A high transmission power stabilizer using brewster window for a UV pulsed laser in long-term drift

Hyungwoo Lee; Hoonchul Ryoo; Jae W. Hahn

doi:10.1007/s12206-011-0622-6

A high transmission power stabilizer using brewster window for a UV pulsed laser in long-term drift

Hyungwoo Lee, Hoonchul Ryoo, Jae W. Hahn

Department of Mechanical Engineering

Research output: Contribution to journal › Article

Abstract

In this study, we developed a high transmission power stabilizer equipped with a Brewster window incorporating a proportional-integral-derivative (PID) controller. We used a 248 nm KrF excimer laser signals collected by a photodiode detector (PD) to stabilize the power fluctuation of pulsed laser in long-term drift situation. The power fluctuation averaged 2.73% after 45 minutes of uninterrupted operation. However, with the power stabilizer, the power fluctuation averaged 0.97%. The power stabilizer exhibited a maximum transmission rate of 96.9% which is better than that of conventional one and the maximum attenuated optical transmission reached 65.6%.

Original language	English
Pages (from-to)	2121-2125
Number of pages	5
Journal	Journal of Mechanical Science and Technology
Volume	25
Issue number	8
DOIs	https://doi.org/10.1007/s12206-011-0622-6
Publication status	Published - 2011 Aug

All Science Journal Classification (ASJC) codes

Mechanics of Materials
Mechanical Engineering

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Lee, H., Ryoo, H., & Hahn, J. W. (2011). A high transmission power stabilizer using brewster window for a UV pulsed laser in long-term drift. Journal of Mechanical Science and Technology, 25(8), 2121-2125. https://doi.org/10.1007/s12206-011-0622-6

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