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Research Output 2001 2019

8 Citations (Scopus)

Fully strained low-temperature epitaxy of TiN/MgO(001) layers using high-flux, low-energy ion irradiation during reactive magnetron sputter deposition

Lee, T., Seo, H., Hwang, H., Howe, B., Kodambaka, S., Greene, J. E. & Petrov, I., 2010 Jul 1, In : Thin Solid Films. 518, 18, p. 5169-5172 4 p.

Research output: Contribution to journalLetter

Sputter deposition
Ion bombardment
ion irradiation
Dislocations (crystals)
Epitaxial growth