A low-voltage and low-power RF MEMS switch actuated by combination of electromagnetic and electrostatic forces

This paper reports on a new RF MEMS switch actuated by the combination of electromagnetic and electrostatic forces for low voltage and low power operation. The proposed RF MEMS switch has utilized the proper combination of two actuation mechanisms: taking advantage of the large actuation force from electromagnetic actuation for initial movement and the low power feature from electrostatic actuation for holding the actuator position. From the fabricated switch, feasibility of operation has been successfully demonstrated with an actuation current of 53mA and a required holding voltage of 3.7V. The power consumption is measured as 40.3μJ per switching. We have achieved isolation of -34dB and insertion loss of - 0.37dB at 20GHZ from the initial device, respectively.