Abstract
We report microfabricated tunable capacitors based on plastically deformed vertical comb sets using a batch process. The arrangement of cascaded comb finger sets and the uniqueness of the angular vertical comb actuators enable large tuning ratio with a small angular displacement. The capacitors are made of 50μm-thick single-crystal silicon on SOI wafer and actuated by self-aligned vertical comb-sets giving a tuning ratio of 4.93 from 0.194 to 0.96pF with a tuning voltage of 100 Volts. As such, this tunable capacitor could find applications in RF communication such as parametric amplifiers, harmonic frequency generators and voltage-controlled oscillators.
| Original language | English |
|---|---|
| Article number | IMECE2004-62135 |
| Pages (from-to) | 325-330 |
| Number of pages | 6 |
| Journal | American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS |
| DOIs | |
| Publication status | Published - 2004 |
| Event | 2004 ASME International Mechanical Engineering Congress and Exposition, IMECE - Anaheim, CA, United States Duration: 2004 Nov 13 → 2004 Nov 19 |
All Science Journal Classification (ASJC) codes
- Engineering(all)