A low temperature co-fired ceramic-based dielectrophoretic device for manipulating micro and nanostructure materials

A dielectophoretic (DEP) device fabricated by a conventional low temperature co-fired ceramic (LTCC) process, for manipulating micro and nanostructure materials, such as spherical polystyrene microspheres, titanium dioxide (TiO₂) nanotubes, and silver (Ag) nanowires, is described. To generate a non-uniform electric field, a castellated electrode configuration was applied to the LTCC-based DEP device using a screen printing method. The actual motions of the micro and nanostructure materials under both a positive and a negative DEP force were observed in detail and the findings compared with numerical simulation data for the electric field distribution. The performance of the LTCC-based DEP device for separating and trapping was evaluated and potential applications are discussed.