• 5755 Citations
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1984 …2019

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Effect of deposition temperature on dielectric properties of PECVD Ta2O5 thin film

Moon, H. S., Lee, J. S., Han, S. W., Park, J. W., Lee, J. H., Yang, S. K. & Park, H. H., 1994 Jan, In : Journal of Materials Science. 29, 12, p. 3372-3375 4 p.

Research output: Contribution to journalComment/debate

12 Citations (Scopus)