A low loss MEMS transmission line with shielded ground

Eun Chul Park, Yun Suk Choi, Byeong Il Kim, Jun Bo Yoon, Euisik Yoon

Research output: Contribution to conferencePaper

12 Citations (Scopus)

Abstract

This paper reports a MEMS transmission line with shielded ground realized using fully CMOS compatible, monolithically integrable 3-D RF MEMS processes. The fabricated transmission line has achieved extremely low loss by shielding the signal line from lossy silicon substrate at the bottom as well as from radiation into open air space above. A low loss of 0.35dB/cm at 25GHz has been achieved in the fabricated transmission lines.

Original languageEnglish
Pages136-139
Number of pages4
Publication statusPublished - 2003 Jul 23
EventIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan
Duration: 2003 Jan 192003 Jan 23

Other

OtherIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
CountryJapan
CityKyoto
Period03/1/1903/1/23

Fingerprint

MEMS
Electric lines
Shielding
Radiation
Silicon
Substrates
Air

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Park, E. C., Choi, Y. S., Kim, B. I., Yoon, J. B., & Yoon, E. (2003). A low loss MEMS transmission line with shielded ground. 136-139. Paper presented at IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan.
Park, Eun Chul ; Choi, Yun Suk ; Kim, Byeong Il ; Yoon, Jun Bo ; Yoon, Euisik. / A low loss MEMS transmission line with shielded ground. Paper presented at IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan.4 p.
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Park, EC, Choi, YS, Kim, BI, Yoon, JB & Yoon, E 2003, 'A low loss MEMS transmission line with shielded ground', Paper presented at IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan, 03/1/19 - 03/1/23 pp. 136-139.

A low loss MEMS transmission line with shielded ground. / Park, Eun Chul; Choi, Yun Suk; Kim, Byeong Il; Yoon, Jun Bo; Yoon, Euisik.

2003. 136-139 Paper presented at IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan.

Research output: Contribution to conferencePaper

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AB - This paper reports a MEMS transmission line with shielded ground realized using fully CMOS compatible, monolithically integrable 3-D RF MEMS processes. The fabricated transmission line has achieved extremely low loss by shielding the signal line from lossy silicon substrate at the bottom as well as from radiation into open air space above. A low loss of 0.35dB/cm at 25GHz has been achieved in the fabricated transmission lines.

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Park EC, Choi YS, Kim BI, Yoon JB, Yoon E. A low loss MEMS transmission line with shielded ground. 2003. Paper presented at IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan.