If you made any changes in Pure these will be visible here soon.

Research Output 1996 2020

  • 2074 Citations
  • 24 h-Index
  • 92 Article
  • 6 Conference contribution
  • 3 Conference article
  • 1 Paper
Filter
Conference article

Control of ozonated water cleaning process for photoresist removal

Lim, S. & Chidsey, C. E. D., 2000 Dec 1, In : Diffusion and Defect Data Pt.B: Solid State Phenomena. 76-77, p. 215-218 4 p.

Research output: Contribution to journalConference article

Ozone
Photoresists
photoresists
cleaning
ozone
3 Citations (Scopus)

Effect of fluorine addition to plasma-enhanced chemical vapor deposition silicon oxide film

Lim, S. W., Miyata, M., Naito, T., Shimogaki, Y., Nakano, Y., Tada, K. & Komiyama, H., 1997 Jan 1, In : Materials Research Society Symposium - Proceedings. 443, p. 143-148 6 p.

Research output: Contribution to journalConference article

Fluorine
Silicon oxides
Plasma enhanced chemical vapor deposition
silicon oxides
Oxide films
4 Citations (Scopus)

Structire, properties, and process characteristics of low-k materials prepared by PECVD

Shimogaki, Y., Lim, S., Loh, E. G., Nakano, Y., Tada, K. & Komiyama, H., 1999 Dec 1, In : Materials Research Society Symposium - Proceedings. 565, p. 255-266 12 p.

Research output: Contribution to journalConference article

Plasma enhanced chemical vapor deposition
Silicon oxides
silicon oxides
Oxide films
Fluorine