A low-voltage three-axis electromagnetically actuated micromirror for high coupling efficiency

Il Joo Cho, Euisik Yoon

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A new three-axis electromagnetically-actuated micromirror using an SOI wafer is proposed and fabricated. This micromirror can be used for optical switches, optical scanners and alignment modules with low voltage operation and high coupling efficiency due to three degrees of freedom.

Original languageEnglish
Title of host publication2003 IEEE/LEOS International Conference on Optical MEMS
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages123-124
Number of pages2
ISBN (Electronic)078037830X, 9780780378308
DOIs
Publication statusPublished - 2003 Jan 1
Event2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, United States
Duration: 2003 Aug 182003 Aug 21

Publication series

Name2003 IEEE/LEOS International Conference on Optical MEMS

Conference

Conference2003 IEEE/LEOS International Conference on Optical MEMS
CountryUnited States
CityWaikoloa
Period03/8/1803/8/21

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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    Cho, I. J., & Yoon, E. (2003). A low-voltage three-axis electromagnetically actuated micromirror for high coupling efficiency. In 2003 IEEE/LEOS International Conference on Optical MEMS (pp. 123-124). [1233497] (2003 IEEE/LEOS International Conference on Optical MEMS). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OMEMS.2003.1233497