A low-voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold

Il Joo Cho; Taeksang Song; Sang Hyun Baek; Euisik Yoon

doi:10.1109/MEMSYS.2005.1453860

A low-voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold

Il Joo Cho, Taeksang Song, Sang Hyun Baek, Euisik Yoon

Yonsei Advanced Science Institute

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

17 Citations (Scopus)

Abstract

In this paper, we have proposed and fabricated a new push-pull type SPDT switch implemented in a single structure with torsion bars actuated by the combination of electromagnetic and electrostatic forces for low power and low voltage operation. The proposed switch is actuated by using large electromagnetic force at low voltage to change its state and is held to maintain its state by electrostatic force to reduce static power consumption. From the proto type, actuation voltage is measured as 4.3V and required energy is below 15.4μJ per each switching. Also, we have successfully carried out a lifetime test over more than 166million cycles without significant degradation of switch characteristics.

Original language	English
Title of host publication	Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest
Pages	32-35
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2005.1453860
Publication status	Published - 2005
Event	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States Duration: 2005 Jan 30 → 2005 Feb 3

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami
Country/Territory	United States
City	Miami Beach, FL
Period	05/1/30 → 05/2/3

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2005.1453860

Cite this

Cho, I. J., Song, T., Baek, S. H., & Yoon, E. (2005). A low-voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold. In Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest (pp. 32-35). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2005.1453860

Cho, Il Joo ; Song, Taeksang ; Baek, Sang Hyun et al. / A low-voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold. Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest. 2005. pp. 32-35 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{09787f8bb57542c6aa346768db40e7b9,

title = "A low-voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold",

abstract = "In this paper, we have proposed and fabricated a new push-pull type SPDT switch implemented in a single structure with torsion bars actuated by the combination of electromagnetic and electrostatic forces for low power and low voltage operation. The proposed switch is actuated by using large electromagnetic force at low voltage to change its state and is held to maintain its state by electrostatic force to reduce static power consumption. From the proto type, actuation voltage is measured as 4.3V and required energy is below 15.4μJ per each switching. Also, we have successfully carried out a lifetime test over more than 166million cycles without significant degradation of switch characteristics.",

author = "Cho, {Il Joo} and Taeksang Song and Baek, {Sang Hyun} and Euisik Yoon",

year = "2005",

doi = "10.1109/MEMSYS.2005.1453860",

language = "English",

isbn = "0780387325",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "32--35",

booktitle = "Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest",

note = "18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami ; Conference date: 30-01-2005 Through 03-02-2005",

}

Cho, IJ, Song, T, Baek, SH & Yoon, E 2005, A low-voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold. in Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 32-35, 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami, Miami Beach, FL, United States, 05/1/30. https://doi.org/10.1109/MEMSYS.2005.1453860

A low-voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold. / Cho, Il Joo; Song, Taeksang; Baek, Sang Hyun et al.

Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest. 2005. p. 32-35 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - A low-voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold

AU - Cho, Il Joo

AU - Song, Taeksang

AU - Baek, Sang Hyun

AU - Yoon, Euisik

PY - 2005

Y1 - 2005

N2 - In this paper, we have proposed and fabricated a new push-pull type SPDT switch implemented in a single structure with torsion bars actuated by the combination of electromagnetic and electrostatic forces for low power and low voltage operation. The proposed switch is actuated by using large electromagnetic force at low voltage to change its state and is held to maintain its state by electrostatic force to reduce static power consumption. From the proto type, actuation voltage is measured as 4.3V and required energy is below 15.4μJ per each switching. Also, we have successfully carried out a lifetime test over more than 166million cycles without significant degradation of switch characteristics.

AB - In this paper, we have proposed and fabricated a new push-pull type SPDT switch implemented in a single structure with torsion bars actuated by the combination of electromagnetic and electrostatic forces for low power and low voltage operation. The proposed switch is actuated by using large electromagnetic force at low voltage to change its state and is held to maintain its state by electrostatic force to reduce static power consumption. From the proto type, actuation voltage is measured as 4.3V and required energy is below 15.4μJ per each switching. Also, we have successfully carried out a lifetime test over more than 166million cycles without significant degradation of switch characteristics.

UR - http://www.scopus.com/inward/record.url?scp=26844485584&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=26844485584&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2005.1453860

DO - 10.1109/MEMSYS.2005.1453860

M3 - Conference contribution

AN - SCOPUS:26844485584

SN - 0780387325

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 32

EP - 35

BT - Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest

T2 - 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami

Y2 - 30 January 2005 through 3 February 2005

ER -

Cho IJ, Song T, Baek SH, Yoon E. A low-voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold. In Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest. 2005. p. 32-35. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2005.1453860

A low-voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold

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