Abstract
A new metal surface micromachining technology utilizing 3-D lithography, electroplating, and mechanical polishing has been developed to fabricate arbitrary 3-D metal microstructures as post-IC processes at low temperature below 120°C. Using this technology, various highly-suspended 3-D microstructures have been successfully demonstrated for RF and microwave MEMS applications. We have fabricated spiral inductors suspended 100μm over the substrate, coplanar waveguides suspended 50μm over the substrate, and complicated micro-coaxial lines which have 50μm-suspended center signal lines surrounded by ground shields of 100μm in height.
| Original language | English |
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| Pages | 673-676 |
| Number of pages | 4 |
| Publication status | Published - 2002 |
| Event | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States Duration: 2002 Jan 20 → 2002 Jan 24 |
Conference
| Conference | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 |
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| Country/Territory | United States |
| City | Las Vegas, NV |
| Period | 02/1/20 → 02/1/24 |
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering