A micromachined finite coplanar line-to-silicon micromachined waveguide transition for millimeter and submillimeter wave applications

Yongshik Lee, James P. Becker, Jack R. East, Linda P.B. Katehi

Research output: Contribution to journalArticle

3 Citations (Scopus)


A finite ground coplanar (FGC) line-to-waveguide transition utilizing a novel, free-standing printed E-plane probe has been demonstrated in W-band (75-110GHz). One way to improve the performance of such a transition and to extend its utility well into the submillimeter range is to thin the supporting substrate beneath the probe. This paper presents the W-band performance of a fully micromachined finite ground coplanar line-to-silicon diamond waveguide transition with the substrate beneath the probe entirely removed, thus forming a free-stranding metal structure.

Original languageEnglish
Pages (from-to)1871-1874
Number of pages4
JournalIEEE MTT-S International Microwave Symposium Digest
Publication statusPublished - 2002 Jan 1


All Science Journal Classification (ASJC) codes

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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