A highly sensitive micro-thermal sensor for hydrogen detection

Se Chul Park, Seung Il Yoon, Chung Il Lee, Soonho Song, Yong Jun Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper reports a new MEMS-based chemical sensor for hydrogen gas detection, using a highly sensitive micro-thermal sensor. The proposed micro-thermal sensor detects the reaction heat between novel metal catalyst and hydrogen by measuring dc voltage from Cr-Bi thermopile. The proposed micro-thermal sensor, which consists of reference and sensing thermopile, was fabricated on a high thermal resistivity layer for reducing parasitic heat transfer. A metal catalyst was deposited on only the sensing thermopile. And then, In order to remove noises such as external change of temperature, gas flow and electrical noise, a difference between output signals of reference and sensing thermopile was measured by using differential amplifier. To verify its feasibility of the sensor for hydrogen gas detection, various concentrations (0.1, 0.5, 1%) of hydrogen gas were measured. The result of the measurement shows that output voltages of the sensor increases linearly according to the gas concentrations.

Original languageEnglish
Title of host publicationThe 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
Pages197-200
Number of pages4
DOIs
Publication statusPublished - 2007 Dec 1
Event6th IEEE Conference on SENSORS, IEEE SENSORS 2007 - Atlanta, GA, United States
Duration: 2007 Oct 282007 Oct 31

Publication series

NameProceedings of IEEE Sensors

Other

Other6th IEEE Conference on SENSORS, IEEE SENSORS 2007
CountryUnited States
CityAtlanta, GA
Period07/10/2807/10/31

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All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Park, S. C., Yoon, S. I., Lee, C. I., Song, S., & Kim, Y. J. (2007). A highly sensitive micro-thermal sensor for hydrogen detection. In The 6th IEEE Conference on SENSORS, IEEE SENSORS 2007 (pp. 197-200). [4388370] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2007.4388370