A low-voltage three-axis electromagnetically actuated micromirror for fine alignment among optical devices

Il Joo Cho, Euisik Yoon

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46 Citations (Scopus)

Abstract

In this paper, a new three-axis electromagnetically actuated micromirror structure has been proposed and fabricated. It is electromagnetically actuated at low voltage using an external magnetic field. The main purpose of this work was to obtain a three-axis actuated micromirror in a mechanically robust structure with large static angular and vertical displacement at low actuation voltage for fine alignment among optical components in an active alignment module as well as conventional optical systems. The mirror plate and torsion bars are made of bulk silicon using a SOI wafer, and the actuation coils are made of electroplated Au. The maximum static deflection angles were measured as ±4.2° for x-axis actuation and ±9.2° for y-axis actuation, respectively. The maximum static vertical displacement was measured as ±42 νm for z-axis actuation. The actuation voltages were below 3 V for all actuation. The simulated resonant frequencies are several kHz, and these imply that the fabricated micromirror can be operated in sub-millisecond order. The measured radius of curvature (ROC) of the fabricated micromirror is 7.72 cm, and the surface roughness of the reflector is below 1.29 nm which ensure high optical performance such as high directionality and reflectivity. The fabricated micromirror has demonstrated large actuated displacement at low actuation voltage, and it enables us to compensate a larger misalignment value when it is used in an active alignment module. The robust torsion bar and lifting bar structure formed by bulk silicon allowed the proposed micromirror to have greater operating stability. The additional degree of freedom with z-axis actuation can decrease the difficulty in the assembly of optical components and increase the coupling efficiency between optical components.

Original languageEnglish
Article number085007
JournalJournal of Micromechanics and Microengineering
Volume19
Issue number8
DOIs
Publication statusPublished - 2009 Nov 9

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Optical devices
Electric potential
Silicon
Torsional stress
Optical systems
Natural frequencies
Mirrors
Surface roughness
Magnetic fields

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

@article{27a7373de511419fb8d091ff72845b85,
title = "A low-voltage three-axis electromagnetically actuated micromirror for fine alignment among optical devices",
abstract = "In this paper, a new three-axis electromagnetically actuated micromirror structure has been proposed and fabricated. It is electromagnetically actuated at low voltage using an external magnetic field. The main purpose of this work was to obtain a three-axis actuated micromirror in a mechanically robust structure with large static angular and vertical displacement at low actuation voltage for fine alignment among optical components in an active alignment module as well as conventional optical systems. The mirror plate and torsion bars are made of bulk silicon using a SOI wafer, and the actuation coils are made of electroplated Au. The maximum static deflection angles were measured as ±4.2° for x-axis actuation and ±9.2° for y-axis actuation, respectively. The maximum static vertical displacement was measured as ±42 νm for z-axis actuation. The actuation voltages were below 3 V for all actuation. The simulated resonant frequencies are several kHz, and these imply that the fabricated micromirror can be operated in sub-millisecond order. The measured radius of curvature (ROC) of the fabricated micromirror is 7.72 cm, and the surface roughness of the reflector is below 1.29 nm which ensure high optical performance such as high directionality and reflectivity. The fabricated micromirror has demonstrated large actuated displacement at low actuation voltage, and it enables us to compensate a larger misalignment value when it is used in an active alignment module. The robust torsion bar and lifting bar structure formed by bulk silicon allowed the proposed micromirror to have greater operating stability. The additional degree of freedom with z-axis actuation can decrease the difficulty in the assembly of optical components and increase the coupling efficiency between optical components.",
author = "Cho, {Il Joo} and Euisik Yoon",
year = "2009",
month = "11",
day = "9",
doi = "10.1088/0960-1317/19/8/085007",
language = "English",
volume = "19",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "8",

}

TY - JOUR

T1 - A low-voltage three-axis electromagnetically actuated micromirror for fine alignment among optical devices

AU - Cho, Il Joo

AU - Yoon, Euisik

PY - 2009/11/9

Y1 - 2009/11/9

N2 - In this paper, a new three-axis electromagnetically actuated micromirror structure has been proposed and fabricated. It is electromagnetically actuated at low voltage using an external magnetic field. The main purpose of this work was to obtain a three-axis actuated micromirror in a mechanically robust structure with large static angular and vertical displacement at low actuation voltage for fine alignment among optical components in an active alignment module as well as conventional optical systems. The mirror plate and torsion bars are made of bulk silicon using a SOI wafer, and the actuation coils are made of electroplated Au. The maximum static deflection angles were measured as ±4.2° for x-axis actuation and ±9.2° for y-axis actuation, respectively. The maximum static vertical displacement was measured as ±42 νm for z-axis actuation. The actuation voltages were below 3 V for all actuation. The simulated resonant frequencies are several kHz, and these imply that the fabricated micromirror can be operated in sub-millisecond order. The measured radius of curvature (ROC) of the fabricated micromirror is 7.72 cm, and the surface roughness of the reflector is below 1.29 nm which ensure high optical performance such as high directionality and reflectivity. The fabricated micromirror has demonstrated large actuated displacement at low actuation voltage, and it enables us to compensate a larger misalignment value when it is used in an active alignment module. The robust torsion bar and lifting bar structure formed by bulk silicon allowed the proposed micromirror to have greater operating stability. The additional degree of freedom with z-axis actuation can decrease the difficulty in the assembly of optical components and increase the coupling efficiency between optical components.

AB - In this paper, a new three-axis electromagnetically actuated micromirror structure has been proposed and fabricated. It is electromagnetically actuated at low voltage using an external magnetic field. The main purpose of this work was to obtain a three-axis actuated micromirror in a mechanically robust structure with large static angular and vertical displacement at low actuation voltage for fine alignment among optical components in an active alignment module as well as conventional optical systems. The mirror plate and torsion bars are made of bulk silicon using a SOI wafer, and the actuation coils are made of electroplated Au. The maximum static deflection angles were measured as ±4.2° for x-axis actuation and ±9.2° for y-axis actuation, respectively. The maximum static vertical displacement was measured as ±42 νm for z-axis actuation. The actuation voltages were below 3 V for all actuation. The simulated resonant frequencies are several kHz, and these imply that the fabricated micromirror can be operated in sub-millisecond order. The measured radius of curvature (ROC) of the fabricated micromirror is 7.72 cm, and the surface roughness of the reflector is below 1.29 nm which ensure high optical performance such as high directionality and reflectivity. The fabricated micromirror has demonstrated large actuated displacement at low actuation voltage, and it enables us to compensate a larger misalignment value when it is used in an active alignment module. The robust torsion bar and lifting bar structure formed by bulk silicon allowed the proposed micromirror to have greater operating stability. The additional degree of freedom with z-axis actuation can decrease the difficulty in the assembly of optical components and increase the coupling efficiency between optical components.

UR - http://www.scopus.com/inward/record.url?scp=70350647499&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=70350647499&partnerID=8YFLogxK

U2 - 10.1088/0960-1317/19/8/085007

DO - 10.1088/0960-1317/19/8/085007

M3 - Article

AN - SCOPUS:70350647499

VL - 19

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 8

M1 - 085007

ER -