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1996 …2022

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  • 2014

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    Kim, H., Kim, S. H. & Lee, H. B. R., 2014 Jul 1, Atomic Layer Deposition for Semiconductors. Springer US, Vol. 9781461480549. p. 209-238 30 p.

    Research output: Chapter in Book/Report/Conference proceedingChapter

    4 Citations (Scopus)