Abstract
In this study, we developed a high transmission power stabilizer equipped with a Brewster window incorporating a proportional-integral-derivative (PID) controller. We used a 248 nm KrF excimer laser signals collected by a photodiode detector (PD) to stabilize the power fluctuation of pulsed laser in long-term drift situation. The power fluctuation averaged 2.73% after 45 minutes of uninterrupted operation. However, with the power stabilizer, the power fluctuation averaged 0.97%. The power stabilizer exhibited a maximum transmission rate of 96.9% which is better than that of conventional one and the maximum attenuated optical transmission reached 65.6%.
Original language | English |
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Pages (from-to) | 2121-2125 |
Number of pages | 5 |
Journal | Journal of Mechanical Science and Technology |
Volume | 25 |
Issue number | 8 |
DOIs | |
Publication status | Published - 2011 Aug |
Bibliographical note
Funding Information:This research was supported by the Ministry of Knowledge Economy of Korea (Project number: 10030267-2008-21).
All Science Journal Classification (ASJC) codes
- Mechanics of Materials
- Mechanical Engineering