A 0.53pJK2 7000μm2 resistor-based temperature sensor with an inaccuracy of ±0.35°C (3σ) in 65nm CMOS

Woojun Choi; Yong Tae Lee; Seonhong Kim; Sanghoon Lee; Jieun Jang; Junhyun Chun; Kofi A.A. Makinwa; Youngcheol Chae

doi:10.1109/ISSCC.2018.8310314

A 0.53pJK² 7000μm² resistor-based temperature sensor with an inaccuracy of ±0.35°C (3σ) in 65nm CMOS

Woojun Choi, Yong Tae Lee, Seonhong Kim, Sanghoon Lee, Jieun Jang, Junhyun Chun, Kofi A.A. Makinwa, Youngcheol Chae

Department of Electrical and Electronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

15 Citations (Scopus)

Abstract

In microprocessors and DRAMs, on-chip temperature sensors are essential components, ensuring reliability by monitoring thermal gradients and hot spots. Such sensors must be as small as possible, since multiple sensors are required for dense thermal monitoring. However, conventional BJT-based temperature sensors are not compatible with the sub-1V supply of advanced processes. Subthreshold MOSFETs can operate from lower supplies, but at high temperatures their performance is limited by leakage [1,2]. Thermal diffusivity (TD) sensors achieve sub-1V operation and small area with moderate accuracy, but require milliwatts of power [3]. Recently, resistor-based sensors based on RC WienBridge (WB) filters have realized high resolution and energy efficiency [4,5]. Fundamentally, they are robust to process and supply-voltage scaling. However, their readout circuitry has been based on continuous-time (CT) ΔΣ ADCs or frequency-locked loops (FLLs), which require precision analog circuits and occupy considerable area (>0.7mm²).

Original language	English
Title of host publication	2018 IEEE International Solid-State Circuits Conference, ISSCC 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	322-324
Number of pages	3
ISBN (Electronic)	9781509049394
DOIs	https://doi.org/10.1109/ISSCC.2018.8310314
Publication status	Published - 2018 Mar 8
Event	65th IEEE International Solid-State Circuits Conference, ISSCC 2018 - San Francisco, United States Duration: 2018 Feb 11 → 2018 Feb 15

Publication series

Name	Digest of Technical Papers - IEEE International Solid-State Circuits Conference
Volume	61
ISSN (Print)	0193-6530

Other

Other	65th IEEE International Solid-State Circuits Conference, ISSCC 2018
Country/Territory	United States
City	San Francisco
Period	18/2/11 → 18/2/15

Bibliographical note

Funding Information:
This paper was the result of a research project supported by SK Hynix Inc. and it was also supported by NRF (National Research Foundation of Korea) Grant funded by the Korean Government (NRF-2016-Global Ph.D. Fellowship Program).

Publisher Copyright:
© 2018 IEEE.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/ISSCC.2018.8310314

Cite this

Choi, W., Lee, Y. T., Kim, S., Lee, S., Jang, J., Chun, J., Makinwa, K. A. A., & Chae, Y. (2018). A 0.53pJK² 7000μm² resistor-based temperature sensor with an inaccuracy of ±0.35°C (3σ) in 65nm CMOS. In 2018 IEEE International Solid-State Circuits Conference, ISSCC 2018 (pp. 322-324). (Digest of Technical Papers - IEEE International Solid-State Circuits Conference; Vol. 61). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISSCC.2018.8310314

Choi, Woojun ; Lee, Yong Tae ; Kim, Seonhong et al. / A 0.53pJK² 7000μm² resistor-based temperature sensor with an inaccuracy of ±0.35°C (3σ) in 65nm CMOS. 2018 IEEE International Solid-State Circuits Conference, ISSCC 2018. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 322-324 (Digest of Technical Papers - IEEE International Solid-State Circuits Conference).

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abstract = "In microprocessors and DRAMs, on-chip temperature sensors are essential components, ensuring reliability by monitoring thermal gradients and hot spots. Such sensors must be as small as possible, since multiple sensors are required for dense thermal monitoring. However, conventional BJT-based temperature sensors are not compatible with the sub-1V supply of advanced processes. Subthreshold MOSFETs can operate from lower supplies, but at high temperatures their performance is limited by leakage [1,2]. Thermal diffusivity (TD) sensors achieve sub-1V operation and small area with moderate accuracy, but require milliwatts of power [3]. Recently, resistor-based sensors based on RC WienBridge (WB) filters have realized high resolution and energy efficiency [4,5]. Fundamentally, they are robust to process and supply-voltage scaling. However, their readout circuitry has been based on continuous-time (CT) ΔΣ ADCs or frequency-locked loops (FLLs), which require precision analog circuits and occupy considerable area (>0.7mm2).",

author = "Woojun Choi and Lee, {Yong Tae} and Seonhong Kim and Sanghoon Lee and Jieun Jang and Junhyun Chun and Makinwa, {Kofi A.A.} and Youngcheol Chae",

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Choi, W, Lee, YT, Kim, S, Lee, S, Jang, J, Chun, J, Makinwa, KAA & Chae, Y 2018, A 0.53pJK² 7000μm² resistor-based temperature sensor with an inaccuracy of ±0.35°C (3σ) in 65nm CMOS. in 2018 IEEE International Solid-State Circuits Conference, ISSCC 2018. Digest of Technical Papers - IEEE International Solid-State Circuits Conference, vol. 61, Institute of Electrical and Electronics Engineers Inc., pp. 322-324, 65th IEEE International Solid-State Circuits Conference, ISSCC 2018, San Francisco, United States, 18/2/11. https://doi.org/10.1109/ISSCC.2018.8310314

A 0.53pJK² 7000μm² resistor-based temperature sensor with an inaccuracy of ±0.35°C (3σ) in 65nm CMOS. / Choi, Woojun; Lee, Yong Tae; Kim, Seonhong et al.

2018 IEEE International Solid-State Circuits Conference, ISSCC 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 322-324 (Digest of Technical Papers - IEEE International Solid-State Circuits Conference; Vol. 61).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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Choi W, Lee YT, Kim S, Lee S, Jang J, Chun J et al. A 0.53pJK² 7000μm² resistor-based temperature sensor with an inaccuracy of ±0.35°C (3σ) in 65nm CMOS. In 2018 IEEE International Solid-State Circuits Conference, ISSCC 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 322-324. (Digest of Technical Papers - IEEE International Solid-State Circuits Conference). doi: 10.1109/ISSCC.2018.8310314