TY - GEN
T1 - A 1.8V 11μW CMOS smart humidity sensor for RFID sensing applications
AU - Tan, Zhichao
AU - Daamen, Roel
AU - Humbert, Aurélie
AU - Souri, Kamran
AU - Chae, Youngcheol
AU - Ponomarev, Youri V.
AU - Pertijs, Michiel A.P.
PY - 2011/12/1
Y1 - 2011/12/1
N2 - A fully-integrated humidity sensor for a smart RFID sensor platform has been realized in 0.16μm standard CMOS technology. It consists of a top-metal finger-structure capacitor covered with a humidity-sensitive layer, combined with a micro-power flexible sensor interface based on a second-order incremental delta-sigma converter. The interface can be easily reconfigured to compensate for process variation of the sensing element. In a measurement time of 10.2 ms, the interface performs a 13-bits capacitance-to-digital conversion while consuming only 5.85 μA from 1.8 V supply. In combination with the co-integrated sensor capacitor, it thus provides a humidity-to-digital conversion with a resolution of 0.1% RH in the range of 20% to 90% RH at only 107 nJ per measurement. This represents a significant improvement in energy efficiency compared to existing capacitive-sensor interfaces with comparable performance.
AB - A fully-integrated humidity sensor for a smart RFID sensor platform has been realized in 0.16μm standard CMOS technology. It consists of a top-metal finger-structure capacitor covered with a humidity-sensitive layer, combined with a micro-power flexible sensor interface based on a second-order incremental delta-sigma converter. The interface can be easily reconfigured to compensate for process variation of the sensing element. In a measurement time of 10.2 ms, the interface performs a 13-bits capacitance-to-digital conversion while consuming only 5.85 μA from 1.8 V supply. In combination with the co-integrated sensor capacitor, it thus provides a humidity-to-digital conversion with a resolution of 0.1% RH in the range of 20% to 90% RH at only 107 nJ per measurement. This represents a significant improvement in energy efficiency compared to existing capacitive-sensor interfaces with comparable performance.
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U2 - 10.1109/ASSCC.2011.6123615
DO - 10.1109/ASSCC.2011.6123615
M3 - Conference contribution
AN - SCOPUS:84856363401
SN - 9781467303989
T3 - 2011 Proceedings of Technical Papers: IEEE Asian Solid-State Circuits Conference 2011, A-SSCC 2011
SP - 105
EP - 108
BT - 2011 Proceedings of Technical Papers
T2 - 7th IEEE Asian Solid-State Circuits Conference, A-SSCC 2011
Y2 - 14 November 2011 through 16 November 2011
ER -