3-D lithography and metal surface micromachining for RF and microwave MEMS

Jun Bo Yoon, Byeong Il Kim, Yun Seok Choi, Euisik Yoon

Research output: Contribution to conferencePaperpeer-review

27 Citations (Scopus)

Fingerprint Dive into the research topics of '3-D lithography and metal surface micromachining for RF and microwave MEMS'. Together they form a unique fingerprint.

Engineering & Materials Science