Nanoparticle monitoring is very important due to their serious health hazard, while personal devices for monitoring them have not been developed yet. To accurately monitor airborne nanoparticles at points of interest on real-time basis, we developed a high-performance MEMS-based condensation particle counter (CPC). Our system could detect extremely small particles (8.6 nm) with high accuracy (deviation within 3.8 % in number concentration), showing high performance comparable to the reference CPC.
|Title of host publication||2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019|
|Publisher||Institute of Electrical and Electronics Engineers Inc.|
|Number of pages||3|
|Publication status||Published - 2019 Jan|
|Event||32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of|
Duration: 2019 Jan 27 → 2019 Jan 31
|Name||Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)|
|Conference||32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019|
|Country/Territory||Korea, Republic of|
|Period||19/1/27 → 19/1/31|
Bibliographical noteFunding Information:
This work was supported by Samsung Research Funding & Incubation Center of Samsung Electronics under Project Number SRFC-TA1803-05.
© 2019 IEEE.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering