This paper reports new RF microelectromechanical systems (MEMS) switches actuated by the combination of electromagnetic and electrostatic forces for low-voltage and low-power operation. The proposed RF MEMS switches have utilized the proper combination of two actuation mechanisms: taking advantage of the large actuation force from electromagnetic actuation for initial movement and the low-power feature from electrostatic actuation for holding the actuator position. Both series- and shunt-type switches have been implemented using the proposed actuation mechanism. From the fabricated switches, feasibility of operation has been successfully demonstrated. The fabricated switches can be operated within several hundred microseconds. In the series-type switch, the isolation has been measured as -34 dB and insertion loss as -0.37 dB at 20 GHz. In the shunt type switch, the isolation is -20.7 dB and insertion loss is -0.85 dB at 19.5 GHz. The proposed RF MEMS switches are mechanically robust and the combination of electromagnetic and electrostatic actuations makes it possible to achieve excellent switching characteristics at low power and low voltage below 5 V.
|Number of pages||8|
|Journal||IEEE Transactions on Microwave Theory and Techniques|
|Publication status||Published - 2005 Jul|
Bibliographical noteFunding Information:
Manuscript received October 3, 2004; revised March 3, 2005. This work was supported in part by the Ministry of Science and Technology of Korea under a National Research Laboratory program.
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering