Abstract
A finite ground coplanar (FGC) line-to-waveguide transition utilizing a novel, free-standing printed E-plane probe has been demonstrated in W-band (75-110GHz). One way to improve the performance of such a transition and to extend its utility well into the submillimeter range is to thin the supporting substrate beneath the probe. This paper presents the W-band performance of a fully micromachined finite ground coplanar line-to-silicon diamond waveguide transition with the substrate beneath the probe entirely removed, thus forming a free-stranding metal structure.
| Original language | English |
|---|---|
| Pages (from-to) | 1871-1874 |
| Number of pages | 4 |
| Journal | IEEE MTT-S International Microwave Symposium Digest |
| Volume | 3 |
| DOIs | |
| Publication status | Published - 2002 Jan 1 |
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All Science Journal Classification (ASJC) codes
- Radiation
- Condensed Matter Physics
- Electrical and Electronic Engineering
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A micromachined finite coplanar line-to-silicon micromachined waveguide transition for millimeter and submillimeter wave applications. / Lee, Yongshik; Becker, James P.; East, Jack R.; Katehi, Linda P.B.
In: IEEE MTT-S International Microwave Symposium Digest, Vol. 3, 01.01.2002, p. 1871-1874.Research output: Contribution to journal › Article
TY - JOUR
T1 - A micromachined finite coplanar line-to-silicon micromachined waveguide transition for millimeter and submillimeter wave applications
AU - Lee, Yongshik
AU - Becker, James P.
AU - East, Jack R.
AU - Katehi, Linda P.B.
PY - 2002/1/1
Y1 - 2002/1/1
N2 - A finite ground coplanar (FGC) line-to-waveguide transition utilizing a novel, free-standing printed E-plane probe has been demonstrated in W-band (75-110GHz). One way to improve the performance of such a transition and to extend its utility well into the submillimeter range is to thin the supporting substrate beneath the probe. This paper presents the W-band performance of a fully micromachined finite ground coplanar line-to-silicon diamond waveguide transition with the substrate beneath the probe entirely removed, thus forming a free-stranding metal structure.
AB - A finite ground coplanar (FGC) line-to-waveguide transition utilizing a novel, free-standing printed E-plane probe has been demonstrated in W-band (75-110GHz). One way to improve the performance of such a transition and to extend its utility well into the submillimeter range is to thin the supporting substrate beneath the probe. This paper presents the W-band performance of a fully micromachined finite ground coplanar line-to-silicon diamond waveguide transition with the substrate beneath the probe entirely removed, thus forming a free-stranding metal structure.
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U2 - 10.1109/MWSYM.2002.1012228
DO - 10.1109/MWSYM.2002.1012228
M3 - Article
AN - SCOPUS:0036065926
VL - 3
SP - 1871
EP - 1874
JO - IEEE MTT-S International Microwave Symposium Digest
JF - IEEE MTT-S International Microwave Symposium Digest
SN - 0149-645X
ER -