A highly-sensitive differential-mode microchemical sensor using tfbars with on-chip microheater for Volatile Organic Compound (VOC) detection

Heon Min Lee, Hong Teuk Kim, Hyung Kyu Choi, Hee Chul Lee, Hyung Ki Hong, Don Hee Lee, Joung Uk Bu, Euisik Yoon

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

In this paper, we first report the microchemical sensor application of differential-mode Thin Film Bulk Acoustic Resonators (TFBARs) for Volatile Organic Compound (VOC) detection. Using the micro heater element, the membrane temperature of TFBARs can be increased up to 250°C. Generally, VOCs are decomposed to CO and CO2 at the temperature of above 200°C, the additional reference oscillator without VOC adsorption can be simply realized by heating the membrane. The RF signal mixer is used to determine the shift in oscillation frequency between sensing and reference oscillators. The frequency responses and sensitivities to benzene, ethanol, and formaldehyde are tested and presented, respectively.

Original languageEnglish
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages490-493
Number of pages4
Publication statusPublished - 2006
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: 2006 Jan 222006 Jan 26

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2006
ISSN (Print)1084-6999

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
CountryTurkey
CityIstanbul
Period06/1/2206/1/26

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'A highly-sensitive differential-mode microchemical sensor using tfbars with on-chip microheater for Volatile Organic Compound (VOC) detection'. Together they form a unique fingerprint.

Cite this