A high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in large-scale optical switch

Ji Hyuk Kim, Hyung Kew Lee, Byung Il Kim, Jin Wan Jeon, Jun Bo Yoon, Euisik Yoon

Research output: Contribution to conferencePaperpeer-review

19 Citations (Scopus)

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Engineering & Materials Science