Characterization of pitch and roll motions of the slider in the hard disk gimbal system is important to achieve higher aerial recording densities. This paper describes a novel piezoresistive-type microsensor that could be directly mounted on the existing slider/gimbal system of a hard disk drive to simultaneously measure the pitch and roll angles of the slider. The size of the fabricated microsensor is designed as 1mm×1mm×0.1mm for picoslider applications and the sensor is fabricated by a silicon micromachining process for mass production. The dynamic behavior of the system is slightly altered as expected in a simulation after the sensor is mounted on the slider and the fundamental frequency shift of pitch and roll motion is calculated to be less than 5% of the original system but it is believed that this sensor could provide the best in situ measurement than other currently existing methods. Experimentally, the prototype sensor is capable of detecting pitch and roll angles within ± 3° and the performance is compared with interferometric measurement data and the mismatch is nominally within 14% in average.
|Number of pages||10|
|Journal||Sensors and Actuators, A: Physical|
|Publication status||Published - 2004 Sep 1|
|Event||Selected Papers from Transducers 03 - Boston, MA, United States|
Duration: 2003 Jun 8 → 2003 Jun 12
Bibliographical noteFunding Information:
This work is supported in part by an NSF GOALI grant (CMS-009600) and a gift from Seagate Technology Inc. The devices were fabricated in the UC-Berkeley Microfabrication Laboratory. The authors thank to Mr. Chi-Chen Lee for the discussion on Piezoresistors and Mr. Hyuck Choo for his help on Wyko measurement.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering