A microactuator for a high-density hard disk drive

Dong Woo Cho; Jong Young Kim; Sang Jo Lee; Ji Whang Park; Seok Wloon Choi; Seung Do Ann

doi:10.1115/IMECE2000-1108

A microactuator for a high-density hard disk drive

Dong Woo Cho, Jong Young Kim, Sang Jo Lee, Ji Whang Park, Seok Wloon Choi, Seung Do Ann

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper reports the design and fabrication of a microelectro-mechanical-system (MEMS)-based electrostatic angular microactuator for a dual-stage servo. We propose a new driving scheme that uses the vector sum of the force generated by parallel plate and comb-finger. To maximize the driving moment, the moving and fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. We designed a 2-mm diameter microactuator that can position the pico-slider over ± 1 μm stroke using under 18 volts with a 1 kHz flexural natural frequency for a 2 kHz fine-tracking servo.

Original language	English
Title of host publication	Micro-Electro-Mechanical Systems (MEMS)
Publisher	American Society of Mechanical Engineers (ASME)
Pages	307-312
Number of pages	6
ISBN (Electronic)	9780791819005
DOIs	https://doi.org/10.1115/IMECE2000-1108
Publication status	Published - 2000
Event	ASME 2000 International Mechanical Engineering Congress and Exposition, IMECE 2000 - Orlando, United States Duration: 2000 Nov 5 → 2000 Nov 10

Publication series

Name	ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume	2000-AB

Conference

Conference	ASME 2000 International Mechanical Engineering Congress and Exposition, IMECE 2000
Country/Territory	United States
City	Orlando
Period	00/11/5 → 00/11/10

Bibliographical note

Funding Information:
This work was funded by the Korea Science and Engineering Foundation(KOSEF) through the Center for Information Storage Device(CISD) Grant No. 1999G0102.

Funding Information:
This work was funded by the Korea Science and Foundation(KOSEF) through the Center for Storage Device(CISD) Grant No. 1999G0102.

Publisher Copyright:
Copyright © 2000 by ASME

All Science Journal Classification (ASJC) codes

Mechanical Engineering

Access to Document

10.1115/IMECE2000-1108

Cite this

Cho, D. W., Kim, J. Y., Lee, S. J., Park, J. W., Choi, S. W., & Ann, S. D. (2000). A microactuator for a high-density hard disk drive. In Micro-Electro-Mechanical Systems (MEMS) (pp. 307-312). (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); Vol. 2000-AB). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/IMECE2000-1108

@inproceedings{7aa209f88bec4d609ea4eeed194ca758,

title = "A microactuator for a high-density hard disk drive",

abstract = "This paper reports the design and fabrication of a microelectro-mechanical-system (MEMS)-based electrostatic angular microactuator for a dual-stage servo. We propose a new driving scheme that uses the vector sum of the force generated by parallel plate and comb-finger. To maximize the driving moment, the moving and fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. We designed a 2-mm diameter microactuator that can position the pico-slider over ± 1 μm stroke using under 18 volts with a 1 kHz flexural natural frequency for a 2 kHz fine-tracking servo.",

author = "Cho, {Dong Woo} and Kim, {Jong Young} and Lee, {Sang Jo} and Park, {Ji Whang} and Choi, {Seok Wloon} and Ann, {Seung Do}",

note = "Funding Information: This work was funded by the Korea Science and Engineering Foundation(KOSEF) through the Center for Information Storage Device(CISD) Grant No. 1999G0102. Funding Information: This work was funded by the Korea Science and Foundation(KOSEF) through the Center for Storage Device(CISD) Grant No. 1999G0102. Publisher Copyright: Copyright {\textcopyright} 2000 by ASME; ASME 2000 International Mechanical Engineering Congress and Exposition, IMECE 2000 ; Conference date: 05-11-2000 Through 10-11-2000",

year = "2000",

doi = "10.1115/IMECE2000-1108",

language = "English",

series = "ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)",

publisher = "American Society of Mechanical Engineers (ASME)",

pages = "307--312",

booktitle = "Micro-Electro-Mechanical Systems (MEMS)",

}

Cho, DW, Kim, JY, Lee, SJ, Park, JW, Choi, SW & Ann, SD 2000, A microactuator for a high-density hard disk drive. in Micro-Electro-Mechanical Systems (MEMS). ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE), vol. 2000-AB, American Society of Mechanical Engineers (ASME), pp. 307-312, ASME 2000 International Mechanical Engineering Congress and Exposition, IMECE 2000, Orlando, United States, 00/11/5. https://doi.org/10.1115/IMECE2000-1108

A microactuator for a high-density hard disk drive. / Cho, Dong Woo; Kim, Jong Young; Lee, Sang Jo et al.

Micro-Electro-Mechanical Systems (MEMS). American Society of Mechanical Engineers (ASME), 2000. p. 307-312 (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); Vol. 2000-AB).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - A microactuator for a high-density hard disk drive

AU - Cho, Dong Woo

AU - Kim, Jong Young

AU - Lee, Sang Jo

AU - Park, Ji Whang

AU - Choi, Seok Wloon

AU - Ann, Seung Do

N1 - Funding Information: This work was funded by the Korea Science and Engineering Foundation(KOSEF) through the Center for Information Storage Device(CISD) Grant No. 1999G0102. Funding Information: This work was funded by the Korea Science and Foundation(KOSEF) through the Center for Storage Device(CISD) Grant No. 1999G0102. Publisher Copyright: Copyright © 2000 by ASME

PY - 2000

Y1 - 2000

N2 - This paper reports the design and fabrication of a microelectro-mechanical-system (MEMS)-based electrostatic angular microactuator for a dual-stage servo. We propose a new driving scheme that uses the vector sum of the force generated by parallel plate and comb-finger. To maximize the driving moment, the moving and fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. We designed a 2-mm diameter microactuator that can position the pico-slider over ± 1 μm stroke using under 18 volts with a 1 kHz flexural natural frequency for a 2 kHz fine-tracking servo.

AB - This paper reports the design and fabrication of a microelectro-mechanical-system (MEMS)-based electrostatic angular microactuator for a dual-stage servo. We propose a new driving scheme that uses the vector sum of the force generated by parallel plate and comb-finger. To maximize the driving moment, the moving and fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. We designed a 2-mm diameter microactuator that can position the pico-slider over ± 1 μm stroke using under 18 volts with a 1 kHz flexural natural frequency for a 2 kHz fine-tracking servo.

UR - http://www.scopus.com/inward/record.url?scp=85120000338&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85120000338&partnerID=8YFLogxK

U2 - 10.1115/IMECE2000-1108

DO - 10.1115/IMECE2000-1108

M3 - Conference contribution

AN - SCOPUS:85120000338

T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

SP - 307

EP - 312

BT - Micro-Electro-Mechanical Systems (MEMS)

PB - American Society of Mechanical Engineers (ASME)

T2 - ASME 2000 International Mechanical Engineering Congress and Exposition, IMECE 2000

Y2 - 5 November 2000 through 10 November 2000

ER -

A microactuator for a high-density hard disk drive

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