A micro pitch and roll motion sensor

Jongbaeg Kim, Liwei Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes a novel piezoresistive-type microsensor that could be directly mounted on the existing slider/gimbal system of a hard disk drive to simultaneously measure the pitch and roll angles of the slider. The size of the fabricated microsensor is designed as 1 mm x 1 mm x 0.1 mm for picoslider applications. The dynamic behavior of the system is slightly altered as expected in a simulation after the sensor is mounted on the slider and the fundamental frequency shift of pitch and roll motion is calculated to be less than 5% of the original system. Experimentally, the sensor performance is compared with interferometric measurement data and the mismatch is nominally within 14% in average.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1387-1390
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
Publication statusPublished - 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 2003 Jun 82003 Jun 12

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume2

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period03/6/803/6/12

Bibliographical note

Funding Information:
This work is supported in part by an NSF GOALI grant (CMS-009600) and a gift from Seagate Technology Inc. The devices were fabricated in the UC-Berkeley Microfabrication Laboratory. The authors thank to Mr. Chi-Chen Lee for the discussion on Piezoresistors and Mr. Hyuck Choo for his help on Wyko measurement.

Publisher Copyright:
© 2003 IEEE.

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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