• 2141 Citations
  • 24 h-Index

Research output per year

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Research Output

  • 2141 Citations
  • 24 h-Index
  • 93 Article
  • 7 Conference contribution
  • 3 Conference article
  • 1 Paper

Hexene passivation on a p-type Zn-doped InGaAs surface

Lee, J., Na, J., Son, C. & Lim, S., 2020 Sep 1, In : Materials Chemistry and Physics. 251, 123197.

Research output: Contribution to journalArticle

  • Oxide regrowth mechanism during silicon nitride etching in vertical 3D NAND structures

    Kim, T., Son, C., Park, T. & Lim, S., 2020 Jan 15, In : Microelectronic Engineering. 221, 111191.

    Research output: Contribution to journalArticle

  • Open Access
  • 1 Citation (Scopus)

    Effect of SiO2 etching inhibitor to H3PO4 for the selective Si3N4 wet etching of 3D NAND

    Kim, T., Son, C., Park, T. & Lim, S., 2019 Jan 1, 16th International Symposium on Semiconductor Cleaning Science and Technology, SCST 2019. Saga, K., Mertens, P. W., Hattori, T., Ruzyllo, J. & Muscat, A. J. (eds.). 2 ed. Electrochemical Society Inc., p. 137-142 6 p. (ECS Transactions; vol. 92, no. 2).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution