A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars

Il Joo Cho, Kwang Seok Yun, Hyung kew Lee, Jun Bo Yoon, Euisik Yoon

Research output: Contribution to conferencePaper

33 Citations (Scopus)

Abstract

In this paper, a new micromirror structure has been proposed and fabricated. The proposed micromirror is electromagnetically actuated along two-axis at low voltage using an external magnetic field. The mirror plates and torsion bars are made of bulk silicon and the actuation coils are made of electroplated copper. The maximum deflection angles have been measured as ±4.35° for x-axis actuation and ±15.7° for y-axis actuation. The actuation voltages are below 4.2V for x-axis actuation and 1.76V for y-axis actuation, respectively.

Original languageEnglish
Pages540-543
Number of pages4
Publication statusPublished - 2002 Jan 1
Event15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States
Duration: 2002 Jan 202002 Jan 24

Conference

Conference15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002
CountryUnited States
CityLas Vegas, NV
Period02/1/2002/1/24

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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    Cho, I. J., Yun, K. S., Lee, H. K., Yoon, J. B., & Yoon, E. (2002). A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars. 540-543. Paper presented at 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002, Las Vegas, NV, United States.