A compact integrated band-pass filter on a low-dielectric constant polyimide dry film

Ohk Kun Lim; Joon Ik Lee; Yong Jun Kim; Jae Yeong Park

doi:10.1002/mop.11321

A compact integrated band-pass filter on a low-dielectric constant polyimide dry film

Ohk Kun Lim, Joon Ik Lee, Yong Jun Kim, Jae Yeong Park

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

A new compact integrated tapped-line combline filter, with metal-insulator-metal (MIM)-type capacitive loads, is designed and fabricated using newly proposed micromachining techniques that employ a polyimide dry film as a dielectric layer. For increased uniformity of thickness, a dry-film fabrication process is developed. The presented filter is realized with a relatively small size, 3.68 by 4.53 mm, on a polyimide dry film and shows up to 50% size reduction as compared with a general quarter-wavelength filter.

Original language	English
Pages (from-to)	177-179
Number of pages	3
Journal	Microwave and Optical Technology Letters
Volume	40
Issue number	2
DOIs	https://doi.org/10.1002/mop.11321
Publication status	Published - 2004 Jan 20

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1002/mop.11321

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Cite this

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abstract = "A new compact integrated tapped-line combline filter, with metal-insulator-metal (MIM)-type capacitive loads, is designed and fabricated using newly proposed micromachining techniques that employ a polyimide dry film as a dielectric layer. For increased uniformity of thickness, a dry-film fabrication process is developed. The presented filter is realized with a relatively small size, 3.68 by 4.53 mm, on a polyimide dry film and shows up to 50% size reduction as compared with a general quarter-wavelength filter.",

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