A 1.8V 11μW CMOS smart humidity sensor for RFID sensing applications

Zhichao Tan, Roel Daamen, Aurélie Humbert, Kamran Souri, Youngcheol Chae, Youri V. Ponomarev, Michiel A.P. Pertijs

Research output: Chapter in Book/Report/Conference proceedingConference contribution

25 Citations (Scopus)

Abstract

A fully-integrated humidity sensor for a smart RFID sensor platform has been realized in 0.16μm standard CMOS technology. It consists of a top-metal finger-structure capacitor covered with a humidity-sensitive layer, combined with a micro-power flexible sensor interface based on a second-order incremental delta-sigma converter. The interface can be easily reconfigured to compensate for process variation of the sensing element. In a measurement time of 10.2 ms, the interface performs a 13-bits capacitance-to-digital conversion while consuming only 5.85 μA from 1.8 V supply. In combination with the co-integrated sensor capacitor, it thus provides a humidity-to-digital conversion with a resolution of 0.1% RH in the range of 20% to 90% RH at only 107 nJ per measurement. This represents a significant improvement in energy efficiency compared to existing capacitive-sensor interfaces with comparable performance.

Original languageEnglish
Title of host publication2011 Proceedings of Technical Papers
Subtitle of host publicationIEEE Asian Solid-State Circuits Conference 2011, A-SSCC 2011
Pages105-108
Number of pages4
DOIs
Publication statusPublished - 2011 Dec 1
Event7th IEEE Asian Solid-State Circuits Conference, A-SSCC 2011 - Jeju, Korea, Republic of
Duration: 2011 Nov 142011 Nov 16

Publication series

Name2011 Proceedings of Technical Papers: IEEE Asian Solid-State Circuits Conference 2011, A-SSCC 2011

Other

Other7th IEEE Asian Solid-State Circuits Conference, A-SSCC 2011
CountryKorea, Republic of
CityJeju
Period11/11/1411/11/16

Fingerprint

Smart sensors
Humidity sensors
Radio frequency identification (RFID)
Atmospheric humidity
Sensors
Capacitors
Capacitive sensors
Time measurement
Energy efficiency
Capacitance
Metals

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Tan, Z., Daamen, R., Humbert, A., Souri, K., Chae, Y., Ponomarev, Y. V., & Pertijs, M. A. P. (2011). A 1.8V 11μW CMOS smart humidity sensor for RFID sensing applications. In 2011 Proceedings of Technical Papers: IEEE Asian Solid-State Circuits Conference 2011, A-SSCC 2011 (pp. 105-108). [6123615] (2011 Proceedings of Technical Papers: IEEE Asian Solid-State Circuits Conference 2011, A-SSCC 2011). https://doi.org/10.1109/ASSCC.2011.6123615
Tan, Zhichao ; Daamen, Roel ; Humbert, Aurélie ; Souri, Kamran ; Chae, Youngcheol ; Ponomarev, Youri V. ; Pertijs, Michiel A.P. / A 1.8V 11μW CMOS smart humidity sensor for RFID sensing applications. 2011 Proceedings of Technical Papers: IEEE Asian Solid-State Circuits Conference 2011, A-SSCC 2011. 2011. pp. 105-108 (2011 Proceedings of Technical Papers: IEEE Asian Solid-State Circuits Conference 2011, A-SSCC 2011).
@inproceedings{f787443d1c4a434e8ab0c88de19dc0c8,
title = "A 1.8V 11μW CMOS smart humidity sensor for RFID sensing applications",
abstract = "A fully-integrated humidity sensor for a smart RFID sensor platform has been realized in 0.16μm standard CMOS technology. It consists of a top-metal finger-structure capacitor covered with a humidity-sensitive layer, combined with a micro-power flexible sensor interface based on a second-order incremental delta-sigma converter. The interface can be easily reconfigured to compensate for process variation of the sensing element. In a measurement time of 10.2 ms, the interface performs a 13-bits capacitance-to-digital conversion while consuming only 5.85 μA from 1.8 V supply. In combination with the co-integrated sensor capacitor, it thus provides a humidity-to-digital conversion with a resolution of 0.1{\%} RH in the range of 20{\%} to 90{\%} RH at only 107 nJ per measurement. This represents a significant improvement in energy efficiency compared to existing capacitive-sensor interfaces with comparable performance.",
author = "Zhichao Tan and Roel Daamen and Aur{\'e}lie Humbert and Kamran Souri and Youngcheol Chae and Ponomarev, {Youri V.} and Pertijs, {Michiel A.P.}",
year = "2011",
month = "12",
day = "1",
doi = "10.1109/ASSCC.2011.6123615",
language = "English",
isbn = "9781467303989",
series = "2011 Proceedings of Technical Papers: IEEE Asian Solid-State Circuits Conference 2011, A-SSCC 2011",
pages = "105--108",
booktitle = "2011 Proceedings of Technical Papers",

}

Tan, Z, Daamen, R, Humbert, A, Souri, K, Chae, Y, Ponomarev, YV & Pertijs, MAP 2011, A 1.8V 11μW CMOS smart humidity sensor for RFID sensing applications. in 2011 Proceedings of Technical Papers: IEEE Asian Solid-State Circuits Conference 2011, A-SSCC 2011., 6123615, 2011 Proceedings of Technical Papers: IEEE Asian Solid-State Circuits Conference 2011, A-SSCC 2011, pp. 105-108, 7th IEEE Asian Solid-State Circuits Conference, A-SSCC 2011, Jeju, Korea, Republic of, 11/11/14. https://doi.org/10.1109/ASSCC.2011.6123615

A 1.8V 11μW CMOS smart humidity sensor for RFID sensing applications. / Tan, Zhichao; Daamen, Roel; Humbert, Aurélie; Souri, Kamran; Chae, Youngcheol; Ponomarev, Youri V.; Pertijs, Michiel A.P.

2011 Proceedings of Technical Papers: IEEE Asian Solid-State Circuits Conference 2011, A-SSCC 2011. 2011. p. 105-108 6123615 (2011 Proceedings of Technical Papers: IEEE Asian Solid-State Circuits Conference 2011, A-SSCC 2011).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - A 1.8V 11μW CMOS smart humidity sensor for RFID sensing applications

AU - Tan, Zhichao

AU - Daamen, Roel

AU - Humbert, Aurélie

AU - Souri, Kamran

AU - Chae, Youngcheol

AU - Ponomarev, Youri V.

AU - Pertijs, Michiel A.P.

PY - 2011/12/1

Y1 - 2011/12/1

N2 - A fully-integrated humidity sensor for a smart RFID sensor platform has been realized in 0.16μm standard CMOS technology. It consists of a top-metal finger-structure capacitor covered with a humidity-sensitive layer, combined with a micro-power flexible sensor interface based on a second-order incremental delta-sigma converter. The interface can be easily reconfigured to compensate for process variation of the sensing element. In a measurement time of 10.2 ms, the interface performs a 13-bits capacitance-to-digital conversion while consuming only 5.85 μA from 1.8 V supply. In combination with the co-integrated sensor capacitor, it thus provides a humidity-to-digital conversion with a resolution of 0.1% RH in the range of 20% to 90% RH at only 107 nJ per measurement. This represents a significant improvement in energy efficiency compared to existing capacitive-sensor interfaces with comparable performance.

AB - A fully-integrated humidity sensor for a smart RFID sensor platform has been realized in 0.16μm standard CMOS technology. It consists of a top-metal finger-structure capacitor covered with a humidity-sensitive layer, combined with a micro-power flexible sensor interface based on a second-order incremental delta-sigma converter. The interface can be easily reconfigured to compensate for process variation of the sensing element. In a measurement time of 10.2 ms, the interface performs a 13-bits capacitance-to-digital conversion while consuming only 5.85 μA from 1.8 V supply. In combination with the co-integrated sensor capacitor, it thus provides a humidity-to-digital conversion with a resolution of 0.1% RH in the range of 20% to 90% RH at only 107 nJ per measurement. This represents a significant improvement in energy efficiency compared to existing capacitive-sensor interfaces with comparable performance.

UR - http://www.scopus.com/inward/record.url?scp=84856363401&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84856363401&partnerID=8YFLogxK

U2 - 10.1109/ASSCC.2011.6123615

DO - 10.1109/ASSCC.2011.6123615

M3 - Conference contribution

AN - SCOPUS:84856363401

SN - 9781467303989

T3 - 2011 Proceedings of Technical Papers: IEEE Asian Solid-State Circuits Conference 2011, A-SSCC 2011

SP - 105

EP - 108

BT - 2011 Proceedings of Technical Papers

ER -

Tan Z, Daamen R, Humbert A, Souri K, Chae Y, Ponomarev YV et al. A 1.8V 11μW CMOS smart humidity sensor for RFID sensing applications. In 2011 Proceedings of Technical Papers: IEEE Asian Solid-State Circuits Conference 2011, A-SSCC 2011. 2011. p. 105-108. 6123615. (2011 Proceedings of Technical Papers: IEEE Asian Solid-State Circuits Conference 2011, A-SSCC 2011). https://doi.org/10.1109/ASSCC.2011.6123615