A micro pitch and roll motion sensor

Jongbaeg Kim, Liwei Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes a novel piezoresistive-type microsensor that could be directly mounted on the existing slider/gimbal system of a hard disk drive to simultaneously measure the pitch and roll angles of the slider. The size of the fabricated microsensor is designed as 1 mm x 1 mm x 0.1 mm for picoslider applications. The dynamic behavior of the system is slightly altered as expected in a simulation after the sensor is mounted on the slider and the fundamental frequency shift of pitch and roll motion is calculated to be less than 5% of the original system. Experimentally, the sensor performance is compared with interferometric measurement data and the mismatch is nominally within 14% in average.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1387-1390
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
Publication statusPublished - 2003 Jan 1
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 2003 Jun 82003 Jun 12

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume2

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period03/6/803/6/12

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All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Kim, J., & Lin, L. (2003). A micro pitch and roll motion sensor. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 1387-1390). [1217033] (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1217033