A mems tunable capacitor based on plastically deformed vertical comb SETS

Jongbaeg Kim, Liwei Lin

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

We report microfabricated tunable capacitors based on plastically deformed vertical comb sets using a batch process. The arrangement of cascaded comb finger sets and the uniqueness of the angular vertical comb actuators enable large tuning ratio with a small angular displacement. The capacitors are made of 50μm-thick single-crystal silicon on SOI wafer and actuated by self-aligned vertical comb-sets giving a tuning ratio of 4.93 from 0.194 to 0.96pF with a tuning voltage of 100 Volts. As such, this tunable capacitor could find applications in RF communication such as parametric amplifiers, harmonic frequency generators and voltage-controlled oscillators.

Original languageEnglish
Article numberIMECE2004-62135
Pages (from-to)325-330
Number of pages6
JournalAmerican Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
DOIs
Publication statusPublished - 2004 Jan 1
Event2004 ASME International Mechanical Engineering Congress and Exposition, IMECE - Anaheim, CA, United States
Duration: 2004 Nov 132004 Nov 19

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Capacitors
Tuning
Parametric amplifiers
Variable frequency oscillators
Actuators
Single crystals
Silicon
Communication
Electric potential

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

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abstract = "We report microfabricated tunable capacitors based on plastically deformed vertical comb sets using a batch process. The arrangement of cascaded comb finger sets and the uniqueness of the angular vertical comb actuators enable large tuning ratio with a small angular displacement. The capacitors are made of 50μm-thick single-crystal silicon on SOI wafer and actuated by self-aligned vertical comb-sets giving a tuning ratio of 4.93 from 0.194 to 0.96pF with a tuning voltage of 100 Volts. As such, this tunable capacitor could find applications in RF communication such as parametric amplifiers, harmonic frequency generators and voltage-controlled oscillators.",
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AB - We report microfabricated tunable capacitors based on plastically deformed vertical comb sets using a batch process. The arrangement of cascaded comb finger sets and the uniqueness of the angular vertical comb actuators enable large tuning ratio with a small angular displacement. The capacitors are made of 50μm-thick single-crystal silicon on SOI wafer and actuated by self-aligned vertical comb-sets giving a tuning ratio of 4.93 from 0.194 to 0.96pF with a tuning voltage of 100 Volts. As such, this tunable capacitor could find applications in RF communication such as parametric amplifiers, harmonic frequency generators and voltage-controlled oscillators.

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