A high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in large-scale optical switch

Ji Hyuk Kim, Hyung Kew Lee, Byung Il Kim, Jin Wan Jeon, Jun Bo Yoon, Euisik Yoon

Research output: Contribution to conferencePaper

19 Citations (Scopus)

Abstract

A high-fill factor micro-mirror for two-axis operation has been designed, analyzed, and fabricated by using electroplated copper and thick photoresist sacrificial mold. The fabricated mirror has crossbar springs under the mirror plate for two-axis operation in order to achieve a high-fill factor. The maximum actuation angle before pull-in in the fabricated device has been measured as 2.65° at 244V. This shows good agreement with analysis and simulation results. The radius of curvature and RMS surface roughness of the mirror plate have been measured as 3.8cm and 12nm, respectively.

Original languageEnglish
Pages259-262
Number of pages4
Publication statusPublished - 2003
EventIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan
Duration: 2003 Jan 192003 Jan 23

Other

OtherIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
CountryJapan
CityKyoto
Period03/1/1903/1/23

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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    Kim, J. H., Lee, H. K., Kim, B. I., Jeon, J. W., Yoon, J. B., & Yoon, E. (2003). A high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in large-scale optical switch. 259-262. Paper presented at IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan.