Abstract
A new spiral-type suspended transformer for silicon radio frequency integrated circuits (RF ICs) has been fabricated by surface micromachining technology. The fabricated transformer on standard silicon substrate has shown a low insertion loss of 1.9dB at 1 GHz by reducing substrate coupling and ohmic loss using the proposed MEMS technology. Equivalent circuit models for the spiral-type suspended transformer have been extracted and shown that they agree well with measured characteristics.
| Original language | English |
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| Pages | 653-656 |
| Number of pages | 4 |
| Publication status | Published - 2002 |
| Event | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States Duration: 2002 Jan 20 → 2002 Jan 24 |
Conference
| Conference | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 |
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| Country/Territory | United States |
| City | Las Vegas, NV |
| Period | 02/1/20 → 02/1/24 |
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering