A high-performance MEMS transformer for silicon RF ICS

Yun Seok Choi, Jun Bo Yoon, Byeong Il Kim, Euisik Yoon

Research output: Contribution to conferencePaperpeer-review

12 Citations (Scopus)

Abstract

A new spiral-type suspended transformer for silicon radio frequency integrated circuits (RF ICs) has been fabricated by surface micromachining technology. The fabricated transformer on standard silicon substrate has shown a low insertion loss of 1.9dB at 1 GHz by reducing substrate coupling and ohmic loss using the proposed MEMS technology. Equivalent circuit models for the spiral-type suspended transformer have been extracted and shown that they agree well with measured characteristics.

Original languageEnglish
Pages653-656
Number of pages4
Publication statusPublished - 2002
Event15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States
Duration: 2002 Jan 202002 Jan 24

Conference

Conference15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002
CountryUnited States
CityLas Vegas, NV
Period02/1/2002/1/24

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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