• 3854 Citations
  • 31 h-Index
19962020

Research output per year

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Research Output

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Conference article
2005

Impact of plasma nitridation method on Vfb shift and the reliability of CMOSFETs

Kim, D. C., Cho, M. H., Heo, J. M., Koo, B. Y., Kim, C. S., Noh, Y. J., Kim, J. H., Chung, K. B., Shin, Y., Moon, D. W., Chung, U. I. & Moon, J. T., 2005 Dec 1, In : ECS Transactions. 1, 1, p. 233-241 9 p.

Research output: Contribution to journalConference article

S-RCAT (Sphere-shaped-Recess-Channel-Array Transistor) Technology for 70nm DRAM feature size and beyond

Kim, J. Y., Oh, H. J., Woo, D. S., Lee, Y. S., Kim, D. H., Kim, S. E., Ha, G. W., Kim, H. J., Kang, N. J., Park, J. M., Hwang, Y. S., Kim, D. I., Park, B. J., Huh, M., Lee, B. H., Kim, S. B., Cho, M. H., Jung, M. Y., Kim, Y. I., Jin, C. & 8 others, Shin, D. W., Shim, M. S., Lee, C. S., Lee, W. S., Park, J. C., Jin, G. Y., Park, Y. J. & Kim, K., 2005, In : Digest of Technical Papers - Symposium on VLSI Technology. 2005, p. 34-35 2 p., 1469201.

Research output: Contribution to journalConference article

29 Citations (Scopus)
2004

A Mechanically Enhanced Storage node for virtually unlimited Height (MESH) capacitor aiming at sub 70nm DRAMs

Kim, D. H., Kim, J. Y., Huh, M., Hwang, Y. S., Park, J. M., Han, D. H., Kim, D. I., Cho, M. H., Lee, B. H., Hwang, H. K., Song, J. W., Kang, N. J., Ha, G. W., Song, S. S., Shim, M. S., Kim, S. E., Kwon, J. M., Park, B. J., Oh, H. J., Kim, H. J. & 18 others, Woo, D. S., Jeong, M. Y., Kim, Y. I., Lee, Y. S., Kim, H. J., Shin, J. C., Seo, J. W., Jeong, S. S., Yoon, K. H., Ahn, T. H., Lee, J. B., Hyung, Y. W., Park, S. J., Kim, H. S., Choi, W. T., Jin, G. Y., Park, Y. G. & Kim, K., 2004, In : Technical Digest - International Electron Devices Meeting, IEDM. p. 69-72 4 p.

Research output: Contribution to journalConference article

15 Citations (Scopus)

Novel robust cell capacitor (leaning exterminated ring type insulator) and new storage node contact (top spacer contact) for 70nm DRAM technology and beyond

Park, J. M., Hwang, Y. S., Shin, D. W., Huh, M., Kim, D. H., Hwang, H. K., Oh, H. J., Song, J. W., Kang, N. J., Lee, B. H., Yun, C. J., Shim, M. S., Kim, S. E., Kim, J. Y., Kwon, J. M., Park, B. J., Lee, J. W., Kim, D. I., Cho, M. H., Jeong, M. Y. & 6 others, Kim, H. J., Kim, H. J., Kim, H. S., Jin, G. Y., Park, Y. G. & Kim, K., 2004 Oct 1, In : Digest of Technical Papers - Symposium on VLSI Technology. p. 34-35 2 p.

Research output: Contribution to journalConference article

4 Citations (Scopus)
2003

An Outstanding and Highly Manufacturable 80nm DRAM Technology

Kim, H. S., Kim, D. H., Park, J. M., Hwang, Y. S., Huh, M., Hwang, H. K., Kang, N. J., Lee, B. H., Cho, M. H., Kim, S. E., Kim, J. Y., Park, B. J., Lee, J. W., Kim, D. I., Jeong, M. Y., Kim, H. J., Park, Y. J. & Kim, K., 2003 Dec 1, In : Technical Digest - International Electron Devices Meeting. p. 411-414 4 p.

Research output: Contribution to journalConference article

9 Citations (Scopus)

Improvement of NBTI and Electrical Characteristics by Ozone Pre-treatment and PBTI issues in HfAIO(N) High-k Gate Dielectrics

Doh, S. J., Jung, H. S., Kim, Y. S., Lim, H. J., Kim, J. P., Lee, J. H., Lee, J. H., Lee, N. I., Kang, H. K., Suh, K. P., Park, S. G., Kang, S. B., Choi, G. H., Chung, Y. S., Baik, H. S., Chang, H. S., Cho, M. H., Moon, D. W., Park, H. B., Cho, M. & 1 others, Hwang, C. S., 2003, In : Technical Digest - International Electron Devices Meeting. p. 943-946 4 p.

Research output: Contribution to journalConference article

11 Citations (Scopus)

The Breakthrough in data retention time of DRAM using Recess-Channel-Array Transistor(RCAT) for 88 nm feature size and beyond

Kim, J. Y., Lee, C. S., Kim, S. E., Chung, I. B., Choi, Y. M., Park, B. J., Lee, J. W., Kim, D. I., Hwang, Y. S., Hwang, D. S., Hwang, H. K., Park, J. M., Kim, D. H., Kang, N. J., Cho, M. H., Jeong, M. Y., Kim, H. J., Han, J. N., Kim, S. Y., Nam, B. Y. & 7 others, Park, H. S., Chung, S. H., Lee, J. H., Park, J. S., Kim, H. S., Park, Y. J. & Kim, K., 2003 Oct 1, In : Digest of Technical Papers - Symposium on VLSI Technology. p. 11-12 2 p.

Research output: Contribution to journalConference article

69 Citations (Scopus)
2002

A novel robust TiN/AHO/TiN capacitor and CoSi2 cell pad structure for 70 nm stand-alone and embedded DRAM technology and beyond

Park, J. M., Hwang, Y. S., Hwang, D. S., Hwang, H. K., Lee, S. H., Kim, G. Y., Jeong, M. Y., Park, B. J., Kim, S. E., Cho, M. H., Kim, D. I., Chung, J. H., Park, I. S., Yoo, C. Y., Lee, J. H., Nam, B. Y., Park, Y. R., Kim, C. S., Sun, M. C., Ku, J. H. & 4 others, Choi, S., Kim, H. S., Park, Y. G. & Kim, K., 2002 Dec 1, In : Technical Digest - International Electron Devices Meeting. p. 823-826 4 p.

Research output: Contribution to journalConference article

6 Citations (Scopus)
2000

Effect of polysilicon gate on the flatband voltage shift and mobility degradation for ALD-Al2O3 gate dielectric

Lee, J. H., Koh, K., Lee, N. I., Cho, M. H., Kim, Y. K., Jeon, J. S., Cho, K. H., Shin, H. S., Kim, M. H., Fujihara, K., Kang, H. K. & Moon, J. T., 2000 Dec 1, In : Technical Digest - International Electron Devices Meeting. p. 645-648 4 p.

Research output: Contribution to journalConference article

84 Citations (Scopus)

Highly manufacturable 4Gb DRAM using 0.11μm DRAM technology

Jeong, H. S., Yang, W. S., Hwang, Y. S., Cho, C. H., Park, S., Ahn, S. J., Chun, Y. S., Shin, S. H., Song, S. H., Lee, J. Y., Jang, S. M., Lee, C. H., Jeong, J. H., Cho, M. H., Lee, J. K. & Kim, K., 2000 Dec 1, In : Technical Digest - International Electron Devices Meeting. p. 353-356 4 p.

Research output: Contribution to journalConference article

12 Citations (Scopus)
1997

Characteristics of Y2O3 films on Si(100) by ionized cluster beam deposition

Cho, M. H., Whangbo, S. W., Whang, C. N., Choi, S. C., Kang, S. B., Lee, S. I. & Lee, M. Y., 1997, In : Materials Research Society Symposium - Proceedings. 477, p. 345-349 5 p.

Research output: Contribution to journalConference article

1 Citation (Scopus)
1996

Gate oxide integrity (GOI) of MOS transistors with W/TiN stacked gate

Lee, D. H., Yeom, K. H., Cho, M-H., Kang, N. S. & Shim, T. E., 1996 Jan 1, In : Digest of Technical Papers - Symposium on VLSI Technology. p. 208-209 2 p.

Research output: Contribution to journalConference article

25 Citations (Scopus)