A low-voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold

Il Joo Cho, Taeksang Song, Sang Hyun Baek, Euisik Yoon

Research output: Chapter in Book/Report/Conference proceedingConference contribution

16 Citations (Scopus)

Abstract

In this paper, we have proposed and fabricated a new push-pull type SPDT switch implemented in a single structure with torsion bars actuated by the combination of electromagnetic and electrostatic forces for low power and low voltage operation. The proposed switch is actuated by using large electromagnetic force at low voltage to change its state and is held to maintain its state by electrostatic force to reduce static power consumption. From the proto type, actuation voltage is measured as 4.3V and required energy is below 15.4μJ per each switching. Also, we have successfully carried out a lifetime test over more than 166million cycles without significant degradation of switch characteristics.

Original languageEnglish
Title of host publicationProceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest
Pages32-35
Number of pages4
DOIs
Publication statusPublished - 2005 Oct 25
Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States
Duration: 2005 Jan 302005 Feb 3

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami
CountryUnited States
CityMiami Beach, FL
Period05/1/3005/2/3

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'A low-voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold'. Together they form a unique fingerprint.

  • Cite this

    Cho, I. J., Song, T., Baek, S. H., & Yoon, E. (2005). A low-voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold. In Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest (pp. 32-35). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2005.1453860