• 2141 Citations
  • 24 h-Index
19962020

Research output per year

If you made any changes in Pure these will be visible here soon.

Fingerprint Dive into the research topics where Sangwoo Lim is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

Network Recent external collaboration on country level. Dive into details by clicking on the dots.

Research Output

  • 2141 Citations
  • 24 h-Index
  • 93 Article
  • 7 Conference contribution
  • 3 Conference article
  • 1 Paper

Hexene passivation on a p-type Zn-doped InGaAs surface

Lee, J., Na, J., Son, C. & Lim, S., 2020 Sep 1, In : Materials Chemistry and Physics. 251, 123197.

Research output: Contribution to journalArticle

  • Oxide regrowth mechanism during silicon nitride etching in vertical 3D NAND structures

    Kim, T., Son, C., Park, T. & Lim, S., 2020 Jan 15, In : Microelectronic Engineering. 221, 111191.

    Research output: Contribution to journalArticle

  • Open Access
  • 1 Citation (Scopus)

    Effect of SiO2 etching inhibitor to H3PO4 for the selective Si3N4 wet etching of 3D NAND

    Kim, T., Son, C., Park, T. & Lim, S., 2019 Jan 1, 16th International Symposium on Semiconductor Cleaning Science and Technology, SCST 2019. Saga, K., Mertens, P. W., Hattori, T., Ruzyllo, J. & Muscat, A. J. (eds.). 2 ed. Electrochemical Society Inc., p. 137-142 6 p. (ECS Transactions; vol. 92, no. 2).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution