A 1.8V 11μW CMOS smart humidity sensor for RFID sensing applications

Zhichao Tan, Roel Daamen, Aurélie Humbert, Kamran Souri, Youngcheol Chae, Youri V. Ponomarev, Michiel A.P. Pertijs

Research output: Chapter in Book/Report/Conference proceedingConference contribution

26 Citations (Scopus)

Abstract

A fully-integrated humidity sensor for a smart RFID sensor platform has been realized in 0.16μm standard CMOS technology. It consists of a top-metal finger-structure capacitor covered with a humidity-sensitive layer, combined with a micro-power flexible sensor interface based on a second-order incremental delta-sigma converter. The interface can be easily reconfigured to compensate for process variation of the sensing element. In a measurement time of 10.2 ms, the interface performs a 13-bits capacitance-to-digital conversion while consuming only 5.85 μA from 1.8 V supply. In combination with the co-integrated sensor capacitor, it thus provides a humidity-to-digital conversion with a resolution of 0.1% RH in the range of 20% to 90% RH at only 107 nJ per measurement. This represents a significant improvement in energy efficiency compared to existing capacitive-sensor interfaces with comparable performance.

Original languageEnglish
Title of host publication2011 Proceedings of Technical Papers
Subtitle of host publicationIEEE Asian Solid-State Circuits Conference 2011, A-SSCC 2011
Pages105-108
Number of pages4
DOIs
Publication statusPublished - 2011 Dec 1
Event7th IEEE Asian Solid-State Circuits Conference, A-SSCC 2011 - Jeju, Korea, Republic of
Duration: 2011 Nov 142011 Nov 16

Publication series

Name2011 Proceedings of Technical Papers: IEEE Asian Solid-State Circuits Conference 2011, A-SSCC 2011

Other

Other7th IEEE Asian Solid-State Circuits Conference, A-SSCC 2011
CountryKorea, Republic of
CityJeju
Period11/11/1411/11/16

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All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Tan, Z., Daamen, R., Humbert, A., Souri, K., Chae, Y., Ponomarev, Y. V., & Pertijs, M. A. P. (2011). A 1.8V 11μW CMOS smart humidity sensor for RFID sensing applications. In 2011 Proceedings of Technical Papers: IEEE Asian Solid-State Circuits Conference 2011, A-SSCC 2011 (pp. 105-108). [6123615] (2011 Proceedings of Technical Papers: IEEE Asian Solid-State Circuits Conference 2011, A-SSCC 2011). https://doi.org/10.1109/ASSCC.2011.6123615