TY - GEN
T1 - 2-D scanning mirror using plastically deformed angular vertical comb drive actuator
AU - Kim, Jongbaeg
AU - Christensen, Dane
AU - Lin, Liwei
N1 - Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2005
Y1 - 2005
N2 - We have demonstrated microfabricated, monolithic two degrees of freedom (2-D) electrostatic torsional mirrors using a 3-mask process on SOI wafer with a single plastic deformation step. The mirror operated independently in two orthogonal directions as controlled by two sets of self-aligned angular vertical combs. The measured dynamic performance showed resonant frequencies of 10.56 kHz and 1.54 kHz with optical scanning angles up to 27 degrees and 20 degrees in the two orthogonal axes respectively, under driving voltages of 20V dc plus 15Vpp. A reliability test of 90-day continuous mirror operation that corresponds to peak resonance of 80- and 12.1-billion cycles on the two orthogonal axes showed negligible performance variations.
AB - We have demonstrated microfabricated, monolithic two degrees of freedom (2-D) electrostatic torsional mirrors using a 3-mask process on SOI wafer with a single plastic deformation step. The mirror operated independently in two orthogonal directions as controlled by two sets of self-aligned angular vertical combs. The measured dynamic performance showed resonant frequencies of 10.56 kHz and 1.54 kHz with optical scanning angles up to 27 degrees and 20 degrees in the two orthogonal axes respectively, under driving voltages of 20V dc plus 15Vpp. A reliability test of 90-day continuous mirror operation that corresponds to peak resonance of 80- and 12.1-billion cycles on the two orthogonal axes showed negligible performance variations.
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M3 - Conference contribution
AN - SCOPUS:27544455408
SN - 0780389948
T3 - Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
SP - 697
EP - 700
BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Y2 - 5 June 2005 through 9 June 2005
ER -