• 2091 Citations
  • 24 h-Index
19962020

Research output per year

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Research Output

  • 2091 Citations
  • 24 h-Index
  • 92 Article
  • 6 Conference contribution
  • 3 Conference article
  • 1 Paper

Oxide regrowth mechanism during silicon nitride etching in vertical 3D NAND structures

Kim, T., Son, C., Park, T. & Lim, S., 2020 Jan 15, In : Microelectronic Engineering. 221, 111191.

Research output: Contribution to journalArticle

  • Open Access
  • 1 Citation (Scopus)

    Elemental behaviors of InGaAs surface after treatment in aqueous solutions

    Na, J. & Lim, S., 2019 May 1, In : Microelectronic Engineering. 212, p. 27-36 10 p.

    Research output: Contribution to journalArticle

  • 1 Citation (Scopus)