If you made any changes in Pure these will be visible here soon.

Research Output 1996 2020

  • 2049 Citations
  • 24 h-Index
  • 92 Article
  • 6 Conference contribution
  • 3 Conference article
  • 1 Paper
2020

Oxide regrowth mechanism during silicon nitride etching in vertical 3D NAND structures

Kim, T., Son, C., Park, T. & Lim, S., 2020 Jan 15, In : Microelectronic Engineering. 221, 111191.

Research output: Contribution to journalArticle

Silicon nitride
silicon nitrides
Oxides
Etching
etching
2019
Photoresists
photoresists
Nitrates
nitrates
Ions
1 Citation (Scopus)
Open Access
Etching
Dissolution
Kinetics
Water
Fabrication
1 Citation (Scopus)

Elemental behaviors of InGaAs surface after treatment in aqueous solutions

Na, J. & Lim, S., 2019 May 1, In : Microelectronic Engineering. 212, p. 27-36 10 p.

Research output: Contribution to journalArticle

Indium
Gallium arsenide
surface treatment
gallium
indium
Dimethyl sulfoxide
Photoresists
Dimethyl Sulfoxide
Acetonitrile
Ions
2018
1 Citation (Scopus)

Characterization of the copper iodide hole-selective contact for silicon solar cell application

Jeon, K., Jee, H., Park, M. J., Lim, S. & Jeong, C., 2018 Aug 30, In : Thin Solid Films. 660, p. 613-617 5 p.

Research output: Contribution to journalArticle

Silicon solar cells
Iodides
iodides
Copper
solar cells

Effect of surface preparation on the residual oxide thickness and material loss of InGaAs layer

Na, J. & Lim, S., 2018 Jan 1, ECS Transactions. Timans, P. J., Kakushima, K., Karim, Z., Gusev, E. P., Jagannathan, H., De Gendt, S. & Roozeboom, F. (eds.). 6 ed. Electrochemical Society Inc., p. 105-108 4 p. (ECS Transactions; vol. 85, no. 6).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Gallium arsenide
Indium
Oxides
Oxidation
Etching

Improvement in current density of nano- and micro-structured Si solar cells by cost-effective elastomeric stamp process

Jeon, K., Jee, H., Lim, S., Park, M. J. & Jeong, C., 2018 Mar 1, In : AIP Advances. 8, 3, 035203.

Research output: Contribution to journalArticle

solar cells
etching
current density
costs
microstructure
2 Citations (Scopus)
Nanoparticles
Light scattering
Conversion efficiency
Charge transfer
Photoluminescence

Ion implanted photoresist removal by material loss-free organic solvent

Oh, E. & Lim, S., 2018 Jan 1, Ultra Clean Processing of Semiconductor Surfaces XIV. Heyns, M., Meuris, M., Meuris, M. & Mertens, P. (eds.). Trans Tech Publications Ltd, p. 52-56 5 p. (Solid State Phenomena; vol. 282 SSP).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Photoresists
photoresists
Organic solvents
Dimethyl Sulfoxide
Acetonitrile

Is highly selective si3n4/sio2 etching feasible without phosphoric acid?

Son, C., Kim, T., Park, T. & Lim, S., 2018 Jan 1, Ultra Clean Processing of Semiconductor Surfaces XIV. Heyns, M., Meuris, M., Meuris, M. & Mertens, P. (eds.). Trans Tech Publications Ltd, p. 147-151 5 p. (Solid State Phenomena; vol. 282 SSP).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

etchants
phosphoric acid
Phosphoric acid
Etching
selectivity
3 Citations (Scopus)
Graphite
Oxides
Graphene
Polarization
Crystalline materials

Toward the surface preparation of ingaas for the future cmos integration

Lim, S., 2018 Jan 1, Ultra Clean Processing of Semiconductor Surfaces XIV. Heyns, M., Meuris, M., Meuris, M. & Mertens, P. (eds.). Trans Tech Publications Ltd, p. 39-42 4 p. (Solid State Phenomena; vol. 282 SSP).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

preparation
Passivation
passivity
Lattice mismatch
Wet etching
2017
10 Citations (Scopus)

Behavior of GaSb (100) and InSb (100) surfaces in the presence of H2O2 in acidic and basic cleaning solutions

Seo, D., Na, J., Lee, S. & Lim, S., 2017 Mar 31, In : Applied Surface Science. 399, p. 523-534 12 p.

Research output: Contribution to journalArticle

Cleaning
Hydrogen peroxide
Hydrogen Peroxide
Gallium
Indium
9 Citations (Scopus)

Fabrication of dye-sensitized solar cells using a both-ends-opened TiO2 nanotube/nanoparticle hetero-nanostructure

Hossain, M. A., Oh, S. & Lim, S., 2017 Jul 25, In : Journal of Industrial and Engineering Chemistry. 51, p. 122-128 7 p.

Research output: Contribution to journalArticle

Nanotubes
Nanostructures
Nanoparticles
Fabrication
Conversion efficiency
3 Citations (Scopus)

Oxidation and etching behaviors of the InAs surface in various acidic and basic chemical solutions

Na, J., Lee, S. & Lim, S., 2017 Apr 1, In : Surface Science. 658, p. 22-30 9 p.

Research output: Contribution to journalArticle

Indium arsenide
indium
Etching
etching
Oxidation
1 Citation (Scopus)

Reduction of ∙Si≡Si3 defect density at the Si/SiO2 interface by sol-gel SiO2 thin film passivation

Oh, S., Lee, S., Oh, E. & Lim, S., 2017 Jun 30, In : Thin Solid Films. 632, p. 134-140 7 p.

Research output: Contribution to journalArticle

Carrier lifetime
Defect density
carrier lifetime
Passivation
passivity
2016
1 Citation (Scopus)

Energy harvesting δ-phase polyvinylidene-fluoride sponge

Oh, E., Seo, D., Kim, S., Lee, K. Y., Kim, S. W. & Lim, S., 2016 Jan 1, In : Science of Advanced Materials. 8, 4, p. 817-824 8 p.

Research output: Contribution to journalArticle

Energy harvesting
Ferroelectric materials
Electric potential
Capacitance
Hysteresis
2 Citations (Scopus)

Metal-assisted chemical etching of Ge surface and its effect on photovoltaic devices

Lee, S., Choo, H., Kim, C., Oh, E., Seo, D. & Lim, S., 2016 May 15, In : Applied Surface Science. 371, p. 129-138 10 p.

Research output: Contribution to journalArticle

Etching
Metals
etching
flat surfaces
metals
5 Citations (Scopus)

Removal of ion-implanted photoresists on GaAs using two organic solvents in sequence

Oh, E., Na, J., Lee, S. & Lim, S., 2016 Jul 15, In : Applied Surface Science. 376, p. 34-42 9 p.

Research output: Contribution to journalArticle

Photoresists
photoresists
Organic solvents
Ions
ions
2015
7 Citations (Scopus)

Behavior of a GaSb (100) Surface in the Presence of H2O2 in Wet-Etching Solutions

Seo, D., Na, J., Lee, S. & Lim, S., 2015 Nov 5, In : Journal of Physical Chemistry C. 119, 44, p. 24774-24780 7 p.

Research output: Contribution to journalArticle

Wet etching
etching
Etching
Oxidation
Dilution
3 Citations (Scopus)

Electron beam-treated ZnO thin film as an anti-reflection layer for crystalline Si solar cells

Kim, S., Kim, C., Lee, J., Na, J., Jeong, C. & Lim, S., 2015 Jan 1, In : Science of Advanced Materials. 7, 8, p. 1665-1671 7 p.

Research output: Contribution to journalArticle

Electron beams
Solar cells
Crystalline materials
Thin films
Carrier concentration
8 Citations (Scopus)

Enhanced absorption and short circuit current density of selective emitter solar cell using double textured structure

Kim, C., Lee, J., Lim, S. & Jeong, C., 2015 Jun 1, In : Solar Energy. 116, p. 265-271 7 p.

Research output: Contribution to journalArticle

Short circuit currents
Solar cells
Current density
Screen printing
Silicon
6 Citations (Scopus)

Improvement in electrical properties of sol–gel-derived In-doped ZnO thin film by electron beam treatment

Kim, S., Kim, C., Na, J., Oh, E., Jeong, C. & Lim, S., 2015 Jun 1, In : Journal of Sol-Gel Science and Technology. 74, 3, p. 790-799 10 p.

Research output: Contribution to journalArticle

Electron beams
Electric properties
electrical properties
Doping (additives)
electron beams
5 Citations (Scopus)

Improvement of Cu2ZnSnS4 thin film properties by a modified sulfurization process

Seo, D., Na, J., Kim, C., Jeong, C. & Lim, S., 2015 Sep 30, In : Thin Solid Films. 591, p. 289-294 6 p.

Research output: Contribution to journalArticle

Thin films
thin films
Sulfur
Solar cells
Grain boundaries

Preparation of periodically arrayed silicon microwires using simple patterning process

Kim, C., Lim, S. & Jeong, C., 2015 Nov 1, In : Journal of Nanoscience and Nanotechnology. 15, 11, p. 8527-8532 6 p.

Research output: Contribution to journalArticle

Polystyrenes
Silicon
beads
polystyrene
preparation
2014
8 Citations (Scopus)

Control of metal salt ratio and MoS2 layer thickness in a Cu2ZnSnS4 thin film solar cell

Seo, D., Kim, C., Oh, E., Hong, C. W., Kim, J. H. & Lim, S., 2014 Aug, In : Journal of Materials Science: Materials in Electronics. 25, 8, p. 3420-3426 7 p.

Research output: Contribution to journalArticle

ethylenediamine
Salts
solar cells
Metals
salts
7 Citations (Scopus)

Effect of energetic electron beam treatment on Ga-doped ZnO thin films

Kim, S., Kim, C., Jeong, C. & Lim, S., 2014 Jun, In : Current Applied Physics. 14, 6, p. 862-867 6 p.

Research output: Contribution to journalArticle

Zinc Oxide
Zinc oxide
zinc oxides
Oxide films
Electron beams
12 Citations (Scopus)

Selective wet etching of Si3N4/SiO2 in phosphoric acid with the addition of fluoride and silicic compounds

Seo, D., Bae, J. S., Oh, E., Kim, S. & Lim, S., 2014 Apr 25, In : Microelectronic Engineering. 118, p. 66-71 6 p.

Research output: Contribution to journalArticle

Wet etching
phosphoric acid
Phosphoric acid
Fluorides
Fluorine

Surface modification of a MoSiON phase shift mask to reduce critical dimension variation after exposure to a 193-nm ArF excimer laser

Choo, H., Seo, D. & Lim, S., 2014 Aug 30, In : Applied Surface Science. 311, p. 831-836 6 p.

Research output: Contribution to journalArticle

Excimer lasers
Phase shift
Surface treatment
Masks
Annealing

Ultrafast crystallization of amorphous silicon thin films by using an electron beam annealing method

Kim, C., Lim, S. & Jeong, C., 2014 Apr, In : Journal of the Korean Physical Society. 64, 8, p. 1091-1095 5 p.

Research output: Contribution to journalArticle

amorphous silicon
electron beams
crystallization
annealing
thin films
2013
7 Citations (Scopus)

Effect of energetic electron beam treatment on transparent conductive ZnO thin films

Park, C., Kim, S., Kim, C., Jeong, C. & Lim, S., 2013 Dec 2, In : Thin Solid Films. 548, p. 263-269 7 p.

Research output: Contribution to journalArticle

Conductive films
Electron beams
electron beams
Thin films
thin films
14 Citations (Scopus)
Crystallization
Sulfur
Crystal growth
Sol-gels
crystal growth
14 Citations (Scopus)

Reversible wettability control of silicon nanowire surfaces: From superhydrophilicity to superhydrophobicity

Seo, J., Lee, S., Han, H., Chung, Y., Lee, J., Kim, S. D., Kim, Y. W., Lim, S. & Lee, T., 2013 Jan 1, In : Thin Solid Films. 527, p. 179-185 7 p.

Research output: Contribution to journalArticle

Silicon
wettability
Nanowires
Wetting
nanowires

Surface modification of the MoSiON phase shift mask to reduce critical dimension variation

Choo, H., Seo, D. & Lim, S., 2013 Oct 1, In : Applied Surface Science. 282, p. 320-325 6 p.

Research output: Contribution to journalArticle

Phase shift
Surface treatment
Masks
Cleaning
Ammonium Hydroxide
8 Citations (Scopus)

Synthesis of arsenic-doped p-type ZnO films by addition of As 2O3 to the ZnO spin coating solution

Park, C., Kim, S. & Lim, S., 2013 Jan 1, In : Solid State Communications. 167, p. 18-22 5 p.

Research output: Contribution to journalArticle

Spin coating
Arsenic
arsenic
coating
synthesis
30 Citations (Scopus)

ZnO nanowire-based glucose biosensors with different coupling agents

Jung, J. & Lim, S., 2013 Jan 15, In : Applied Surface Science. 265, p. 24-29 6 p.

Research output: Contribution to journalArticle

Coupling agents
Biosensors
Nanowires
Glucose
Glucose Oxidase
2012

Effect of post-etch cleaning on Ru-capped extreme ultraviolet lithography photomask

Oh, J., Park, C., Seo, D., Jung, J. & Lim, S., 2012 Mar 1, In : Applied Surface Science. 258, 10, p. 4702-4706 5 p.

Research output: Contribution to journalArticle

Extreme ultraviolet lithography
Photomasks
Cleaning
Surface roughness
Peroxides
24 Citations (Scopus)

Effects of ZnO nanowire synthesis parameters on the photovoltaic performance of dye-sensitized solar cells

Jung, J., Myoung, J. & Lim, S., 2012 Jun 30, In : Thin Solid Films. 520, 17, p. 5779-5789 11 p.

Research output: Contribution to journalArticle

tetramethylenedisulfotetramine
Nanowires
nanowires
solar cells
dyes
15 Citations (Scopus)

Successive ionic layer adsorption and reaction of ZnSe shells for ZnO nanowire-based dye-sensitized solar cells

Chung, J., Myoung, J., Oh, J. & Lim, S., 2012 Apr 1, In : Journal of Physics and Chemistry of Solids. 73, 4, p. 535-539 5 p.

Research output: Contribution to journalArticle

Nanowires
nanowires
solar cells
dyes
Adsorption
2011
4 Citations (Scopus)

Addition of surfactants in ozonated water cleaning for the suppression of functional group formation and particle adhesion on the SiO 2 surface

Yang, J., Im, K. & Lim, S., 2011 Apr 15, In : Applied Surface Science. 257, 13, p. 5476-5479 4 p.

Research output: Contribution to journalArticle

glycolic acid
Surface-Active Agents
Functional groups
Cleaning
Surface active agents
2 Citations (Scopus)

Behavior of Ru surfaces after ozonated water treatment

Seo, D., Park, C., Jung, J., Yoon, M., Lee, D., Kim, C. Y. & Lim, S., 2011 Oct 1, In : Applied Surface Science. 257, 24, p. 10477-10482 6 p.

Research output: Contribution to journalArticle

Water treatment
Ruthenium
Oxides
Molecules
Cleaning
23 Citations (Scopus)

Effect of Al-doping on the structure and optical properties of electrospun zinc oxide nanofiber films

Yun, S. & Lim, S., 2011 Aug 15, In : Journal of Colloid and Interface Science. 360, 2, p. 430-439 10 p.

Research output: Contribution to journalArticle

Zinc Oxide
Nanofibers
Zinc oxide
Optical properties
Doping (additives)
13 Citations (Scopus)

Etch behavior of ALD Al2O3 on HfSiO and HfSiON stacks in acidic and basic etchants

Oh, J., Myoung, J., Bae, J. S. & Lim, S., 2011 Apr 29, In : Journal of the Electrochemical Society. 158, 4, p. D217-D222

Research output: Contribution to journalArticle

etchants
Atomic layer deposition
atomic layer epitaxy
Thin films
Wet etching
52 Citations (Scopus)
Nanofibers
Conversion efficiency
Seed
seeds
solar cells
2 Citations (Scopus)

Kinetic study on the wet etching of La2O3 in acidic solutions

Oh, J., Bae, J. S. & Lim, S., 2011 Oct 18, In : Journal of the Electrochemical Society. 158, 11, p. H1183-H1187

Research output: Contribution to journalArticle

Wet etching
Etching
etching
Kinetics
kinetics
2 Citations (Scopus)

Partial discharge measurement of power cables for nuclear power plant

Ha, C. W., Ju, K. H. & Lim, W. S., 2011 Aug, In : Transactions of the Korean Institute of Electrical Engineers. 60, 8, p. 1632-1638 7 p.

Research output: Contribution to journalArticle

Partial discharges
Nuclear power plants
Cables
Plant shutdowns
Electric cables
22 Citations (Scopus)

Synthesis of ZnO nanospheres with uniform nanopores by a hydrothermal process

Zhang, Y., Chung, J., Lee, J., Myoung, J. & Lim, S., 2011 Dec 1, In : Journal of Physics and Chemistry of Solids. 72, 12, p. 1548-1553 6 p.

Research output: Contribution to journalArticle

Nanopores
Nanospheres
synthesis
Pore structure
Electron diffraction
2010
74 Citations (Scopus)

Annealing effects of ZnO nanorods on dye-sensitized solar cell efficiency

Chung, J., Lee, J. & Lim, S., 2010 Jun 1, In : Physica B: Condensed Matter. 405, 11, p. 2593-2598 6 p.

Research output: Contribution to journalArticle

Nanorods
nanorods
solar cells
dyes
Annealing
3 Citations (Scopus)

Atomic layer deposition of HfO2 on self-assembled monolayer-passivated Ge surfaces

Park, K., Lee, Y., Im, K. T., Lee, J. Y. & Lim, S., 2010 May 31, In : Thin Solid Films. 518, 15, p. 4126-4130 5 p.

Research output: Contribution to journalArticle

Atomic layer deposition
Self assembled monolayers
atomic layer epitaxy
stoichiometry
film thickness