Abstract
In this paper, we report the design, fabrication and measurement results of a highly sensitive capacitive-type humidity sensor using a customized polyimide film without hydrophobic elements for evaluating the hermeticity of micropackages. For higher sensitivity, a customized polyimide film as a moisture-absorbing layer is applied instead of using general polyimide films for microelectronic applications. The polyimide film is obtained by synthesizing polyamic acid composed of m-pyromellitic dianhydride, phe-nylenediamine and dimethylacetamide followed by thermal polymerization. An assembly of the humidity sensor and a micropackage which is realized with localized heating and bonding with a polysilicon heater is also fabricated to verify packaging compatibility. Characteristics of the sensor which include sensitivity, hysteresis and stability are measured. The measurement results show a percent normalized capacitance change of 37.45/ %RH, hysteresis of 0.77% over a range from 10 to 90%RH and stability of 0.25% maximum drift from the average value at 50%RH for 120 min. According to these results, it is expected that the proposed humidity sensor can be applied to evaluate the hermeticity of micropackages.
| Original language | English |
|---|---|
| Pages (from-to) | 109-117 |
| Number of pages | 9 |
| Journal | Sensors and Materials |
| Volume | 16 |
| Issue number | 3 |
| Publication status | Published - 2004 Jan 1 |
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All Science Journal Classification (ASJC) codes
- Instrumentation
- Materials Science(all)
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A highly sensitive capacitive-type humidity sensor using customized polyimide film without hydrophobic elements. / Kim, Yong Ho; Kim, Yong Jun; Lee, Jun Young; Kim, Jung Hyun; Shin, Kyu Ho.
In: Sensors and Materials, Vol. 16, No. 3, 01.01.2004, p. 109-117.Research output: Contribution to journal › Article
TY - JOUR
T1 - A highly sensitive capacitive-type humidity sensor using customized polyimide film without hydrophobic elements
AU - Kim, Yong Ho
AU - Kim, Yong Jun
AU - Lee, Jun Young
AU - Kim, Jung Hyun
AU - Shin, Kyu Ho
PY - 2004/1/1
Y1 - 2004/1/1
N2 - In this paper, we report the design, fabrication and measurement results of a highly sensitive capacitive-type humidity sensor using a customized polyimide film without hydrophobic elements for evaluating the hermeticity of micropackages. For higher sensitivity, a customized polyimide film as a moisture-absorbing layer is applied instead of using general polyimide films for microelectronic applications. The polyimide film is obtained by synthesizing polyamic acid composed of m-pyromellitic dianhydride, phe-nylenediamine and dimethylacetamide followed by thermal polymerization. An assembly of the humidity sensor and a micropackage which is realized with localized heating and bonding with a polysilicon heater is also fabricated to verify packaging compatibility. Characteristics of the sensor which include sensitivity, hysteresis and stability are measured. The measurement results show a percent normalized capacitance change of 37.45/ %RH, hysteresis of 0.77% over a range from 10 to 90%RH and stability of 0.25% maximum drift from the average value at 50%RH for 120 min. According to these results, it is expected that the proposed humidity sensor can be applied to evaluate the hermeticity of micropackages.
AB - In this paper, we report the design, fabrication and measurement results of a highly sensitive capacitive-type humidity sensor using a customized polyimide film without hydrophobic elements for evaluating the hermeticity of micropackages. For higher sensitivity, a customized polyimide film as a moisture-absorbing layer is applied instead of using general polyimide films for microelectronic applications. The polyimide film is obtained by synthesizing polyamic acid composed of m-pyromellitic dianhydride, phe-nylenediamine and dimethylacetamide followed by thermal polymerization. An assembly of the humidity sensor and a micropackage which is realized with localized heating and bonding with a polysilicon heater is also fabricated to verify packaging compatibility. Characteristics of the sensor which include sensitivity, hysteresis and stability are measured. The measurement results show a percent normalized capacitance change of 37.45/ %RH, hysteresis of 0.77% over a range from 10 to 90%RH and stability of 0.25% maximum drift from the average value at 50%RH for 120 min. According to these results, it is expected that the proposed humidity sensor can be applied to evaluate the hermeticity of micropackages.
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M3 - Article
AN - SCOPUS:4043092679
VL - 16
SP - 109
EP - 117
JO - Sensors and Materials
JF - Sensors and Materials
SN - 0914-4935
IS - 3
ER -