A flexible polymer tactile sensor: Fabrication and modular expandability for large area deployment

Hyung Kew Lee, Sun Il Chang, Euisik Yoon

Research output: Contribution to journalArticle

283 Citations (Scopus)

Abstract

In this paper, we propose and demonstrate a modular expandable capacitive tactile sensor using polydimethylsiloxsane (PDMS) elastomer. A sensor module consists of 16 × 16 tactile cells with 1 mm spatial resolution, similar to that of human skin, and interconnection lines for expandability. The sensor has been fabricated by using five PDMS layers bonded together. In order to customize the sensitivity of a sensor, we cast PDMS by spin coating and cured it on a highly planarized stage for uniform thickness. The cell size is 600 × 600 μm2 and initial capacitance of each cell is about 180 fF. Tactile response of a cell has been measured using a commercial force gauge having 1 mN resolution and a motorized z-axis precision stage with 100 nm resolution. The fabricated cell shows a sensitivity of 3%/mN within the full scale range of 40 mN (250 kPa). Four tactile modules have been successfully attached by using anisotropic conductive paste to demonstrate expandability of the proposed sensors. Various tactile images have been successfully captured by single sensor module as well as the expanded 32 × 32 array sensors.

Original languageEnglish
Pages (from-to)1681-1686
Number of pages6
JournalJournal of Microelectromechanical Systems
Volume15
Issue number6
DOIs
Publication statusPublished - 2006 Dec 1

Fingerprint

Fabrication
Sensors
Polymers
Spin coating
Sensor arrays
Elastomers
Gages
Skin
Capacitance

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

@article{1afbc9fb0c4542b6a42736fc58c24956,
title = "A flexible polymer tactile sensor: Fabrication and modular expandability for large area deployment",
abstract = "In this paper, we propose and demonstrate a modular expandable capacitive tactile sensor using polydimethylsiloxsane (PDMS) elastomer. A sensor module consists of 16 × 16 tactile cells with 1 mm spatial resolution, similar to that of human skin, and interconnection lines for expandability. The sensor has been fabricated by using five PDMS layers bonded together. In order to customize the sensitivity of a sensor, we cast PDMS by spin coating and cured it on a highly planarized stage for uniform thickness. The cell size is 600 × 600 μm2 and initial capacitance of each cell is about 180 fF. Tactile response of a cell has been measured using a commercial force gauge having 1 mN resolution and a motorized z-axis precision stage with 100 nm resolution. The fabricated cell shows a sensitivity of 3{\%}/mN within the full scale range of 40 mN (250 kPa). Four tactile modules have been successfully attached by using anisotropic conductive paste to demonstrate expandability of the proposed sensors. Various tactile images have been successfully captured by single sensor module as well as the expanded 32 × 32 array sensors.",
author = "Lee, {Hyung Kew} and Chang, {Sun Il} and Euisik Yoon",
year = "2006",
month = "12",
day = "1",
doi = "10.1109/JMEMS.2006.886021",
language = "English",
volume = "15",
pages = "1681--1686",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "6",

}

A flexible polymer tactile sensor : Fabrication and modular expandability for large area deployment. / Lee, Hyung Kew; Chang, Sun Il; Yoon, Euisik.

In: Journal of Microelectromechanical Systems, Vol. 15, No. 6, 01.12.2006, p. 1681-1686.

Research output: Contribution to journalArticle

TY - JOUR

T1 - A flexible polymer tactile sensor

T2 - Fabrication and modular expandability for large area deployment

AU - Lee, Hyung Kew

AU - Chang, Sun Il

AU - Yoon, Euisik

PY - 2006/12/1

Y1 - 2006/12/1

N2 - In this paper, we propose and demonstrate a modular expandable capacitive tactile sensor using polydimethylsiloxsane (PDMS) elastomer. A sensor module consists of 16 × 16 tactile cells with 1 mm spatial resolution, similar to that of human skin, and interconnection lines for expandability. The sensor has been fabricated by using five PDMS layers bonded together. In order to customize the sensitivity of a sensor, we cast PDMS by spin coating and cured it on a highly planarized stage for uniform thickness. The cell size is 600 × 600 μm2 and initial capacitance of each cell is about 180 fF. Tactile response of a cell has been measured using a commercial force gauge having 1 mN resolution and a motorized z-axis precision stage with 100 nm resolution. The fabricated cell shows a sensitivity of 3%/mN within the full scale range of 40 mN (250 kPa). Four tactile modules have been successfully attached by using anisotropic conductive paste to demonstrate expandability of the proposed sensors. Various tactile images have been successfully captured by single sensor module as well as the expanded 32 × 32 array sensors.

AB - In this paper, we propose and demonstrate a modular expandable capacitive tactile sensor using polydimethylsiloxsane (PDMS) elastomer. A sensor module consists of 16 × 16 tactile cells with 1 mm spatial resolution, similar to that of human skin, and interconnection lines for expandability. The sensor has been fabricated by using five PDMS layers bonded together. In order to customize the sensitivity of a sensor, we cast PDMS by spin coating and cured it on a highly planarized stage for uniform thickness. The cell size is 600 × 600 μm2 and initial capacitance of each cell is about 180 fF. Tactile response of a cell has been measured using a commercial force gauge having 1 mN resolution and a motorized z-axis precision stage with 100 nm resolution. The fabricated cell shows a sensitivity of 3%/mN within the full scale range of 40 mN (250 kPa). Four tactile modules have been successfully attached by using anisotropic conductive paste to demonstrate expandability of the proposed sensors. Various tactile images have been successfully captured by single sensor module as well as the expanded 32 × 32 array sensors.

UR - http://www.scopus.com/inward/record.url?scp=33845517787&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33845517787&partnerID=8YFLogxK

U2 - 10.1109/JMEMS.2006.886021

DO - 10.1109/JMEMS.2006.886021

M3 - Article

AN - SCOPUS:33845517787

VL - 15

SP - 1681

EP - 1686

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 6

ER -