Abstract
A new compact integrated tapped-line combline filter, with metal-insulator-metal (MIM)-type capacitive loads, is designed and fabricated using newly proposed micromachining techniques that employ a polyimide dry film as a dielectric layer. For increased uniformity of thickness, a dry-film fabrication process is developed. The presented filter is realized with a relatively small size, 3.68 by 4.53 mm, on a polyimide dry film and shows up to 50% size reduction as compared with a general quarter-wavelength filter.
| Original language | English |
|---|---|
| Pages (from-to) | 177-179 |
| Number of pages | 3 |
| Journal | Microwave and Optical Technology Letters |
| Volume | 40 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2004 Jan 20 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering
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Lim, O. K., Lee, J. I., Kim, Y. J., & Park, J. Y. (2004). A compact integrated band-pass filter on a low-dielectric constant polyimide dry film. Microwave and Optical Technology Letters, 40(2), 177-179. https://doi.org/10.1002/mop.11321