A convolutional neural network for fault classification and diagnosis in semiconductor manufacturing processes

Ki Bum Lee, Sejune Cheon, Chang Ouk Kim

Research output: Contribution to journalArticle

72 Citations (Scopus)

Abstract

Many studies on the prediction of manufacturing results using sensor signals have been conducted in the field of fault detection and classification (FDC) for semiconductor manufacturing processes. However, fault diagnosis used to find clues as to root causes remains a challenging area. In particular, process monitoring using neural networks has been employed to only a limited extent because it is a black box model, making the relationships between input data and output results difficult to interpret in actual manufacturing settings, despite its high classification performance. In this paper, we propose a convolutional neural network (CNN) model, named FDC-CNN, in which a receptive field tailored to multivariate sensor signals slides along the time axis, to extract fault features. This approach enables the association of the output of the first convolutional layer with the structural meaning of the raw data, making it possible to locate the variable and time information that represents process faults. In an experiment on a chemical vapor deposition process, the proposed method outperformed other deep learning models.

Original languageEnglish
Pages (from-to)135-142
Number of pages8
JournalIEEE Transactions on Semiconductor Manufacturing
Volume30
Issue number2
DOIs
Publication statusPublished - 2017 May 1

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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