This paper describes a novel piezoresistive-type microsensor that could be directly mounted on the existing slider/gimbal system of a hard disk drive to simultaneously measure the pitch and roll angles of the slider. The size of the fabricated microsensor is designed as 1 mm x 1 mm x 0.1 mm for picoslider applications. The dynamic behavior of the system is slightly altered as expected in a simulation after the sensor is mounted on the slider and the fundamental frequency shift of pitch and roll motion is calculated to be less than 5% of the original system. Experimentally, the sensor performance is compared with interferometric measurement data and the mismatch is nominally within 14% in average.
|Title of host publication||TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers|
|Publisher||Institute of Electrical and Electronics Engineers Inc.|
|Number of pages||4|
|ISBN (Electronic)||0780377311, 9780780377318|
|Publication status||Published - 2003|
|Event||12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States|
Duration: 2003 Jun 8 → 2003 Jun 12
|Name||TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers|
|Other||12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers|
|Period||03/6/8 → 03/6/12|
Bibliographical noteFunding Information:
This work is supported in part by an NSF GOALI grant (CMS-009600) and a gift from Seagate Technology Inc. The devices were fabricated in the UC-Berkeley Microfabrication Laboratory. The authors thank to Mr. Chi-Chen Lee for the discussion on Piezoresistors and Mr. Hyuck Choo for his help on Wyko measurement.
© 2003 IEEE.
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering