A new compact integrated tapped-line combline filter, with metal-insulator-metal (MIM)-type capacitive loads, is designed and fabricated using newly proposed micromachining techniques that employ a polyimide dry film as a dielectric layer. For increased uniformity of thickness, a dry-film fabrication process is developed. The presented filter is realized with a relatively small size, 3.68 by 4.53 mm, on a polyimide dry film and shows up to 50% size reduction as compared with a general quarter-wavelength filter.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering