This paper reports the design and fabrication of a microelectro-mechanical-system (MEMS)-based electrostatic angular microactuator for a dual-stage servo. We propose a new driving scheme that uses the vector sum of the force generated by parallel plate and comb-finger. To maximize the driving moment, the moving and fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. We designed a 2-mm diameter microactuator that can position the pico-slider over ± 1 μm stroke using under 18 volts with a 1 kHz flexural natural frequency for a 2 kHz fine-tracking servo.
|Title of host publication||Micro-Electro-Mechanical Systems (MEMS)|
|Publisher||American Society of Mechanical Engineers (ASME)|
|Number of pages||6|
|Publication status||Published - 2000|
|Event||ASME 2000 International Mechanical Engineering Congress and Exposition, IMECE 2000 - Orlando, United States|
Duration: 2000 Nov 5 → 2000 Nov 10
|Name||ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)|
|Conference||ASME 2000 International Mechanical Engineering Congress and Exposition, IMECE 2000|
|Period||00/11/5 → 00/11/10|
Bibliographical noteFunding Information:
This work was funded by the Korea Science and Engineering Foundation(KOSEF) through the Center for Information Storage Device(CISD) Grant No. 1999G0102.
This work was funded by the Korea Science and Foundation(KOSEF) through the Center for Storage Device(CISD) Grant No. 1999G0102.
Copyright © 2000 by ASME
All Science Journal Classification (ASJC) codes
- Mechanical Engineering