A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars

Il Joo Cho; Kwang Seok Yun; Hyung kew Lee; Jun Bo Yoon; Euisik Yoon

A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars

Il Joo Cho, Kwang Seok Yun, Hyung kew Lee, Jun Bo Yoon, Euisik Yoon

Yonsei Advanced Science Institute

Research output: Contribution to conference › Paper › peer-review

33 Citations (Scopus)

Abstract

In this paper, a new micromirror structure has been proposed and fabricated. The proposed micromirror is electromagnetically actuated along two-axis at low voltage using an external magnetic field. The mirror plates and torsion bars are made of bulk silicon and the actuation coils are made of electroplated copper. The maximum deflection angles have been measured as ±4.35° for x-axis actuation and ±15.7° for y-axis actuation. The actuation voltages are below 4.2V for x-axis actuation and 1.76V for y-axis actuation, respectively.

Original language	English
Pages	540-543
Number of pages	4
Publication status	Published - 2002
Event	15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States Duration: 2002 Jan 20 → 2002 Jan 24

Conference

Conference	15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002
Country	United States
City	Las Vegas, NV
Period	02/1/20 → 02/1/24

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Mechanical Engineering
Electrical and Electronic Engineering

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Cite this

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title = "A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars",

abstract = "In this paper, a new micromirror structure has been proposed and fabricated. The proposed micromirror is electromagnetically actuated along two-axis at low voltage using an external magnetic field. The mirror plates and torsion bars are made of bulk silicon and the actuation coils are made of electroplated copper. The maximum deflection angles have been measured as ±4.35° for x-axis actuation and ±15.7° for y-axis actuation. The actuation voltages are below 4.2V for x-axis actuation and 1.76V for y-axis actuation, respectively.",

author = "Cho, {Il Joo} and Yun, {Kwang Seok} and Lee, {Hyung kew} and Yoon, {Jun Bo} and Euisik Yoon",

note = "Copyright: Copyright 2004 Elsevier Science B.V., Amsterdam. All rights reserved.; 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 ; Conference date: 20-01-2002 Through 24-01-2002",

year = "2002",

language = "English",

pages = "540--543",

}

A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars. / Cho, Il Joo; Yun, Kwang Seok; Lee, Hyung kew; Yoon, Jun Bo; Yoon, Euisik.

2002. 540-543 Paper presented at 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002, Las Vegas, NV, United States.

Research output: Contribution to conference › Paper › peer-review

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T1 - A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars

AU - Cho, Il Joo

AU - Yun, Kwang Seok

AU - Lee, Hyung kew

AU - Yoon, Jun Bo

AU - Yoon, Euisik

PY - 2002

Y1 - 2002

N2 - In this paper, a new micromirror structure has been proposed and fabricated. The proposed micromirror is electromagnetically actuated along two-axis at low voltage using an external magnetic field. The mirror plates and torsion bars are made of bulk silicon and the actuation coils are made of electroplated copper. The maximum deflection angles have been measured as ±4.35° for x-axis actuation and ±15.7° for y-axis actuation. The actuation voltages are below 4.2V for x-axis actuation and 1.76V for y-axis actuation, respectively.

AB - In this paper, a new micromirror structure has been proposed and fabricated. The proposed micromirror is electromagnetically actuated along two-axis at low voltage using an external magnetic field. The mirror plates and torsion bars are made of bulk silicon and the actuation coils are made of electroplated copper. The maximum deflection angles have been measured as ±4.35° for x-axis actuation and ±15.7° for y-axis actuation. The actuation voltages are below 4.2V for x-axis actuation and 1.76V for y-axis actuation, respectively.

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T2 - 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002

Y2 - 20 January 2002 through 24 January 2002

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