperature on dielectric properties of PECVD Ta2O5 thin film

Moon, H. S., Lee, J. S., Han, S. W., Park, J. W., Lee, J. H., Yang, S. K. & Park, H. H., 1994 Jan 1, In : Journal of Materials Science. 29, 12, p. 3372-3375 4 p.

Research output: Contribution to journalComment/debate

12 Citations (Scopus)