A high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in large-scale optical switch

Ji Hyuk Kim, Hyung Kew Lee, Byung Il Kim, Jin Wan Jeon, Jun Bo Yoon, Euisik Yoon

Research output: Contribution to conferencePaper

19 Citations (Scopus)

Abstract

A high-fill factor micro-mirror for two-axis operation has been designed, analyzed, and fabricated by using electroplated copper and thick photoresist sacrificial mold. The fabricated mirror has crossbar springs under the mirror plate for two-axis operation in order to achieve a high-fill factor. The maximum actuation angle before pull-in in the fabricated device has been measured as 2.65° at 244V. This shows good agreement with analysis and simulation results. The radius of curvature and RMS surface roughness of the mirror plate have been measured as 3.8cm and 12nm, respectively.

Original languageEnglish
Pages259-262
Number of pages4
Publication statusPublished - 2003 Jul 23
EventIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan
Duration: 2003 Jan 192003 Jan 23

Other

OtherIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
CountryJapan
CityKyoto
Period03/1/1903/1/23

Fingerprint

Optical switches
Torsional stress
Mirrors
Photoresists
Surface roughness
Copper

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Kim, J. H., Lee, H. K., Kim, B. I., Jeon, J. W., Yoon, J. B., & Yoon, E. (2003). A high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in large-scale optical switch. 259-262. Paper presented at IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan.
Kim, Ji Hyuk ; Lee, Hyung Kew ; Kim, Byung Il ; Jeon, Jin Wan ; Yoon, Jun Bo ; Yoon, Euisik. / A high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in large-scale optical switch. Paper presented at IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan.4 p.
@conference{e2f52407d9b846b1b4eb7da99adcbeea,
title = "A high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in large-scale optical switch",
abstract = "A high-fill factor micro-mirror for two-axis operation has been designed, analyzed, and fabricated by using electroplated copper and thick photoresist sacrificial mold. The fabricated mirror has crossbar springs under the mirror plate for two-axis operation in order to achieve a high-fill factor. The maximum actuation angle before pull-in in the fabricated device has been measured as 2.65° at 244V. This shows good agreement with analysis and simulation results. The radius of curvature and RMS surface roughness of the mirror plate have been measured as 3.8cm and 12nm, respectively.",
author = "Kim, {Ji Hyuk} and Lee, {Hyung Kew} and Kim, {Byung Il} and Jeon, {Jin Wan} and Yoon, {Jun Bo} and Euisik Yoon",
year = "2003",
month = "7",
day = "23",
language = "English",
pages = "259--262",
note = "IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems ; Conference date: 19-01-2003 Through 23-01-2003",

}

Kim, JH, Lee, HK, Kim, BI, Jeon, JW, Yoon, JB & Yoon, E 2003, 'A high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in large-scale optical switch', Paper presented at IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan, 03/1/19 - 03/1/23 pp. 259-262.

A high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in large-scale optical switch. / Kim, Ji Hyuk; Lee, Hyung Kew; Kim, Byung Il; Jeon, Jin Wan; Yoon, Jun Bo; Yoon, Euisik.

2003. 259-262 Paper presented at IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan.

Research output: Contribution to conferencePaper

TY - CONF

T1 - A high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in large-scale optical switch

AU - Kim, Ji Hyuk

AU - Lee, Hyung Kew

AU - Kim, Byung Il

AU - Jeon, Jin Wan

AU - Yoon, Jun Bo

AU - Yoon, Euisik

PY - 2003/7/23

Y1 - 2003/7/23

N2 - A high-fill factor micro-mirror for two-axis operation has been designed, analyzed, and fabricated by using electroplated copper and thick photoresist sacrificial mold. The fabricated mirror has crossbar springs under the mirror plate for two-axis operation in order to achieve a high-fill factor. The maximum actuation angle before pull-in in the fabricated device has been measured as 2.65° at 244V. This shows good agreement with analysis and simulation results. The radius of curvature and RMS surface roughness of the mirror plate have been measured as 3.8cm and 12nm, respectively.

AB - A high-fill factor micro-mirror for two-axis operation has been designed, analyzed, and fabricated by using electroplated copper and thick photoresist sacrificial mold. The fabricated mirror has crossbar springs under the mirror plate for two-axis operation in order to achieve a high-fill factor. The maximum actuation angle before pull-in in the fabricated device has been measured as 2.65° at 244V. This shows good agreement with analysis and simulation results. The radius of curvature and RMS surface roughness of the mirror plate have been measured as 3.8cm and 12nm, respectively.

UR - http://www.scopus.com/inward/record.url?scp=0038156068&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0038156068&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0038156068

SP - 259

EP - 262

ER -

Kim JH, Lee HK, Kim BI, Jeon JW, Yoon JB, Yoon E. A high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in large-scale optical switch. 2003. Paper presented at IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan.