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Fingerprint Dive into the research topics where Sangwoo Lim is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

Nanorods Engineering & Materials Science
Photoresists Chemical Compounds
nanorods Physics & Astronomy
Cleaning Engineering & Materials Science
Optical properties Engineering & Materials Science
Thin films Engineering & Materials Science
Etching Engineering & Materials Science
solar cells Physics & Astronomy

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Research Output 1996 2020

  • 2049 Citations
  • 24 h-Index
  • 92 Article
  • 6 Conference contribution
  • 3 Conference article
  • 1 Paper

Oxide regrowth mechanism during silicon nitride etching in vertical 3D NAND structures

Kim, T., Son, C., Park, T. & Lim, S., 2020 Jan 15, In : Microelectronic Engineering. 221, 111191.

Research output: Contribution to journalArticle

Silicon nitride
silicon nitrides
Oxides
Etching
etching
Photoresists
photoresists
Nitrates
nitrates
Ions
1 Citation (Scopus)
Open Access
Etching
Dissolution
Kinetics
Water
Fabrication
1 Citation (Scopus)

Elemental behaviors of InGaAs surface after treatment in aqueous solutions

Na, J. & Lim, S., 2019 May 1, In : Microelectronic Engineering. 212, p. 27-36 10 p.

Research output: Contribution to journalArticle

Indium
Gallium arsenide
surface treatment
gallium
indium
Dimethyl sulfoxide
Photoresists
Dimethyl Sulfoxide
Acetonitrile
Ions