A low-voltage and low-power RF MEMS switch actuated by combination of electromagnetic and electrostatic forces

Il Joo Cho, Taeksang Song, Sang Hyun Back, Euisik Yoon

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

This paper reports on a new RF MEMS switch actuated by the combination of electromagnetic and electrostatic forces for low voltage and low power operation. The proposed RF MEMS switch has utilized the proper combination of two actuation mechanisms: taking advantage of the large actuation force from electromagnetic actuation for initial movement and the low power feature from electrostatic actuation for holding the actuator position. From the fabricated switch, feasibility of operation has been successfully demonstrated with an actuation current of 53mA and a required holding voltage of 3.7V. The power consumption is measured as 40.3μJ per switching. We have achieved isolation of -34dB and insertion loss of - 0.37dB at 20GHZ from the initial device, respectively.

Original languageEnglish
Title of host publicationConference Proceedings- 34th European Microwave Conference
Pages1445-1448
Number of pages4
Publication statusPublished - 2004 Dec 1
EventConference Proceedings- 34th European Microwave Conference - London, United Kingdom
Duration: 2004 Oct 122004 Oct 14

Publication series

NameConference Proceedings- European Microwave Conference
Volume3

Other

OtherConference Proceedings- 34th European Microwave Conference
CountryUnited Kingdom
CityLondon
Period04/10/1204/10/14

Fingerprint

Electrostatic force
MEMS
Switches
Electric potential
Insertion losses
Electrostatics
Electric power utilization
Actuators

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Cho, I. J., Song, T., Back, S. H., & Yoon, E. (2004). A low-voltage and low-power RF MEMS switch actuated by combination of electromagnetic and electrostatic forces. In Conference Proceedings- 34th European Microwave Conference (pp. 1445-1448). (Conference Proceedings- European Microwave Conference; Vol. 3).
Cho, Il Joo ; Song, Taeksang ; Back, Sang Hyun ; Yoon, Euisik. / A low-voltage and low-power RF MEMS switch actuated by combination of electromagnetic and electrostatic forces. Conference Proceedings- 34th European Microwave Conference. 2004. pp. 1445-1448 (Conference Proceedings- European Microwave Conference).
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abstract = "This paper reports on a new RF MEMS switch actuated by the combination of electromagnetic and electrostatic forces for low voltage and low power operation. The proposed RF MEMS switch has utilized the proper combination of two actuation mechanisms: taking advantage of the large actuation force from electromagnetic actuation for initial movement and the low power feature from electrostatic actuation for holding the actuator position. From the fabricated switch, feasibility of operation has been successfully demonstrated with an actuation current of 53mA and a required holding voltage of 3.7V. The power consumption is measured as 40.3μJ per switching. We have achieved isolation of -34dB and insertion loss of - 0.37dB at 20GHZ from the initial device, respectively.",
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Cho, IJ, Song, T, Back, SH & Yoon, E 2004, A low-voltage and low-power RF MEMS switch actuated by combination of electromagnetic and electrostatic forces. in Conference Proceedings- 34th European Microwave Conference. Conference Proceedings- European Microwave Conference, vol. 3, pp. 1445-1448, Conference Proceedings- 34th European Microwave Conference, London, United Kingdom, 04/10/12.

A low-voltage and low-power RF MEMS switch actuated by combination of electromagnetic and electrostatic forces. / Cho, Il Joo; Song, Taeksang; Back, Sang Hyun; Yoon, Euisik.

Conference Proceedings- 34th European Microwave Conference. 2004. p. 1445-1448 (Conference Proceedings- European Microwave Conference; Vol. 3).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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N2 - This paper reports on a new RF MEMS switch actuated by the combination of electromagnetic and electrostatic forces for low voltage and low power operation. The proposed RF MEMS switch has utilized the proper combination of two actuation mechanisms: taking advantage of the large actuation force from electromagnetic actuation for initial movement and the low power feature from electrostatic actuation for holding the actuator position. From the fabricated switch, feasibility of operation has been successfully demonstrated with an actuation current of 53mA and a required holding voltage of 3.7V. The power consumption is measured as 40.3μJ per switching. We have achieved isolation of -34dB and insertion loss of - 0.37dB at 20GHZ from the initial device, respectively.

AB - This paper reports on a new RF MEMS switch actuated by the combination of electromagnetic and electrostatic forces for low voltage and low power operation. The proposed RF MEMS switch has utilized the proper combination of two actuation mechanisms: taking advantage of the large actuation force from electromagnetic actuation for initial movement and the low power feature from electrostatic actuation for holding the actuator position. From the fabricated switch, feasibility of operation has been successfully demonstrated with an actuation current of 53mA and a required holding voltage of 3.7V. The power consumption is measured as 40.3μJ per switching. We have achieved isolation of -34dB and insertion loss of - 0.37dB at 20GHZ from the initial device, respectively.

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Cho IJ, Song T, Back SH, Yoon E. A low-voltage and low-power RF MEMS switch actuated by combination of electromagnetic and electrostatic forces. In Conference Proceedings- 34th European Microwave Conference. 2004. p. 1445-1448. (Conference Proceedings- European Microwave Conference).