A highly-sensitive differential-mode microchemical sensor using tfbars with on-chip microheater for Volatile Organic Compound (VOC) detection

Heon Min Lee, Hong Teuk Kim, Hyung Kyu Choi, Hee Chul Lee, Hyung Ki Hong, Don Hee Lee, Joung Uk Bu, Euisik Yoon

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

In this paper, we first report the microchemical sensor application of differential-mode Thin Film Bulk Acoustic Resonators (TFBARs) for Volatile Organic Compound (VOC) detection. Using the micro heater element, the membrane temperature of TFBARs can be increased up to 250°C. Generally, VOCs are decomposed to CO and CO 2 at the temperature of above 200°C, the additional reference oscillator without VOC adsorption can be simply realized by heating the membrane. The RF signal mixer is used to determine the shift in oscillation frequency between sensing and reference oscillators. The frequency responses and sensitivities to benzene, ethanol, and formaldehyde are tested and presented, respectively.

Original languageEnglish
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages490-493
Number of pages4
Publication statusPublished - 2006 Oct 24
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: 2006 Jan 222006 Jan 26

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2006
ISSN (Print)1084-6999

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
CountryTurkey
CityIstanbul
Period06/1/2206/1/26

Fingerprint

Acoustic resonators
Volatile Organic Compounds
volatile organic compounds
Carbon Monoxide
Volatile organic compounds
chips
Membranes
Thin films
sensors
Sensors
Benzene
resonators
oscillators
Formaldehyde
membranes
Frequency response
Ethanol
acoustics
thin films
formaldehyde

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Lee, H. M., Kim, H. T., Choi, H. K., Lee, H. C., Hong, H. K., Lee, D. H., ... Yoon, E. (2006). A highly-sensitive differential-mode microchemical sensor using tfbars with on-chip microheater for Volatile Organic Compound (VOC) detection. In 19th IEEE International Conference on Micro Electro Mechanical Systems (pp. 490-493). [1627843] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2006).
Lee, Heon Min ; Kim, Hong Teuk ; Choi, Hyung Kyu ; Lee, Hee Chul ; Hong, Hyung Ki ; Lee, Don Hee ; Bu, Joung Uk ; Yoon, Euisik. / A highly-sensitive differential-mode microchemical sensor using tfbars with on-chip microheater for Volatile Organic Compound (VOC) detection. 19th IEEE International Conference on Micro Electro Mechanical Systems. 2006. pp. 490-493 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
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abstract = "In this paper, we first report the microchemical sensor application of differential-mode Thin Film Bulk Acoustic Resonators (TFBARs) for Volatile Organic Compound (VOC) detection. Using the micro heater element, the membrane temperature of TFBARs can be increased up to 250°C. Generally, VOCs are decomposed to CO and CO 2 at the temperature of above 200°C, the additional reference oscillator without VOC adsorption can be simply realized by heating the membrane. The RF signal mixer is used to determine the shift in oscillation frequency between sensing and reference oscillators. The frequency responses and sensitivities to benzene, ethanol, and formaldehyde are tested and presented, respectively.",
author = "Lee, {Heon Min} and Kim, {Hong Teuk} and Choi, {Hyung Kyu} and Lee, {Hee Chul} and Hong, {Hyung Ki} and Lee, {Don Hee} and Bu, {Joung Uk} and Euisik Yoon",
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Lee, HM, Kim, HT, Choi, HK, Lee, HC, Hong, HK, Lee, DH, Bu, JU & Yoon, E 2006, A highly-sensitive differential-mode microchemical sensor using tfbars with on-chip microheater for Volatile Organic Compound (VOC) detection. in 19th IEEE International Conference on Micro Electro Mechanical Systems., 1627843, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2006, pp. 490-493, 19th IEEE International Conference on Micro Electro Mechanical Systems, Istanbul, Turkey, 06/1/22.

A highly-sensitive differential-mode microchemical sensor using tfbars with on-chip microheater for Volatile Organic Compound (VOC) detection. / Lee, Heon Min; Kim, Hong Teuk; Choi, Hyung Kyu; Lee, Hee Chul; Hong, Hyung Ki; Lee, Don Hee; Bu, Joung Uk; Yoon, Euisik.

19th IEEE International Conference on Micro Electro Mechanical Systems. 2006. p. 490-493 1627843 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2006).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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AB - In this paper, we first report the microchemical sensor application of differential-mode Thin Film Bulk Acoustic Resonators (TFBARs) for Volatile Organic Compound (VOC) detection. Using the micro heater element, the membrane temperature of TFBARs can be increased up to 250°C. Generally, VOCs are decomposed to CO and CO 2 at the temperature of above 200°C, the additional reference oscillator without VOC adsorption can be simply realized by heating the membrane. The RF signal mixer is used to determine the shift in oscillation frequency between sensing and reference oscillators. The frequency responses and sensitivities to benzene, ethanol, and formaldehyde are tested and presented, respectively.

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Lee HM, Kim HT, Choi HK, Lee HC, Hong HK, Lee DH et al. A highly-sensitive differential-mode microchemical sensor using tfbars with on-chip microheater for Volatile Organic Compound (VOC) detection. In 19th IEEE International Conference on Micro Electro Mechanical Systems. 2006. p. 490-493. 1627843. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).