Abstract
In this paper, a new micromirror structure has been proposed and fabricated. The proposed micromirror is electromagnetically actuated along two-axis at low voltage using an external magnetic field. The mirror plates and torsion bars are made of bulk silicon and the actuation coils are made of electroplated copper. The maximum deflection angles have been measured as ±4.35° for x-axis actuation and ±15.7° for y-axis actuation. The actuation voltages are below 4.2V for x-axis actuation and 1.76V for y-axis actuation, respectively.
| Original language | English |
|---|---|
| Pages | 540-543 |
| Number of pages | 4 |
| Publication status | Published - 2002 Jan 1 |
| Event | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States Duration: 2002 Jan 20 → 2002 Jan 24 |
Conference
| Conference | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 |
|---|---|
| Country | United States |
| City | Las Vegas, NV |
| Period | 02/1/20 → 02/1/24 |
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering
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Cho, I. J., Yun, K. S., Lee, H. K., Yoon, J. B., & Yoon, E. (2002). A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars. 540-543. Paper presented at 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002, Las Vegas, NV, United States.