We report microfabricated tunable capacitors based on plastically deformed vertical comb sets using a batch process. The arrangement of cascaded comb finger sets and the uniqueness of the angular vertical comb actuators enable large tuning ratio with a small angular displacement. The capacitors are made of 50μm-thick single-crystal silicon on SOI wafer and actuated by self-aligned vertical comb-sets giving a tuning ratio of 4.93 from 0.194 to 0.96pF with a tuning voltage of 100 Volts. As such, this tunable capacitor could find applications in RF communication such as parametric amplifiers, harmonic frequency generators and voltage-controlled oscillators.
|Number of pages||6|
|Journal||American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS|
|Publication status||Published - 2004 Jan 1|
|Event||2004 ASME International Mechanical Engineering Congress and Exposition, IMECE - Anaheim, CA, United States|
Duration: 2004 Nov 13 → 2004 Nov 19
All Science Journal Classification (ASJC) codes