Abstract
This paper reports on a new RF MEMS switch actuated by the combination of electromagnetic and electrostatic forces for low voltage and low power operation. The proposed RF MEMS switch has utilized the proper combination of two actuation mechanisms: taking advantage of the large actuation force from electromagnetic actuation for initial movement and the low power feature from electrostatic actuation for holding the actuator position. From the fabricated switch, feasibility of operation has been successfully demonstrated with an actuation current of 53mA and a required holding voltage of 3.7V. The power consumption is measured as 40.3μJ per switching. We have achieved isolation of -34dB and insertion loss of - 0.37dB at 20GHZ from the initial device, respectively.
| Original language | English |
|---|---|
| Title of host publication | Conference Proceedings- 34th European Microwave Conference |
| Pages | 1445-1448 |
| Number of pages | 4 |
| Publication status | Published - 2004 Dec 1 |
| Event | Conference Proceedings- 34th European Microwave Conference - London, United Kingdom Duration: 2004 Oct 12 → 2004 Oct 14 |
Publication series
| Name | Conference Proceedings- European Microwave Conference |
|---|---|
| Volume | 3 |
Other
| Other | Conference Proceedings- 34th European Microwave Conference |
|---|---|
| Country | United Kingdom |
| City | London |
| Period | 04/10/12 → 04/10/14 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
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A low-voltage and low-power RF MEMS switch actuated by combination of electromagnetic and electrostatic forces. / Cho, Il Joo; Song, Taeksang; Back, Sang Hyun; Yoon, Euisik.
Conference Proceedings- 34th European Microwave Conference. 2004. p. 1445-1448 (Conference Proceedings- European Microwave Conference; Vol. 3).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - A low-voltage and low-power RF MEMS switch actuated by combination of electromagnetic and electrostatic forces
AU - Cho, Il Joo
AU - Song, Taeksang
AU - Back, Sang Hyun
AU - Yoon, Euisik
PY - 2004/12/1
Y1 - 2004/12/1
N2 - This paper reports on a new RF MEMS switch actuated by the combination of electromagnetic and electrostatic forces for low voltage and low power operation. The proposed RF MEMS switch has utilized the proper combination of two actuation mechanisms: taking advantage of the large actuation force from electromagnetic actuation for initial movement and the low power feature from electrostatic actuation for holding the actuator position. From the fabricated switch, feasibility of operation has been successfully demonstrated with an actuation current of 53mA and a required holding voltage of 3.7V. The power consumption is measured as 40.3μJ per switching. We have achieved isolation of -34dB and insertion loss of - 0.37dB at 20GHZ from the initial device, respectively.
AB - This paper reports on a new RF MEMS switch actuated by the combination of electromagnetic and electrostatic forces for low voltage and low power operation. The proposed RF MEMS switch has utilized the proper combination of two actuation mechanisms: taking advantage of the large actuation force from electromagnetic actuation for initial movement and the low power feature from electrostatic actuation for holding the actuator position. From the fabricated switch, feasibility of operation has been successfully demonstrated with an actuation current of 53mA and a required holding voltage of 3.7V. The power consumption is measured as 40.3μJ per switching. We have achieved isolation of -34dB and insertion loss of - 0.37dB at 20GHZ from the initial device, respectively.
UR - http://www.scopus.com/inward/record.url?scp=18844363174&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=18844363174&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:18844363174
SN - 1580539920
T3 - Conference Proceedings- European Microwave Conference
SP - 1445
EP - 1448
BT - Conference Proceedings- 34th European Microwave Conference
ER -