• 5365 Citations
  • 35 h-Index
1977 …2019
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Research Output 1977 2019

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Comment/debate
2006
Photoresists
1994
12 Citations (Scopus)

Effect of deposition temperature on dielectric properties of PECVD Ta2O5 thin film

Moon, H. S., Lee, J. S., Han, S. W., Park, J. W., Lee, J. H., Yang, S. K. & Park, H-H., 1994 Jan 1, In : Journal of Materials Science. 29, 12, p. 3372-3375 4 p.

Research output: Contribution to journalComment/debate

Plasma enhanced chemical vapor deposition
Dielectric properties
Thin films
Permittivity
Tantalum oxides